MPXM12GS FREESCALE | Alldatasheet
Document overview
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- PDF pages: 20
Technical content
Features
- Low Cost
- Patented Silicon Shear Stress Strain Gauge Design
- Ratiometric to Supply Voltage
- Easy to Use Chip Carrier Package Options
- Gauge Options
- Durable Epoxy Package
ORDERING INFORMATION
No. # of Ports Pressure Type Device MarkingNone Single Dual Gauge Differential Absolute Unibody Package (MPX12 Series) MPX12D Tray 344 • • MPX12D MPX12DP Tray 344C • • MPX12DP MPX12GP Tray 344B • • MPX12GP Small Outline Package (MPXV12 Series) MPXV12DP Tray 1351 • • MPXV12DP MPXV12GP Tray 1369 • • MPXV12GP MPXV12GW6U Rail 1735 • • MPXV12GW MPXV12GW7U Rail 1560 • • MPXV12GW MPXM12GS Rail 1320A • • MPXM12GS MPXM12GST1 Tape & Reel 1320A • • MPXM12GS MPX12 0 to 10 kPa (0 to 1.45 psi) 55 mV Full Scale Span (Typical) Series Application Examples
- Air Movement Control
- Environmental Control Systems
- Level Indicators
- Leak Detection
- Medical Instrumentation
- Industrial Controls
- Pneumatic Control Systems
- Robotics
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Table 1. Operating Characteristics (VS = 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
- 1.0 kPa (kiloPascal) equals 0.145 psi.
- Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.
- Full Scale Span (V FSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
- Offset (V OFF) is defined as the output voltage at the minimum rated pressure.
- Response Time is defined as the time form the incremental c hange in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
- Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized.
- Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
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Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. Figure 1. Uncompensated Pressure Sensor Schematic vacuum side (P2) relative to the pressure side (P1). Table 2. Maximum Ratings
- Exposure beyond the specified limits may c ause permanent damage or degradation to the device.
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Figure 4. Cross-Sectional Diagram (not to scale) compatibility in your application.
STYLE 1: PIN 1. GROUND 2. + OUTPUT 3. + SUPPLY 4. – OUTPUT STYLE 2: PIN 1. V CC2. – SUPPLY 3. + SUPPLY 4. GROUND MAM0.136 (0.005) T 1234PIN 1 R N L G F D 4 PL SEATING PLANE –T– C M J B –A– DIM MIN MAX MIN MAX MILLIMETERSINCHES A 0.595 0.630 15.11 16.00 B 0.514 0.534 13.06 13.56 C 0.200 0.220 5.08 5.59 D 0.016 0.020 0.41 0.51 F 0.048 0.064 1.22 1.63 G 0.100 BSC 2.54 BSC J 0.014 0.016 0.36 0.40 L 0.695 0.725 17.65 18.42 M 30 NOM 30 NOM N 0.475 0.495 12.07 12.57 R 0.430 0.450 10.92 11.43 /C0095/C0095 NOTES: 1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION –A– IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). STYLE 3: PIN 1. GND 2. –VOUT 3. VS 4. +VOUT DAMBAR TRIM ZONE: F THIS IS INCLUDED WITHIN DIM. “F” 8 PL 1 23 4 Y Z Y 0.048 0.052 1.22 1.32 Z 0.106 0.118 2.68 3.00 /C0083/C0084/C0089/C0076/C0069/C0032/C0049/C0058 /C0080/C0073/C0078/C0032/C0049/C0046 /C0071/C0082/C0079/C0085/C0078/C0068 /C0050/C0046 /C0043/C0032/C0079/C0085/C0084/C0080/C0085/C0084 /C0051/C0046 /C0043/C0032/C0083/C0085/C0080/C0080/C0076/C0089 /C0052/C0046 /C0045/C0032/C0079/C0085/C0084/C0080/C0085/C0084 /C0083/C0069/C0065/C0084/C0073/C0078/C0071 /C0080/C0076/C0065/C0078/C0069 B N R C J –T– D F U H L PORT #1 POSITIVE PRESSURE PIN 1 –A– –Q– S K G 4 PL –P– /C0083/C0081/C0077/C0048/C0046/C0050/C0053/C0032/C0040/C0048/C0046/C0048/C0049/C0048/C0041/C0084 /C0083/C0083/C0077/C0048/C0046/C0049/C0051/C0032/C0040/C0048/C0046/C0048/C0048/C0053/C0041 /C0081/C0083/C0084 /C0049/C0050 /C0051/C0052 /C0078/C0079/C0084/C0069/C0083/C0058 /C0049/C0046 /C0068/C0073/C0077/C0069/C0078/C0083/C0073/C0079/C0078/C0073/C0078/C0071/C0032/C0065/C0078/C0068/C0032/C0084/C0079/C0076/C0069/C0082/C0065/C0078/C0067/C0073/C0078/C0071/C0032/C0080/C0069/C0082/C0032/C0065/C0078/C0083/C0073 /C0089/C0049/C0052/C0046/C0053/C0044/C0032/C0049/C0057/C0056/C0050/C0046 /C0050/C0046 /C0067/C0079/C0078/C0084/C0082/C0079/C0076/C0076/C0073/C0078/C0071/C0032/C0068/C0073/C0077/C0069/C0078/C0083/C0073/C0079/C0078/C0058/C0032/C0073/C0078/C0067/C0072/C0046 /C0068/C0073/C0077 /C0077/C0073/C0078 /C0077/C0065/C0088 /C0077/C0073/C0078 /C0077/C0065/C0088 /C0077/C0073/C0076/C0076/C0073/C0077/C0069/C0084/C0069/C0082/C0083/C0073/C0078/C0067/C0072/C0069/C0083 /C0065/C0049/C0046/C0049/C0052/C0053 /C0049/C0046/C0049/C0055/C0053 /C0050/C0057/C0046/C0048/C0056 /C0050/C0057/C0046/C0056/C0053 /C0066/C0048/C0046/C0054/C0056/C0053 /C0048/C0046/C0055/C0049/C0053 /C0049/C0055/C0046/C0052/C0048 /C0049/C0056/C0046/C0049/C0054 /C0067/C0048/C0046/C0051/C0048/C0053 /C0048/C0046/C0051/C0050/C0053 /C0055/C0046/C0055/C0053 /C0056/C0046/C0050/C0054 /C0068/C0048/C0046/C0048/C0049/C0054 /C0048/C0046/C0048/C0050/C0048 /C0048/C0046/C0052/C0049 /C0048/C0046/C0053/C0049 /C0070/C0048/C0046/C0048/C0052/C0056 /C0048/C0046/C0048/C0054/C0052 /C0049/C0046/C0050/C0050 /C0049/C0046/C0054/C0051 /C0071/C0048/C0046/C0049/C0048/C0048/C0032/C0066/C0083/C0067 /C0050/C0046/C0053/C0052/C0032/C0066/C0083/C0067 /C0072/C0048/C0046/C0049/C0056/C0050 /C0048/C0046/C0049/C0057/C0052 /C0052/C0046/C0054/C0050 /C0052/C0046/C0057/C0051 /C0074/C0048/C0046/C0048/C0049/C0052 /C0048/C0046/C0048/C0049/C0054 /C0048/C0046/C0051/C0054 /C0048/C0046/C0052/C0049 /C0075/C0048/C0046/C0054/C0057/C0053 /C0048/C0046/C0055/C0050/C0053 /C0049/C0055/C0046/C0054/C0053 /C0049/C0056/C0046/C0052/C0050 /C0076/C0048/C0046/C0050/C0057/C0048 /C0048/C0046/C0051/C0048/C0048 /C0055/C0046/C0051/C0055 /C0055/C0046/C0054/C0050 /C0078/C0048/C0046/C0052/C0050/C0048 /C0048/C0046/C0052/C0052/C0048 /C0049/C0048/C0046/C0054/C0055 /C0049/C0049/C0046/C0049/C0056 /C0080/C0048/C0046/C0049/C0053/C0051 /C0048/C0046/C0049/C0053/C0057 /C0051/C0046/C0056/C0057 /C0052/C0046/C0048/C0052 /C0081/C0048/C0046/C0049/C0053/C0051 /C0048/C0046/C0049/C0053/C0057 /C0051/C0046/C0056/C0057 /C0052/C0046/C0048/C0052 /C0082/C0048/C0046/C0050/C0051/C0048 /C0048/C0046/C0050/C0053/C0048 /C0053/C0046/C0056/C0052 /C0054/C0046/C0051/C0053 /C0083 /C0085/C0048/C0046/C0057/C0049/C0048/C0032/C0066/C0083/C0067 /C0050/C0051/C0046/C0049 /C0049/C0032/C0066/C0083/C0067 /C0048/C0046/C0050/C0050/C0048 /C0048/C0046/C0050/C0052/C0048 /C0053/C0046/C0053/C0057 /C0054/C0046/C0049/C0048 (P1)
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STYLE 1: PIN 1. GROUND 2. + OUTPUT 3. + SUPPLY 4. – OUTPUT PORT #2 PORT #1 PORT #2 VACUUM SEATING PLANE SEATING PLANE K S W H L U F G D PORT #1 POSITIVE PRESSURE –Q– 12 4 3PIN 1 4 PL –P– SSM0.13 (0.005) Q ST B N J C V R NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM MIN MAX MIN MAX MILLIMETERSINCHES A 1.145 1.175 29.08 29.85 B 0.685 0.715 17.40 18.16 C 0.405 0.435 10.29 11.05 D 0.016 0.020 0.41 0.51 F 0.048 0.064 1.22 1.63 G 0.100 BSC 2.54 BSC H 0.182 0.194 4.62 4.93 J 0.014 0.016 0.36 0.41 K 0.695 0.725 17.65 18.42 L 0.290 0.300 7.37 7.62 N 0.420 0.440 10.67 11.18 P 0.153 0.159 3.89 4.04 Q 0.153 0.159 3.89 4.04 R 0.063 0.083 1.60 2.11 S U 0.910 BSC 23.11 BSC V 0.248 0.278 6.30 7.06 W 0.310 0.330 7.87 8.38 –A– 0.220 0.240 5.59 6.10 (P2) (P1)
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Freescale Semiconductor 11 Pressure PACKAGE DIMENSIONS CASE 1369-01 ISSUE O SMALL OUTLINE PACKAGE NOTES: CONTROLLING DIMENSION: INCH. INTERPRET DIMENSIONS AND TOLERANCES PER ASME Y14.5M, 1994. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR PROTRUSIONS SHALL NOT EXCEED 0.006 (0.152) PER SIDE. DIMENSION "b" DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE 0.008 (0.203) MAXIMUM. N A C 0.004 (0.1) DETAIL G SEATING PLANE P D E e/2 e AM0.004 (0.1) B C A B A0.008 (0.20) BC 8X b
2 PLACES 4 TIPS
F DIM MIN MAX MIN MAX MILLIMETERSINCHES A 0.300 0.330 7.11 7.62 A1 0.002 0.010 0.05 0.25 b 0.038 0.042 0.96 1.07 D 0.465 0.485 11.81 12.32 E E1 0.465 0.485 11.81 12.32 e M 0.270 0.290 6.86 7.36 N 0.080 0.090 2.03 2.28 P 0.009 0.011 0.23 0.28 T 0.115 0.125 2.92 3.17 0.100 BSC 2.54 BSC F 0.245 0.255 6.22 6.47 K 0.120 0.130 3.05 3.30 L 0.061 0.071 1.55 1.80 0˚ 7˚ 0˚ 7˚θ 0.717 BSC 18.21 BSC K M GAGE PLANE DETAIL G L A1θ.014 (0.35)
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Freescale Semiconductor 13 Pressure PACKAGE DIMENSIONS CASE 1735-02 ISSUE B SMALL OUTLINE PACKAGE
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Freescale Semiconductor 15 Pressure PACKAGE DIMENSIONS CASE 1560-03 ISSUE D SMALL OUTLINE PACKAGE
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Freescale Semiconductor 17 Pressure PACKAGE DIMENSIONS CASE 1560-03 ISSUE D SMALL OUTLINE PACKAGE
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Freescale Semiconductor 19 Pressure PACKAGE DIMENSIONS CASE 1320A-02 ISSUE A MPAK PACKAGE
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