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Document overview

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  • PDF pages: 12

Technical content

Features

  • Patented silicon shear st ress strain gauge design
  • Ratiometric to supply voltage
  • Easy to use chip carrier package options
  • 60 mV span (typical)
  • Differential and gauge options Typical applications
  • Air movement control
  • Environmental control systems
  • Level indicators
  • Leak detection
  • Medical instrumentation
  • Industrial controls
  • Pneumatic control systems
  • Robotics

Ordering information

Device name Shipping Package # of Ports Pressure type Device markingNone Single Dual Gauge Differential Absolute Unibody package MPX53D Rail 98ASB42280B • • MPX53D MPX53DP Rail 98ASB14912C • • MPX53DP MPX53GP Rail 98ASB14911C • • MPX53GP MPX53 Unibody packages MPX53 Case 98ASB42280B Front view Pinout MPX53GP Case 98ASB14911C MPX53DP Case 98ASB14912C 1234 GND +VOUT VS -VOUT Pin 1 identification

2 Freescale Semiconductor, Inc. Related Documentation The MPX53 device features and operations are described in a variety of reference manuals, user guides, and application notes. To find the most-current versions of these documents: 1. Go to the Freescale homepage at: http://www.freescale.com/ 2. In the Keyword search box at the top of the page, enter the device number MPX53. 3. In the Refine Your Result pane on the left, click on the Documentation link.

Contents

1 General Description

1.1 Block diagram

Figure 1 shows a schematic of the internal circuitry on the stand-alone pressure sensor chip. Figure 1. Uncompensated pressure sensor schematic

1.2 Pinout

Figure 2. Device pinout (front view) Table 1. Pin functions 1 GND Ground, denoted by notch.

4 Freescale Semiconductor, Inc.

2 Mechanical and Electr ical Specifications

2.1 Maximum ratings

2.2 Operating characteristics

Table 2. Maximum ratings(1)

  1. Exposure beyond the specified limits may caus e permanent damage or degradation to the device.

Table 3. Operating characteristics (VS = 3.0 Vdc, TA = 25 °C unless otherwise noted, P1 > P2)

  1. 1.0 kPa (kiloPascal) equals 0.145 psi.
  2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional

error due to device self-heating.

  1. Full-scale span (V FSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
  2. Offset (V OFF) is defined as the output voltage at the minimum rated pressure.
  3. Response time is defined as the time fo r the incremental change in the output to go from 10% to 90% of its final value when subjected to a

specified step change in pressure.

  1. Warm-up time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized.
  2. Offset stability is the product’s output deviation when subjected to 1000 hours of pulsed pressure, temperature cycling with bias test.

2.3 Voltage output versus ap plied differential pressure

2.4 Temperature compensation

Figure 3 shows the typical output characteristics of the MPX53 series over temperature. sensitive to stresses produced in a thin silicon diaphragm by the applied pressure. thermal expansion of the strain gauge and the diaphragm, as are often encountered in bonded strain gauge pressure sensors. compensated if it is to be used over an extensive temperature range. designing your system using the MPX2053 series sensors.

2.5 Linearity

method measured at the midrange pressure. dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Refer to application note AN3728, for more information regarding media compatibility. Figure 3. Output vs. pressure differential

Freescale Semiconductor, Inc. 7

3 Package Information

3.1 Pressure (P1)/Vacuum (P2) side identification

Freescale designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing silicone gel which isolates the die from the environment. The Freescale MPX53 pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the following table. Part number Case number Pressure (P1) side identifier MPX53D 98ASB42280B Stainless steep cap MPX53DP 98ASB14912C Side with port marking MPX53GP 98ASB14911C Side with port attached

8 Freescale Semiconductor, Inc.

3.2 Package dimensions

This drawing is located at http://cache.freescale.com/files/shared/doc/package_info/98ASB42280B.pdf. Case 98ASB42280B, Unibody package

Freescale Semiconductor, Inc. 9 This drawing is located at http://cache.freescale.com/files/shared/doc/package_info/98ASB14912C.pdf. Case 98ASB14912C, Unibody package

10 Freescale Semiconductor, Inc. This drawing is located at http://cache.freescale.com/files/shared/doc/package_info/98ASB14911C.pdf. Case 98ASB14911C, Unibody package NOTES: DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. CONTROLLING DIMENSION: INCH. D 4 PL F U H L PORT #1 POSITIVE PRESSURE (P1) PIN 1 -A- -Q- S K G -P- SQM0.25 (0.010) T SSM0.13 (0.005) Q ST 12 34 SEATING PLANE B N R C J -T- STYLE 1: PIN 1. GROUND 2. + OUTPUT 3. + SUPPL Y 4 - OUTPUT DIM MIN MAX MIN MAX MILLIMETERSINCHES A 1.145 1.175 29.08 29.85 B 0.685 0.715 17.40 18.16 C 0.305 0.325 7.75 8.26 D 0.016 0.020 0.41 0.51 F 0.048 0.064 1.22 1.63 G 0.100 BSC 2.54 BSC H 0.182 0.194 4.62 4.93 J 0.014 0.016 0.36 0.41 K 0.695 0.725 17.65 18.42 L 0.290 0.300 7.37 7.62 N 0.420 0.440 10.67 11.18 P 0.153 0.159 3.89 4.04 Q 0.153 0.159 3.89 4.04 R 0.230 0.250 5.84 6.35 S U 0.910 BSC 23.11 BSC 0.220 0.240 5.59 6.10

4 Revision History

Table 4. Revision history

  • Updated format.
  • Removed obsolute MPXV53GC7U option and package drawing.
  • Updated package outline drawings with current versions.

Document Number: MPX53 Rev. 7.1 Information in this document is provided solely to enable system and software implementers to use Freescale products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits based on the information in this document. Freescale reserves the right to make changes without further notice to any products herein. Freescale makes no warranty, representation, or guarantee regarding the suitability of its products for any particular purpose, nor does Freescale assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters that may be provided in Freescale data sheets and/or specifications can and do vary in different applications, and actual performance may vary over time. All operating parameters, including “typicals,” must be validated for each customer application by customer’s technical experts. Freescale does not convey any license under its patent rights nor the rights of others. Freescale sells products pursuant to standard terms and conditions of sale, which can be found at the following address: freescale.com/salestermsandconditions. How to Reach Us: Home Page: freescale.com Web Support: freescale.com/support Freescale and the Freescale logos are trademarks of Freescale Semiconductor, Inc., respective owners. © 2007-2009, 2015 Freescale Semiconductor, Inc.