MPX201 MOTOROLA | Alldatasheet
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MOTOROLA “Sar ) wy LALoe 7 SC {DIODES/OPTO} 39E D BM b3b7255 0083508 T EA NOT? T-65-03 X MiPK200 . Ale — MPX201 x (A,AP,B,DP,EP,GYP) X-ducer METHOD FOR NUMBERING DEVICE SILICON PRESSURE SENSOR MPX XX XA _ ABCD
0 TO 29 PSI
MPX — Indicates Motorola prossure X-ducer. _ A. Output pressure rating in kilo pascal (kPa) di- vided by 10. The International Motric System (SI) unit of measure for pressure is a Pascal A (Nowton/Metar2), f OAYR B. Indicates different performance levels in the y 14 2 Elomont oloctrical specification. ( 4 Zp yy, f, Q ( €. Character(s) is an “A” or “D" for absolute or . wWReF ( (-) os differential pressure or G or GV for gauge or Vacuum Port \\\\ ™. %) gauge vacuum. | | 1 od D. AP as the last digit (optional) indicates that the I, unit is supplied with pressure port(s). l Pressure Port EXAMPLE: MPX201D | 200 kPa rango, special electrical performance, differential sensor olotaont, suppliod without port. | VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The voltage output of the X-ducer is directly propor- can be measured with the indicated accuracy. tional to the differential pressure applied. The output voltage of the Differential Element, Dif- The ABSOLUTE Basic Elements and ABSOLUTE _ ferential Ported and Gage Ported sensors increases with Ported Elements have a built in reference vacuum of _ increasing pressure applied to the pressure side relative approximately 0 kPa. The output voltage increases with —_ to the vacuum side. Similarly, output voltago increases increasing pressure relative to ambient pressure (~ 100 —_as increasing vacuum is applied to the vacuum side kPa) applied to the pressure side. Care should be taken _ relative to the pressure side of the Differential units. to limit positive pressure to approximately 100 kPa rel- The output voltage of the Gage Vacuum Ported sensor . ative to ambient so that the total differential operating increases with increasing vacuum (decreasing pres- ia pressure range of 200 kPa is not exceeded. Conversely, sure) applied to the vacuum side with the pressure side \\ the output voltage will decrease as vacuum, relative to at ambient. ambient, is drawn. Vacuum down to the 0 kPa reference . 3).
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MOTOROLA SC {DIODES/OPTO} 39E D M&M b3b7255 0083509 1 EA NOT? T-65-03 | SPAN) MIPXAD | OPERATING CHARACTERISTICS (Vg = 3.0 Vdc, Ta = 25°C unless otherwise noted.) _ _ : 2) ____Characteristies Symbol [tin |__ tye | Max [Unie | Differontial Pressure Range’, Figure 1 Pop = 200 | kPa cH Supply Voltage Vs | 30 | 60 Vde Supply Current [ » | — | 6o = mAde _ OPERATING PRESSURE RANGE — ~ The min and max pressure at which the output will meet the specified operating charactorlstics. SUPPLY VOLTAGE Also called EXCITATION VOLTAGE. The output signal of the device is directly proportional to oxcitation voltage ata givon pressure. —— — _ For example, a typical MPX200 element having Vrgg = 60 mV at Vg = 3.0 V will havo Vrsg = 120 mV at Vg = 6.0 and Vegg = 20 mV at Vg = 1.0 V. > Because of this ratiomotric bohavior a regulated power supply is recommendod. Devices must be powered by constant current or constant voltage. SUPPLY CURRENT ls a function of the input resistance and the supply voltage. In case where constant current excitation modo is used, care must bo given to the limit of the current level such that corresponding excitation voltage is less than 6.0 V. [pr Zero Pressure Offset Figure 1 Vott 0 20 35 | FULL SCALE SPAN Tho span of a device is the output voltage variation givon between 0 pressure and a given _ — pressure, which for full scale span is the maximum recommended operating pressure. Min and max are guarantoed limits for all prossure sensors. ZERO PRESSURE OFFSET This is the signal level given by a sensor with 0 applied pressure. ~ | Min and max are guarantead limits for all pressure sensors. (The output of the sonsor Is given as Voft + span.) SENSITIVITY Is the full scale span divided by the max operating prossure SENSITIVITY = ‘iss . _ Values given are typical. However, rin and max values can be easily obtained. Example: an MPX200 having Vegg = 90 mV at 200 kPa input will have a sensitivity of 90 mV ” 300 kPa 7 9-45 mVIKPa ; ) The sensitivity is assumed to bo the same whatever is the pressure inside operating pressure ~ range. (see § LINEARITY). _ 1007 B-08 4:
MOTOROLA SC {DIODES/OPTO} 39E D M& b3b7255 0083510 & EA MOT? T-65-03 | [ GPA) > MIPSC) | ro i { OPERATING CHARACTERISTICS (Vg = 3.0 Vdc, Ta = 25°C unless otherwise noted,) | Characteristics [_Symbot_| Typ Max Linearity MPX200 £0.05 201 | a MPx201 £0.10 £02 | y»| Pressure Hysteresis4 £0.05 £01 (0 to 200 kPa) | >| Tomporaturo Hysteresis® (— 40°C to +126°C) [ =| 205 = LINEARITY (ERROR) The maximum doviation of the output from a straight line rolationship over the operating pressure range. An MPX200, with max linearity of + 0.01%, with Vegg = 50 mV would havo a maximurn linearity adjustment of + 0.5 nV regardless of the prossuro applicd in tho spocified operating range, This oxtromely good linearity allows the assumption that the same valuo of sensitivity occurs at any point of the operating pressure range. SEE ADDITIONAL DISCUSSION OF LINEARITY (Page 9) PRESSURE HYSTERESIS : The difference in the output at any pressure in the operating pressure range whon this pressure is approached from the minimum operating pressure and when approached frora the maxinurn operating pressure at room temperature. | Pressure hystorosis is givon as a percentage of the full scale span, Example: an MPX200 having a 0.1 prossuro hysteresis with Vegg of 90 mV should have, ( at 100 kPa, a maximum pressure hysteresis of: + 0.1% x 90 mV = = 0.9 mV. . (Tho oxtremoly low pressure hysteresis is related to inhoront olasticity of the silicon dia- phragm.) ‘TEMPERATURE HYSTERESIS 7 The difference In the output at any temperature in the operating temperature range when this temperature is approached from tho minimum operating temperature (~40°C) and when ap- proached from the maximum operating temperature (126°C) at zero pressure applied. Temperature hysteresis is given as a percentage of full scale span. It is related to the stress absorbing capabilities of each constituent in the sensor package. Motorola's pressure sensor dio is mounted in a highly compliant silicone elastomer which is | highly resistant to thermal fatigue. Examplo: similar to pressure hysteresis. . SEE ADDITIONAL DISCUSSION OF HYSTERESIS (Page 9) | ORDERING INFORMATION: | MPX Series “X-ducer" silicon pressure sensors are available in absolute, differential, and gage configurations. Devices are available in the BASIC ELEMENT package or with pressure port fittings which provide mounting ease and barbed hose connections. | MPX Series : Device Type | Options Package Stylo 200 | 201 | Absolute Case 344-03 MPX200A, MPX201A Basic Elomont \\— = — Differential Case 344-03 mPx200D _|____Mpx201D . Case 350-01 MPX200AP MPX201AP ( - Differential Case 352-01 Mpx200DP MPX201DP . Ported Element — Case 360-01 MPX200GP MPX201GP_—_| Caso 350-02 MPX200GVP MPX201GVP 1008 .B-09 5 .
MOTOROLA SC {DIODES/OPTO} 35E D MM L3L725S 0083511 T me MoT? 1-65-03 | OPERATING CHARACTERISTICS (Vs = 3.0 Vdc, Ta = 25°C unless otherwise noted.) : : ey [ haracteristicn | Symbot [| min [typ | Mex [unit | | Temperature Coefficient of FullScale Span | Teves | -o22 | -o19 | -o1e | we | | Temperature Cootficient of ofser? | TCVo# | | ets [= [wre | TEMPERATURE COEFFICIENT OF FULL SCALE SPAN—TCVFsg - 1 j The percent change in full scale span {in mV) per unit change - ” Mpx200 PIEZORESISTIVE PRESSURE SENSOR ELEMENT in temperature (in °C) relative to the full scale span at a specified ‘TEMPERATURE COEFFICIENT OF | . temperature (25°C). 7 ny. Ug he od FULL SCALE SPAN | ‘The variation of Vegg versus temperature is linear. =. "=. * * ar > | The temperature coefficient of full scale span Is given by: .3--"” eT Sn oe TOPS UTX pgs OBE) 2 TY 4 . 188 q Example : an MPX200 with Vesg ~ 48 mV at 25°C and: ==. - | -_ H | 4 F-- TCVpgg = 0.22% would have:.":"02! 7 las, Ye ced & moat tee @ "Vegg = 45 mV + [45 mv x (0.22% PC)’ x T00°C]= 36.4 mv. 4 3 ee : at 126°C Wo eR ea pate i q "Veg = 45 mV + [45 mV x(—0.22%FC)x(—65°C)]= 61.44 mV. Vess (25%) . 4 : F~ "Note that the stope is always negative and for this reasoi, th vo 4 MPX pressure sensors can be easily temperature compensated. 4 rs for span by using a series resistor technique (see Application - : qe Note AN84O or ANS22). = 0 mye Deere ne ' ) | Pelee TUN SRE Tet FIGURE 1 — OUTPUT versus PRESSURE DIFFERENTIAL | ‘TEMPERATURE COEFFICIENT OF OFFSET — TCVoft "2 The change In zero pressure offset per unit change in tem=7] : perature at a specified supply voltage or current. =~ fd ~T TT ]T7 1 a | Td a Se faa EE ee a | ‘The variation of Voff versus temperature ts linear. - - 60/7 Ys = 30 Ve Fr rT .. The temperature coefficient of offset is given by: <= +0 ee | re teVo rt = (tat eo CT eee eee) s . Tate OL GWAR Motl26%@) soso EST eer ! oo he Bo tea weer Terr |g . Calculation is the same as for TCVegg. ~~." : es) j 5 CCB “Figure 1 shows the typical output characteristics of and yo] | | | | TT tT tT te tp tt MPX200D pressure transducer. Note from the figure that both eee eee 2 a the zero pressure offset and the full scale span are temperature o Ltt oT ht att tT] ) sensitive thus having associated temperature coefficients. - y ps0 40] 80 12 16 20 4 28 30 Lore Hastie aiiivarsys > sacra ] KPa 20 40 60 60 100 120 140 160 180 200 PU t a AR Ry ee at" aed: - _ PRESSURE DIFFERENTIAL 1009 - B-10~- 6
MOTOROLA SC {DIODES/OPTO} 35E D Ml b3b7255 0083512 1 me MoT? T-65-03 [ IVIPX200 Ze SVIPX20 Lae . } Cc OPERATING CHARACTERISTICS (Vg = 3.0 Vdc, Ta = 25°C unless otherwise noted.) Temperature Coefficient of Resistence® | ton | oar | oz | 027 | wre | [inputResitanee ——SSSSCSCSCS~S~S~SC Rg | af so] I. | Response Time? (10% to 90%) NOTES: 1, 1.0 kPa (kiloPascal) equals 0.145 PSI. 2, Measured at 3.0 Vdc excitation for 200 kPa pressure differential. 3. Maximum deviation from end-point straight line fit at 0 and 200 kPa, 4, Maximum output difference at any pressure point within Pop for increasing and decreasing pressures. 5, Maximum output difference at any pressure point within Pop for increasing and decreasing temperatures in the range —40°C to +125°C, 6. Slope of end-point straight line fit to full scale span at —40°C and +125°C, relative to +25°C. 7. Slope of end-point straight line fit to zero pressure offset at —40°C and + 126°C. 8. Slope of end-point straight line fit to input resistance at ~40°C and + 126°C, relative to resistance at +26°C. 9, For a 0 to 200 kPa pressure step change. . 10. Repeatability (0.5 %FS typical) is defined as the maximum difference in output at any pressure within Pop and temperature within + 10°C to +85°C after: a. 1000 temperature cycles, —40°C to +125°C. b. 1.6 million pressure cycles, 0 to 160 kPa, ‘TEMPERATURE COEFFICIENT OF RESISTANCE The variation of input resistance versus temperature Is linear. The temperature coefficient of resistance is given by: R, 1 TCR = (=) xX >—— - T Ri2src) C This coefficient is determined by the doping level and the material resistivity. NOTE: Temperature Error (in General) The maximum change in output at any pressure in the operating pressure range when the temperature Is changed over a specified temperature range. TE Input Impedance (Resistance) wa The impedance (resistance) measured between the positive and negative (ground) input ter- minals at a specified frequency with the output terminals open. For Motorola X-ducers this is a resistance measurement only. Response Time The time required for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure, for the MPX200 this is 200 kPa. | SEE DISCUSSION ON REPEATABILITY/STABILITY | (Page 11) ( :
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MOTOROLA SC {DIODES/OPTO} 35E D MM 6367255 0063513 3 ME NOT? . T-65-03 I WV PX 200 BewVIEX 201 } TEMPERATURE COMPENSATION 9 Figure 1 shows the effect of temperature on the output Several approaches to external temperature compen- of the transducer. sation over both — 40 to +125°C and 0 to +80°C ranges Temperature compensation and offset calibration can are presented in Motorola Applications Notes AN840 be achieved rather simply with additional resistive com- and AN$22. They are available from all Motorola Sales ponents. Offices. FIGURE 2 — ELECTRICAL CONNECTIONS Motorola's Silicon pressure sensor elements use a single piezoresistive strain gage to sense shear stress. N N N N N N NI Q Ny NN N N N N N N : N . N Etched Diaphragm N N Boundary N : —— N N N Ny N N N N Ny N Y N Transverse Voltage N N Strain Gage N 2) N AEE PRS N et [iy N . N 2 KM N N my xe N N = N | | Kascsasssssssesss ees Sea) Sool 28:7 Pin Pin Pin Pin . . 1 2 .3 4 : : Gnd +Output +Supply — Output FIGURE 3 — MPX PRESSURE SENSOR ELEMENT CROSS SECTION (DIFFERENTIAL) Silicorie Silicone RTV . Die Coat Die Die Bond stat Cover Wire Bond. 1d EE EE 7 Yy oO ed GF ee Eeoooov i W ZZ Thermoplastic Case | \\ XY , Lead Frame I.-U—RRCKM KK. Y LY Ce 7 Metal Back Plate 8) Figure 3 shows the cross section of the Motorola MPX harsh environments, while allowing the pressure signal pressure sensor die in the chip carrier package. A sili- to be transmitted to the silicon diaphragm. cone gel isolates the die surface and wire bonds from .
1014 Bri2 a
MOTOROLA SC {DIODES/OPTO} 35E D MM 6367255 0083514 S mm MOT? T-65-03 [ IVIPX200geeVIEX20.1 } LINEARITY Linearity refers to how well a transducer’s output fol- 1 z lows the equation: Vout = Voft + sensitivity x P over . 1 at the operating pressure range. There are two basic meth- \\ 4 yy ods for calculating nonlinearity: (1) end point straight line Least Squares Fit y4 1 fit or (2) a least squares best line fit (see Figure A). While Exaggerated 17 Least a least squares fit gives the “best case” linearity error 5 Performance ive oy 7 Square \\ Straight (lower numerical value), the calculations required arebur- | Curve Deviation Yi |rine densome, 3 iw ! [Deviation o 7 ue 1 Conversely, an end point fit will give the "worst case” 9 7 error (often more desirable in error budget calculations) 5, Y y an 1 and the calculations are more straightforward forthe user. © F 7, | end Pol H Motorola's specified pressure sensor linearities are based ay L —in fie " Fi H on the end point straight line method measured at the 7 | Straight Line Fit 1 midrange pressure. s Yo ! ! el] 7 t 1 : H 1 a ' 1 H i ' . I FIGURE A — LINEARITY Offset H i SPECIFICATION COMPARISON ' H 0 50 700 PRESSURE (% FULLSCALE) HYSTERESIS Hysteresis refers to a transducer's ability to produce the same output with the same applied measure and applied consecutively, first from an increasing direction and then from a decreasing direction. Pressure hysteresis is mea- ‘sured at a constant temperature while temperature hys- teresis is measured at a constant pressure in the operating pressure range (see Figure B). a E | z Pressure (Temp) | Hysteresis | FIGURE B — HYSTERESIS > : - . PRESSURE (TEMP)
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MOTOROLA SC {DIODES/OPTO} 39E D MM b3b7255 0083515 7 mm NOT? T-65-03 { BViEX2 OURS RVIEXOO ] . a i) , OUTLINE DIMENSIONS ° BASIC ELEMENT (MPX200A,D) PRESSURE SIDE PORTED (MPX200AP,GP) c rae s Lives | cite 8 “ hee aS LY | > &+o " peta is N i t . | iia Trae: - 5 dala ah eletlk sr —e Th ROUND ol [wacimeTeRs] wens] PRESSURE SEALING E180 case 50.01 [owl mn oar wi Paar] sTvcel: SURFACE 4c ourur [A feees [7897 11.140 17.108] IN 1. GROUND CASE 344-03 Pets ie foe teri Steuer eae woes: Eat bar {bar fone fopn a oureur [| aK [HN] WA] TL DIMENSIONS A AND ARE OATUMS. Pe pigt 132 foods [ooke | (AT rear] igar| be0s | Osis] -T-1S A DATUM SURFACE, Poy" 2st st | .v00 BSC} {8 [i321] 13.46] 0.520] 0.530) 2. POSITIONAL TOLERANCE FOR pa [S62 | 4 sr fore Toast | novts: Leet eet eset] DIMENSION D LEADS: [at ass | ban toni fae}
1 DIMERSION AIS OATUK Eat eirterot-oart eee] [icf Toees for]
POSITIONAL TOLERANCE FOR Be ea ae » alee lng) Cot ainvase 1 veroare DIMENSION 0 LEADS: bat zeae latest POSITIONAL TOLERANCE [A138 | tose oan [oa] Pete act vet on Pecos bares oe aa 2. DINERSTONING AND [Piao veel ogee] 018] 4. DIMENSIONING AND FOLERANCING Ea eae ae foast oer | TTOLERANCING PER ANSI YI4S, [act soewom 30° Nom | Para eee eatin retain in (a Linis] 170) pase] oor) s. NOTES Pt) WOIKTOR buchos ye Lozis 1078] POSITIONING OF DEVICE . . ) Place the notch on the left hand side as indicated — the positive TABLE A — Conversion for Common Units of Pressure pressure port is up. Device marking and yer, assembly week dete code | [| wrases [mmiig [libs [tices ig [at | are on the top surface. [tam | t01.a5 | 760.000 | 01326 | aon70s | 146860 | | 1kiloPasca | 1.00000 | 7.50082 | 10.0000 | 401476 | o.1as038__| ‘Attachment to pressure source | |tmmHg | ogaazz__[ 1.00000 | .asa22 | osasa67 | 0.0183360_| canbemade through o-ring clamp- | | tmitiber | 0.100000 | 0.750082 | 1.00000 | oaota7s | o.oras0s8_| ing or epoxy attachment to pres- | | tinchHgo | o2eo0ei | 1.08820 | 2aa0et__[ 1.00000 | o.osetz63_| source by similar attachment to the surface opposite the pressure seal- ing surface. Attachment should not be made to flat surfaces, Quick Conversion Chart for Common Units of Pressure kiloPascals p—1 p22 yr yp gp 0 20 40 60 0 100 120 140 160 180 200 ° 100 200 300 400 500 600 700 800 0 200 400 600 800 1000 1200 1400 1600 1800 2000 mm Hg -———-@—+ $2 pp pp tp ty - Cy 200 400 600 800 7000 ~—-1200-=SS«1400 1600 i psi ee : C) 5 10 15 20 25 30 1013 B=14 wo.
Fanos Soreness encores 2s San ea ot gg gg MOTOROLA SC {DIODES/OPTO} 35E D M@™@ 6367255 00835ib 1 ME MOT? - C OUTLINE DIMENSIONS VACUUM SIDE PORTED (MPX200GVP) PRESSURE AND VACUUM SIDES PORTED (MPX200DP) is “ aL wot woke ses). sane re aa TI a JEN 7_@ 5) NWGr " m Mca) LUB ceric Sa 8 eal vous TH F i N y—_t oth eid c J Foleld t c ° sme: Fe srviet: WRT RST) Pn ono [aa | m | FW ROUND [ou ae a xh CASE 352.01 Hae Hne ea 2 + outrur CASE 350-02 [A eta ot | <Soureur Pet ats tines toa toa 2. + SUPLY [ei738"['18.16 foges 10715 | {0 0401" 050 fours [0020 4. OUTPUT [oy re 6.15 [sos ose] ‘NOTES: Pera ir me tae NOTES: [OL oad-| Ot [o016- 0.020-] 1, DIMENSIONS A AND ARE DATUMS. [et 2s46s¢ 1 oop ase 1. DIMENSIONS A AND Q ARE DATUMS. feat Ti s2 feoes [00s DIMENSION -T- 1S DATUM SURFACE. [H | 462 7 497 [ote2 [ots | . oT: ISAUATUM SUNTAGE, Hee ta 2. DIMENSIONS H AND R,2 PLACES. Ett eae foo Fone]
1 NT Aron Poa eae ee 3 oatonat TOLER FoR Hoare | sine
» MlesteaeleS) Hee toa a 4. POsTIONAL TOLERATE FOR Pet gate | om aee MOUNTING HOLE OIA: [Rt DORE {0708 REF | MOUNTING HOLE DIA: [By "60-t-2.10 [0063 T0083 | [¢]0 025 0010 1 1-16) Popsae yor toes roe] fs1aee aor fos forse] 4. DIMENSIONING AND TOLERANCING = ACS EH 5 naa Fee eet oae toa s. TENS Pf Hon bicbhar trae teas tage E.NOTEW ISIN NDICATOR Giclee hie tase tosie - REPEATABILITY/STABILITY Repeatability The maximum difference in the output at any pressure in the operating pressure range when this pressure is applied a : consecutively under the same conditions and from the same a direction, a a a Stability 7 7 The maximum change in output under fixed operating con- jy ra 7 ditions over a specified period of time. 5 Z 7 Repeatability refers to a transducer's ability to produce the g Pa 7 same output with the same applied pressure while stability is = 7 measured after long term cycling or aging (see Figure C). = 7 a Motorola’s tong term cycle is defined as 1000 temperature 5 a oycles from —40°C to +126°C and 1.5 x 108 pressure cycles © AY SY from zero to 80% of the full scale operating pressure range. a 7 : Z v . SF FIGURE C — Repeatability/Stabllity i PRESSURE C Motorola reserves the right to make changes without further notice to any products herein to improve reliability, function or design. Motorola does not assume any liability arising out of the application or use of any product or circuit described herein; neither does it ‘convey any license under its Patent rights nor the rights of others. Motorola and @A) are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Employment Opportunity/ Affirmative Action Employer. . . nO 7 1014 c-01 .