MFC2000 ACEINNA | Alldatasheet
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ACEINNA MFC2030 v1.05 Page 1 of 8 CONFIDENTIAL High Performance Bi-Directional Digital MEMS Gas Flow Sensor MFC2000 Series
FEATURES
Bi-directional flow (±30 or ±70SLM) High dynamic range ±3% m.v. accuracy ±0.8% m.v. repeatability Low power consumption Fast response time Single 2.7 - 5.5Vdc power supply Digital I2C output Standard push-in fitting sizes Custom fluid connector available Temperature compensated Highly configurable firmware Easy-to-use PC-based GUI RoHS and WEEE compliant
APPLICATIONS
Medical gas flow measurement and control Industrial gas flow measurement and control Consumer products
DESCRIPTION
MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/ - 3.0% accuracy. The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital output with very high repeatability. The module has very low o perating power consumption (< 5 mA) and a low power consumption sleep mode (<100 µA) for optimal power management in portable applications. The MFC2000 series is externally pow ered, up to 5.5V (3.3V typ.). I 2C digital output is standard. Other output available upon request. The MFC2000 series includes firmware that is highly configurable, offering the user a variety of settings that can be tailored to specific applications. Thi s includes data output type, calibration settings, measurement modes, and power consumption. A user -friendly PC - based application offers the user a variety of data collection options, including real -time graphical display. Mechanically, the unit includes f ittings that can accept a variety of standard inlet tube sizes. MFC2000 series is a true thermal mass flow sensing module, and can easily be configured to suit a variety of applications, from medical flow to industrial processing. Customized versions , inc luding customer specific bulk channel and mounting options are available. For more information, please contact ACEINNA at info@ACEINNA.com. Information furnished by ACEINNA is believed to be accurate and reliable. However, no responsibility is assumed by ACEINNA for its use, or for any infringements of patents or other rights of third parties, which may result from its use. No license is granted by implication or otherwise under any patent or patent rights of ACEINNA. ACEINNA, Inc. One Technology Drive, Suite 325, Andover, MA 01810, USA Tel: +1 978 738 0900 Fax: +1 978 738 0196 www.ACEINNA.com MFC2030 ±30 SLM version.
ACEINNA MFC2030 v1.10 Page 2 of 8 CONFIDENTIAL SENSOR CHARACTERISTICS (Measurements performed with air at 23C temperature, 1 Atm pressure, 50% RH, at 5.0V DC power supply, unless otherwise specified). Calibration conditions for standard liters per minute slm: 20°C, 1013mbar. Parameter Condition 30 SLM 70 SLM Unit Measurement Range Straight/Manifold Mounting +/- 30 +/- 70 SLM Flow Direction Bi-directional N/A Supply DC Voltage (VDD) 2.7 – 5.5 Vdc Interface Voltage1 (VDDIO) (See note 1) 2.7 – 3.0 V Output Range I2C Mode2 0 – 65,535 LSB Operating Temperature (20) – 80 C Calibrated Temperature 0 – 50 C Storage Temperature (40) – 85 C Relative Humidity non-condensing 0 – 95 % Supply Current3 Operating mode 5 mA Sleep mode 100 µA Accuracy4 0.01Qmax ≤ Q < Qmax 3.0 % m.v. Q < 0.01Qmax 0.03 % F.S. Repeatability5 ODR = 100Hz 0.1Qmax ≤ Q ≤ Qmax 0.8 % m.v. Q < 0.1Qmax 0.08 % F.S. ODR = 10Hz 0.1Qmax ≤ Q ≤ Qmax 0.3 % m.v. Q < 0.1Qmax 0.03 % F.S. RMS Noise at Zero Flow ODR = 100Hz 25 sccm ODR = 10Hz 8 sccm Offset Shift w/Temp. 0 - 50C 2 SCCM/C Total Error Band4 0 - 50C, 0.1Qmax ≤ Q ≤ Qmax 3.5 % m.v. Pressure Drop Qmax 4 18 mbar Sample Rate 10 msec Orientation Sensitivity < 60 sccm Wake Time Wake up from sleep mode 40 msec Working Pressure 0 - 8 Bar Module Weight Includes aluminum inserts < 100 g Wetted Material Si, SiO2, Si3N4, Aluminum, PPSU, Stainless steel, Viton, Nitrile rubber, Aluminum alloy 3003, Epoxy, Silicone Note 1: VDDIO is generated internally and should be used to set the logic high voltage for I2C interface. VDDIO can supply a current up to 100 mA. Note 2: Use two’s complement as binary signed number representation. Note 3: Power consumption can be optimized using “Power-Cycle” configuration to program the wake and sleep duration. Note 4: Accuracy is defined as the sum of all dc errors (linearity) at 23C. Error Band is defined as the sum of accuracy and offset/span due to temperature. Both are measured after factory calibration, using internal averaging (100x) to eliminate errors due to noise. If the end application requires a high Output Data Rate (ODR), and cannot benefit from averaging, the total RMS error of any given measurement can be calculated by adding the repeatability specification. Note 5: Repeatability is defined as standard deviation divided by mean flow (% m.v.), or standard deviation divided
ACEINNA MFC2030 v1.10 Page 3 of 8 CONFIDENTIAL ABSOLUTE MAXIMUM RATINGS* Note: Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; the functional operation of the device at these or any other conditions above those indicated in the operational sections of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect the device’s reliability. CONFIGURATION AND MARKING Pinout Configuration: Pin Name Description
1 VDD Power Supply
2 VDDIO I/O Voltage Reference
3 SCL Serial Clock Line for I2C bus
4 SDA Serial Data Line for I2C bus
5 GND Connect to Ground
6 GND Connect to Ground
7 GND Connect to Ground
8 NC Not Connected
Marking Illustration: Line 1: The arrow sign of ACEINNA Logo denotes the positive direction of flow Line 2: Model name Line 3: Barcode (shown below as a space) Line 4: Lot number THEORY OF OPERATION The flow rate is detected by the MEMS thermal mass flow sensor. The sensor chip, produced in ACEINNA proprietary CMOS compatible technology, is composed of a central heater source (micr o heater) and two temperature sensors (thermopiles), which are placed symmetrically upstream and downstream of the micro -heater. If no gas flows over the sensor surface, the symmetric thermopiles measure the same rise in temperature, resulting in the same output voltage of the two thermopiles. If a non -zero gas flows from the inlet to the outlet of the meter, the velocity of a fully -developed laminar air flow unbalances the temperature profile around the heater and heat is transferred from upstream thermopi les to the downstream thermopiles, causing a change in the voltages of the thermopiles. Larger gas flow rates result in larger asymmetry in the profile. Zero gas flow. Non-zero gas flow. Temp. profiles vs. distances/gas velocities. MFC2030 pin configuration.
ACEINNA MFC2030 v1.10 Page 4 of 8 CONFIDENTIAL PACKAGE DRAWING The ACEINNA MFC2000 series Mass Flow Meter is mounted in chemically inert filled PPSU housing (available in other material, see “Order Information”) . The physical dimensions, mounting information and pin layout are provided below. A push-in tube fitting or a PPSU flange (manifold mounting) is provided on inlet and outlet sides of the module for flow connection. For electrical connect ion, an 8-pin male header (FCI 69168 -108HLF) is provided on the topside of the module for I 2C interface connection. The recommended mechanical/electrical connectors are shown as follows. The unit can be printed circuit board mounted is needed. Recommended Connector Example Flow Fitting Push-in connector included See “Ordering Information” Electrical 8 pin crimp to wire housing (2.54mm pitch, 2 rows, 2.54mm row space) FCI 65846-016LF MFC2000 module mechanical dimensions (in mm).
ACEINNA MFC2030 v1.10 Page 5 of 8 CONFIDENTIAL MFC2030 I2C Communication MFC2030 Pin Configuration Figure.1 MFC2030 Pin Configuration Table.1 MFC2030 Pin Configuration Pin Name Description
- Hardware Connection SCL and SDA pins must be connected with around 4.7k Ohm pull-up resistors to VDD, recommending voltage is 5V +/- 10%. Figure.2 Pull-up Resistors Connection 3. I2C Read and Write Timing I2C communication using standard I2C protocol, as shown below, recommending SCL frequency about 100kHz.
ACEINNA MFC2030 v1.10 Page 6 of 8 CONFIDENTIAL Figure.3 MFC2030 I2C Communication Timing Example Note: Timing example above shows slave responds to master with 2 bytes data and master sends 1 byte command to slave respectively. 4. MFC2030’s Register Map Table.2 MFC2030 Register Map Register Address Name Description Read Write
0 Flow Rate MSB Yes N/A
0 LSB Yes N/A
1 Temperature MSB Yes N/A
1 LSB Yes N/A
- MFC2030’s Reading Operation MFC2030 will update its registers every 10 ms interval, so the master can read out data from MFC2030’s register 0, 1 every 10ms interval. MFC2030 works as slave, in the first byte it receives, it must include 7-bit slave address(0x31), and a bit which is either write bit(0) or read bit(1). To read data from register, master must do writing operation first, which means master must write 1-byte register address (it specify which address master starts to read from) to slave first, then master do reading operation. There must be at least 1 ms delay between writing and reading operations. For example, to read out the data in register 0, there are 2 steps as the following: (1) Master Writes Register Address Master should write the register address 0x00 into slave, specifying that master will read from register 0 of slave. As Table.3 shown, the first byte master sends includes a 7-bit address 0x31 and a write bit 0, the second byte it sends is register address 0x00. Table.3 The Data Master Sends while Master Writes Register Address to Slave Slave address + Write bit Register Address 0x62 = (0x31<<1) + 0 0x00 (2) Master Reads Data from Slave
ACEINNA MFC2030 v1.10 Page 7 of 8 CONFIDENTIAL As Table.4 below shown, after slave receives a 7-bit address 0x31 and a read bit 1 from master, if slave’s SCL pin receives pulses of 2 bytes data generated by master, accordingly the slave’s SDA pin will return 2 bytes flow data as Table.5 shown. Table.4 The Data and Pulses Master Sends while Master Reads Data from Slave Slave Address + Read bit Pluses of 2 Bytes 0x62 = (0x31<<1) + 1 High Byte, Low Byte Table.5 The Data Slave Returns while Master Reads Data from Slave High Byte Low Byte Notes: a. ‘0x’ means that the data mentioned in this note is hexadecimal. b. ‘<<’ means data shifts left. c. Slave returns the high byte first, then the low byte. d. If you want to read temperature data from register 1, just change the register address as 0x01 as step (1), and then finish the step (2). e. There must be at least 10ms time delay between any two register reading operations , otherwise, the data will not be updated. f. Any other registers are not available for customer, if you write any data to any register we didn’t mention in this note, it probably cause MFC2030’s firmware broken! 6. Data Format The output data of register 0 is 16-bit signed integer data, which is from -32000 to 32000 sccm. The output data of register 1 is 16-bit signed integer data, which needs to be divided by 10 to get the measured temperature (Unit: Celsius Degree).
ACEINNA MFC2030 v1.10 Page 8 of 8 CONFIDENTIAL
ORDERING INFORMATION
- Additional Mechanical Interface available for OEM applications. Revision Log Date Author Revision Changes July 14, 2017 O.Silpachai 1.05 Initial Release September 21, 2017 O.Silpachai 1.10 Removed Analog (PWM) Output, Eliminate Tube OD for 1/4 inch, 10 mm, 3/8 inch, and manifold mount. Options Ranges Calibration Housing Material Tube OD* MFC 2030 30 SLM B Bi-Directional P PPSU 1 6 mm 2070 70 SLM U Uni-Directional Gas Gas I2C Address N Air/N2 1 0x31 (preferred) X O2 2 0x21 C CO2 3 0x23 R Ar 4 0x33 M CH4 5 0x35 6 0x41 7 0x43 8 0x45