MAXSTREAM300 ADVANCEDENERGY | Alldatasheet
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©2021 Advanced Energy Industries, Inc. The MAXstream TM 300 is a compact, reliable, and cost-effective remote plasma source (RPS) solution for low flow (2 to 3 SLPM) NF 3 chamber clean applications. The MAXstream 300 is 18% smaller than the Xstream RPS unit to save valuable tool space and offers drop-in compatibility with traditional RPS tools, allowing customers an easy upgrade path to improved performance and reliability. Market leading power control for improved process repeatability along with AE’s proprietary aluminum (AI) substrate with Type 3 hard anodization combine to make it one of the most consistent and reliable RPS units on the market. MAXSTREAM 300 LOW FLOW CHAMBER CLEAN REMOTE PLASMA SOURCE PRODUCT HIGHLIGHTS Compact, low cost-of-ownership solution for 2 to 3 SLPM chamber cleaning processes Industry-leading power control for consistent, repeatable performance Proprietary high-purity Al substrate with Type 3 anodization for longer chamber life Unique dual ignition core design ensures virtually 100% ignition reliability Drop-in compatibility with traditional RPS systems to enable simple design-in compatibility as well as seamless field upgrades to a reliable, repeatable, and low cost-of-ownership solution TYPICAL APPLICATIONS NF3 chamber clean
PROCESS AND ELECTRICAL SPECIFICATIONS General Operating Parameters Plasma Power Range 1000 to 6000 W, continuous Process Applications Remote delivery of activated gases for downstream processing (i.e. chamber cleaning, reactive etching processes, and reactive deposition processes) Ignition 100 mTorr to 4 Torr up to 2 SLPM of Ar, < 1% poisoned by NF3 Power Accuracy 5% or 50 W, whichever is greater Chemical Compatibility This unit is intended for use with selected gases such as Ar, O 2, N2, F2, NF3 , CI or CxFy. NF3 Operating Specifications Flow Range Up to 3 SLPM at 10 Torr Dissociation Efficiency > 98% disassociation up to 3 SLPM at 10 Torr Operating Specifications Duty Cycle Continuous operation within specified operating range Cooling Flow Rate 1.5 GPM at +5°C to +30°C non-condensing input water temperature Ambient Air +5°C to +40°C, non-condensing humidity < 75% Input Voltage 187 to 229 VAC, no neutral, 3 phase with PE ground (phase insensitive) Line Frequency 47 to 63 Hz Input Current < 24 A AC MECHANICAL SPECIFICATIONS Mechanical and Physical Specifications Dimensions 25.4 cm (H) x 21 cm (W) x 42.4 cm (D) Weight 21 kg (45 lb) Vacuum Input: KF40 flange on top side of the unit Output: KF40 interface on bottom of unit Ground Connection Chassis ground stud 1/4”-20 x 3/4” near AC input connector USB Connection USB Type A female Ethercat Connection RJ45 female Water Connections Stainless steel Female SAE 9/16” – 18 straight-thread 2 advancedenergy.com MAXSTREAM 300 REMOTE PLASMA SOURCE
advancedenergy.com 3 MAXSTREAM 300 REMOTE PLASMA SOURCE
For international contact information, visit advancedenergy .com. sales.support@aei.com +1.970.221.0108 ENG-MAXstream-300-235-02 12.21 ABOUT ADVANCED ENERGY Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical thermal processes. With deep applications know-how and responsive service and support across the globe, AE builds collaborative partnerships to meet rapid technological developments, propel growth for its customers and power the future of technology. Specifications are subject to change without notice. Not responsible for errors or omissions. ©2021 Advanced Energy Industries, Inc. All rights reserved. Advanced Energy®, and AE® are U.S. trademarks of Advanced Energy Industries, Inc.