M1500 MICROESYS | Alldatasheet

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Factory Set: x4, x8, x20, or x40 Linear: 5μm, 2.5μm, 1.0μm, or 0.50μm Rotary: 6,600 to 655,000 CPR Accuracy Linear: ± 1μm available ± 3μm to ± 5μm standard Rotary: Up to ± 2.1 arc-sec Output A-quad-B and Digital Index Window Mercury TM 1500 Digital Output Encoder Systems Factory Set Resolution to 0.50μm Reflective Linear and Rotary Encoders Imagine what you can do with this! Reduce the cost and size of your system, and increase its performance all at once. MicroE Systems’ Mercury 1500 kit encoders are available in two styles. The M1500S, an RS-422 compliant 15 pin standard D-sub connector and the M1500H, an RS-422 compatible 5x2 micro-connector for tight spaces. Simply stated, the M1500 is smaller, higher performance, faster to install, and easier to use than any other encoder. The tiny sensor fits into very tight spaces, has broad alignment tolerances for fast and easy setup and works in both linear and rotary applications. The entire Mercury 1500S encoder is EMI shielded for use in the toughest environments. With standard digital A-quad-B output, select the Mercury 1500 encoder with the resolution required by your application. The Mercury 1500 encoder system includes the sensor, double shielded cable, your choice of connector, and either a linear or ro tary glass scale. Mercury’s space-saving, integrated configuration gives OEM system designers a breakthrough in performance. Table of Contents System & Sensor pg . 2-6 Scales pg. 7-8 Ordering Information pg. 9 Standard features  Small sensor with ultra-low Z height; flush screw mounting  Sensor is 8.4mm (H) x 12.7mm (W) x 20.6mm (L) and weighs 1.6g  Available with 15 pin standard D connector or micro-connector  A-quad-B output and Index window  Factory set interpolation x4, x8, x20, x40 for resolutions of 5µm to 0.50µm (linear); 6,600 CPR to 655,000 CPR (rotary)  Entire system is EMI shielded  Bi-directional index signal  Index mark at the center or end of the glass scale (linear)  Alignment Tool enables fast set up (see pg 2) Sensor the size of a dime Available with standard 15 pin D-sub connector or Micro connector  Glass scale length or diameter: Linear lengths from 5mm to 2m Rotary diameters from 12mm to 108mm  Cable length of 1m, 2m, 5m or custom  SmartPrecision Software for set up Optional Features & Accessories  SmartPrecision Alignment Tool

Optional software lets you view signal strength, Lissajous plots, position data and diagnostics. SmartPrecision™ Alignment Tool - SSAT 1500 Provides fast set up; the built-in LED indicators make alignment fast and easy, eliminating the need for an oscilloscope. The RS232 Interface Adapter provides power to the encoder and connections to a PC. This is included with the Alignment Tool. SmartPrecision™ Software Encoder Sensor Same for linear and rotary scales. Controller Interface Cable Optional Software M1500H Encoder System Standard Equipment M1500H RS-422 compatible 5 x 2 header Micro-connector M1500S Encoder System Standard Equipment System Configurations Standard and Optional Equipment M1500S RS-422 compliant 15 pin standard D-sub connector

Broader Alignment Tolerances, Increased Standoff Clearance, Smallest Sensor and More Why Mercury Encoders Make It Easier To Design High Performance Into Your Equipment Page 3 of 9 Eliminate the Frustration of Touchy Encoder Alignment Mercury Solves this Problem for Good Fussy alignment is no longer a concern. With Mercury’s patented PurePrecision™ optics, advanced SmartPrecision™ electronics and LED alignment indicators, you can push the sensor against your reference surface, tighten the screws and you’re finished. Try that with brand X or Y. This performance is possible thanks to relaxed alignment tolerances, particularly in the theta Z axis. Mercury offers a ± 2° sweet spot– that’s a 300% improvement over the best competitive encoder. And that will result in dramatic savings in manufacturing costs. No other commercially available encoder is easier to align, easier to use, or easier to integrate into your designs. Alignment Tolerance Comparison** Mercury* Brand X Brand Y Mercury vs. Best Competito r Z Standoff ± 0.15mm ± 0.1mm ± 0.1mm Mercury is 50% better Y ± 0.20mm for linear ± 0.1mm unspecified Mercury is 100% better ± 0.10mm for rotary 19mm dia. theta X ± 1.0° unspecified ± 1.0° theta Y ± 2.0° ± 0.1° ± 1.0° Mercury is 100% better theta Z ± 2.0° ± 0.006° ± 0.5° Mercury is 300% better *Measured at a constant temperature for one axis at a time with all other axes at their ideal positions. Based on published specifications Mercury Can Reduce System Size and Cost Mercury’s sensor height is 44% shorter than competitive encoders, making it easy to fit into your design. This reduction can also cut total system weight and cost by allowing the use of smaller motors and stages. Safe system operation is also enhanced thanks to Mercury’s generous standoff clearance– 200% greater than other encoders. And its standoff tolerance is 50% greater than the best alternative. This significantly relaxes mechanical system tolerances, while reducing system costs. BBrraanndd YY BBrraanndd XXMMeerrccuurryy TThheettaa ZZ AAlliiggnnmmeenntt TToolleerraannccee Mechanical Dimension Comparison Mercury Brand X Brand Y Mercury vs. Best Competitor Sensor Z height 8.4mm 23mm 15mm 44% better Standoff clearance 2.4mm 0.5mm 0.8mm 200% better Standoff tolerance ± 0.15mm ± 0.1mm ± 0.1mm 50% better System height 11.7mm 28.5mm 15.8mm 26% better **Based on published specifications * Dimensions shown illustrate encoder system standoff clearance; see Mercury Encoder Interface Drawings for correct design reference surfaces. BBrraanndd XX BBrraanndd YY MMeerrccuurryy SSttaannddooffff CClleeaarraannccee 2.4mm* ± 0.15mm 0.8mm ± 0.1mm 0.5mm ± 0.1mm

Rotary - 20μm grating pitch Rotary Fundamental Interpolation Glass Scale Resolution Below is a table of the available resolutions . Diameter 0.472” [12.00mm] 1650 CPR x4 x8 x20 x40 interpolated resolution (CPR) 6,600 13,200 33,000 66,000 interpolated resolution (arc-sec/count)* 196.4 98.2 39.2 19.64 interpolated resolution (µrad/count)* 952 476 190.3 95.2 maximum speed (RPM) 13090 13090 13090 13090 0.750” [19.05mm] 2500 CPR x4 x8 x20 x40 interpolated resolution (CPR) 10,000 20,000 50,000 100,000 interpolated resolution (arc-sec/count)* 129.6 64.8 25.9 12.96 interpolated resolution (µrad/count)* 628 314 125.6 62.8 maximum speed (RPM) 8640 8640 8640 8640 1.250” [31.75mm] 4096 CPR x4 x8 x20 x40 interpolated resolution (CPR) 16,384 32,768 81,920 163,840 interpolated resolution (arc-sec/count)* 79.1 39.6 15.82 7.91 interpolated resolution (µrad/count)* 383 191.7 76.6 38.3 maximum speed (RPM) 5273 5273 5273 5273 2.250” [57.15mm] 8192 CPR x4 x8 x20 x40 interpolated resolution (CPR) 32,768 65,536 163,840 327,680 interpolated resolution (arc-sec/count)* 39.6 19.78 7.92 3.96 interpolated resolution (µrad/count)* 191.7 95.8 38.3 19.17 maximum speed (RPM) 2637 2637 2637 2637 4.250” [107.95mm] 16384 CPR x4 x8 x20 x40 interpolated resolution (CPR) 65,536 131,072 327,680 655,360 interpolated resolution (arc-sec/count)* 19.78 9.89 3.96 1.978 interpolated resolution (µrad/count)* 95.8 47.9 19.16 9.58 maximum speed (RPM) 1318 1318 1318 1318 * Resolution values shown are approximate. To calculate exact resolution values, convert from CPR (Counts Per Revolution) to th e desired units. Note: Specifications assume XOR function which is available in all standard controllers. All Specifications are subject to change. All data is accurate to the best of our knowledge. MicroE Systems is not responsible for errors. Linear - 20μm grating pitch Interpolation Resolution Maximum Speed x4 5.000µm/count 7200mm/s x8 2.500µm/count 7200mm/s x20 1.000µm/count 7200mm/s x40 0.500µm/count 7200mm/s System Specifications Resolution and Maximum Speed Mercury 1500 systems have factory set interpolation: x4, x8, x20, x40. Below is the table of available resolutions. Page 4 of 9

Grating Period 20µm System Resolution 5µm, 2.5µm, 1.00µm, or 0.50µm (linear) Linear Accuracy* Better than ±1µm available; contact MicroE Better than ±3µm up to 130mm, ±5µm from 155mm to 1m, ±5µm per meter from 1m to 2m *Maximum peak to peak error over the specified movement when compared to a NIST-traceable laser interferometer standard, used at room temperature and with MicroE interpolation electronics. **Or +/- one quadrature count, whichever error value is greater. Rotary Accuracy* Scale O.D. Microradians Arc-Seconds 12.00mm ±100 ±21 19.05mm ±63 ±13 31.75mm ±38 ±7.8 57.15mm ±19 ±3.9 107.95mm ±10 ±2.1 *Based on ideal scale mounting concentricity **Or +/- one quadrature count, whichever error value is greater. Sensor Size W: 12.70mm 0.500" L: 20.57mm 0.810" H: 8.38mm 0.330" Operating and Electrical Specifications Power Supply 5VDC ±5% @ 60mA Temperature Operating: 0 to 70°C Storage: -20 to 70°C Humidity: 10 - 90% RH non-condensing EMI: M1500S: Entire system is EMI/RFI protected M1500H: Customer provides shielding at cable termination Shock: 1500G 0.5 ms half sine (Sensor) Sensor Weight: 5.0g (Sensor without cable) Cable: Double Shield. Diameter: 3.6mm (0.142”) Flex Life: 20 x 10 cycles @ 20mm bending radius All Specifications are subject to change. All data is accurate to the best of our knowledge. MicroE Systems is not responsible for errors. Page 5 of 9

19.7 [500] or 39.4 [1000] 52.02.05 .142 [3.61] CABLE DIAMETER 1.47.058 4.22.166 6.91.272 0.94.037 3.4.13 15.7.62 SENSOR MTG SURFACE A 2.03.080 16.5.650 2.11.083 3.94.155 8.5.334 12.70.500 10.29.405 20.57.810 THRU. 2.69.106 8.75.345 6.2.24 B C PIN 1 PIN 8 PIN 9 PIN 15 Mechanical Information - Sensor with Standard D-sub Connector All Specifications are subject to change. All data is accurate to the best of our knowledge. MicroE Systems is not responsible for errors. 20µm Typical 5VDC Mercury 1500S Outputs 15-pin Standard Male D-sub connector PIN FUNCTION

1 Reserved - do not connect

2 Reserved - do not connect

3 Reserved - do not connect

4 A - quadrature

5 A + quadrature

6 Reserved - do not connect

7 Sine+***

8 Cosine+***

9 B- quadrature

10 B+ quadrature

11 Reserved - do not connect

13 Ground

14 Index Window+

15 Index Window-

*** Analog outputs are for sensor alignment only and are nominally 0.85VPP with 1.7V offset. Page 6 of 9 9.7.38 8.1.32 .40 [10.2] 6.4.25 HEX SHAPED ALUMINUM SLEEVE (MAX OD .20 [5.1]) .142 [3.61] CABLE DIAMETER 1.47.058 4.22.166 6.91.272 3.4.13 1.66 [42.2] 19.7 [500] or 39.4 [1000] ASENSOR MTG SURFACE A 8.75.345 2.03.080 16.5.650 2.11.083 3.93.155 12.70.500 8.5.334 THRU. 2X 2.69.106 10.29.405 20.57.810 6.2.24 B C DETAIL A SCA L E : 3 :1 PIN 1PIN 9 PIN 10 PIN 2 KEYWAY Mechanical Information - Sensor with Micro-connector Note: See user manual for guidelines on cable strain relief and grounding. Mercury 1500H Outputs Micro-connector (Female 5 x 2 Header) PIN FUNCTION

1 Sine+***

2 Index Window -

3 Cosine+***

4 Ground

5 A + quadrature**

6 Index Window +

7 A - quadrature**

9 B+ quadrature**

10 B- quadrature**

Compatible with RS-422 receiver * Analog outputs are for sensor alignment only and are nominally 0.85VPP with 1.7V offset. 39.4 [1000] or 78.7 [2000] or 39.4 [1000] or 78.7 [2000] or

All Specifications are subject to change. All data is accurate to the best of our knowledge. MicroE Systems is not responsible for errors. MicroE Systems offers a wide array of chrome on glass scales for the highest accuracy and best thermal stability. Easy to insta ll, standard linear and rotary scales meet most application requirements. Customized linear, rotary, and rotary segment scales are available where need- ed. All scales include an optical index. Mercury's glass scales save time by eliminating motion system calibrations or linearit y corrections required by other encoders, and provide better thermal stability than metal tape scales. Options include:  Standard linear: 18mm - 2m  Standard rotary: 12mm - 107.95mm diameter, with or without hubs  Custom linear*: special lengths, widths, thickness, index mark locations and special low CTE materials  Custom rotary*: special ID's, OD's (up to 304.8mm), index mark outside the main track and special low CTE materials  Mounting of hubs for rotary scales: MicroE Systems can mount and align standard, custom, or customer-supplied hubs  Rotary segments*: any angle range; wide range of radius values *Custom scales or rotary segments are available in OEM quantities. Contact your local MicroE Systems sales office. Specifications Accuracy ±5 µm <1m ±5 µm/m >1m Material Soda lime glass Typical CTE 8ppm/°C Index Center or End Specifications Accuracy ±3µm standard ±1µm available Material Soda lime glass Typical CTE 8ppm/°C Index Center or End Standard Long Linear Scales 155mm and Longer Key: inches[mm] Standard Short Linear Scales 130mm and Shorter Key: inches[mm] Measured Length is always 5 mm less then total length 0.098 [2.5] 0.787 [20.00] Center IndexEnd Index Scale Length Model L18 L30 L55 L80 L105 L130 Measured Length is always 5 mm less then total length Scale Length Center Index 0.250 [6.35] 0.036 [0.9] End Index Model L155 L225 L325 L425 L525 L1025 L2025 Scale Specifications Standard and Customized Scales Custom scales available Custom scales available

Key: inches[mm] Model No. Scale Outer Scale Inner Optical Hub Inner Hub Fundamental Diameter Diameter Diameter Diameter Thickness CPR +.0005/-0.0000 HUB I.D. OPTICAL DIAMETER SCALE O.D. HUB THICKNESS SCALE PATTERN MOUNTING HOLES Specifications Material Soda lime glass Typical CTE 8ppm/°C Standard Rotary Scales Custom scales available

DS-M1500 H&S Rev H © 2009 MicroE Systems Page 9 of 9 MMiiccrrooEE SSyysstteemmss – World Headquarters: 125 Middlesex Turnpike  Bedford  MA 01730 Example (Linear Encoder): M1510-S-8-L55-C1 Example (Rotary Encoder): M1510-S-40-R1910-HA M15XX – Connector T ype – Interpolation – Scale Model – Scale Mounting M1510 = 1m cable 4 = 4x Lxxx or Rxxxx For linear scales: M1520 = 2m cable 8 = 8x T = Tape mounting M1550 = 5m cable 20 = 20x C1 = 3 scale clamps* 40 = 40x C2 = 10 scale clamps** Hubs for Rotary Scales: NH = Without Hub HE = for R1206 HA = for R1910 HB = for R3213 HC = for R5725 HD = for R10851 How to Order Mercury 1500 Encoder Systems To specify your Mercury encoder with the desired scale, level of interpolation, maximum output frequency, cable length and soft ware, consult the chart below to create the correct part number for your order. Call MicroE Systems’ Rapid Customer Response team for more information [508] 903-5000. * 3 clamps for linear scales up to 130mm ** 10 clamps for linear scales 155mm or longer All Specifications are subject to change. All data is accurate to the best of our knowledge. MicroE Systems is not responsible for errors. S = Standard 15 pin D-sub H = Micro- connector All Specifications are subject to change. All data is accurate to the best of our knowledge. MicroE Systems is not responsible for errors. How to Order SmartPrecision Alignment Tool How to Order SmartPrecision Software SSWA-AT = SmartPrecision software on CD Optional for SSAT1500 Alignment Tool SmartPrecision Software Example: Alignment Tool for Mercury 1500 encoder, 120 VAC = SSAT1500-H-120 SSAT1500 – Connector – V oltage H = micro connector for M1500H S = 15-pin Std. D-sub connector for M1500S 120 = 120 VAC, 60Hz US Std. 2-prong plug 220 = 220 VAC, 50Hz European Std. 2-prong plug