LITHIUM-NIOBATE-WAFER COHERENT | Alldatasheet

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Technical content

Lithium niobate (LN), a compound of niobium, lithium, and oxygen, is a multifunctional material with high chemical and heat stability. Its most attractive property is its high refractive index (>2.3) compared with regular glass wafers (1.5). LN’s high refractive index enables a large FOV for waveguide design. LN wafers are an ideal substrate for waveguides, modulators, and sensors. Coherent has more than 10 years of experience in wafer manufacturing and can provide diverse wafers with different materials, diameters, and thicknesses to meet customers’ requirements. FEATURES APPLICATIONS

  • High refractive index (>2.3)
  • 6 inch / 8 inch available
  • RGB visible spectrum available
  • Outstanding mechanical properties
  • Waveguides
  • Modulators
  • Sensors LITHIUM NIOBATE WAFER Optics

© 2023 Coherent Corp. Legal notices : coherent.com/legal photonics.sales@coherent.com www.coherent.com Material Specification Control Device Material Congruent: LiNbO3 Certificate of material Material quality Bubble or inclusion <100 μm Qty <8, 30 μm < bubble size < 100 μm Green laser Orientation Y cut ±0.2° X-ray orientator Density 4.65 g/cm3 Densimeter Curie temperature 1142 ±1℃ Supplier test Transparency >95% for 10 mm light@450-700 nm Spectrometer Fabrication Specification Diameter 150 mm ±0.2 mm Micrometer Thickness 350 μm ±10 μm Micrometer Flatness Total thickness variation(TTV) Local thickness variation (L TV) Bow Roughness <1.3 μm Warp < 70 μm @ 150 mm wafer <70 μm @ 150 mm wafer Rq ≤0.5 nm (RMS value by AFM) Flatmaster MSP Flatmaster MSP Flatmaster MSP AFM or Newview Surface quality Scratch-dig: 40-20 based on MIL-PRF-13830B Microscope Particles Non-removable particles: 100-200 μm ≤3 particles, 20-100 μm ≤20 particles Microscope Chip <300 μm (full wafer, without exclusion zone) Microscope Crack No crack (full wafer) Microscope Contamination No non-removable stain (full wafer) Microscope Parallelism <30 arc second Zygo interferometer Orientation refer flat (x-axis) 47 ±2 mm Digital projector Specifications