IMU-3000

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IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 1 of 54 IMU-3000 Motion Processing Unit Product Specification Rev 1.0

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 2 of 54

CONTENTS

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 3 of 54

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 4 of 54

1 Document Information

1.1 Revision History

Revision Date Revision Description 05/26/2010 1.0 Initial Release

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 5 of 54

1.2 Purpose and Scope

This document is a preliminary product specificat ion, providing a description, specifications, and design related information for the IMU-3000™ Motion Processing Unit TM. The IMU-3000 MPL Functional Specification describes in detail the API and System Layer routines needed for interfacing to the IMU-3000. Electrical characteristics are based upon simula tion results and limited characterization data of advanced samples only. Specifications are subject to change without notice. Final specifications will be updated based upon characterization of final silicon.

1.3 Product Overview

The IMU-3000 Motion Processing Unit (IMUTM) is the world’s first IMU so lution with 6-axis sensor fusion for consumer applications. The IMU-3000 has an embedded 3-axis gyroscope and Digital Motion Processor™ (DMP™) hardware accelerator engine with a secondary I 2C port that interfaces to third party digital accelerometers to deliver a comp lete 6-axis sensor fusion output to its primary I 2C port. This combines both linear and rotational motion into a single data stream for the application. The device is ideally suited for a wide variety of consumer products requiring a rugged, low-cost motion processing solution for applications in game controllers, remote controls for broadband connected TVs and set top boxes, sports, fitness, medical and other applications. By providing an integrated sensor fusion output, the IMU-3000 o ffloads the intensive motion processing computation requirements from the host processor, reducing the need for frequent polling of the motion sensor output and enabling use of low cost, low power microcontrollers. The IMU-3000 features a 3-axis digital gyro wi th programmable full-scale ranges of ±250, ±500, ±1000, and ±2000 degrees/sec (dps), which is usef ul for precision tracking of both fast and slow motions. Rate noise performance sets the industry st andard at 0.02 dps/ √Hz, providing the highest- quality user experience in pointing and gaming applic ations. Factory-calibra ted initial sensitivity reduces production-line calibration requirements. The part’s on-chip FIFO and dedicated I 2C-master accelerometer sensor bus simplify system timing and lower system power consumption; the sensor bus allows the IMU-3000 to directly acquire data fr om the off-chip accelerometer without intervention from an external processor, while the FIFO allows a system microcontrollers to burst read the sensor data and then go to sleep while the IMU collects mo re data. Other industry-leading features include on-chip16-bit ADCs, programmable digital filters, a precision clock with 1% variation from -40°C to 85°C, an embedded temperature sensor, progra mmable interrupts, and a low 13mW power consumption. Parts are available with an I 2C serial interface, a VDD operating range of 2.1 to 3.6V, and a VLOGIC interface voltage from 1.71V to 3.6V. By leveraging its patented and volume-proven Nasiri -Fabrication platform, which integrates MEMS wafers with companion CMOS electronics through wafer-level bonding, InvenSense has driven the IMU-3000 package size down to a revolutionary foot print of 4x4x0.9mm (QFN ), while providing the highest performance, lowest noise, and the lowest cost semiconductor packaging to address a wide range of handheld consumer electronic devices. The device provides the highest robustness by supporting 10,000g shock in operation. The highest cross-ax is isolation is achieved by design from its single silicon integration. The IMU-3000 was designed to connect directly with a third-party 3-axis digital accelerometer, which slaves directly to the IMU-3000 master and can be cloc ked from the internal phase locked loop of the IMU-3000 device, providing highly accurate timing for a true 6-axis motion processing solution previously only available in costly and bulky inertial measurement units.

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 6 of 54

1.4 Applications

 Game controllers  3D Remote controls for Internet connected TVs and Set Top Boxes  Health and sports monitoring  Motion tracking  Gesture recognition and advanced user interfaces

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2 Features

The IMU-3000 Motion Processing Unit includes a wide range of features:

2.1 Sensors

 X-, Y-, Z-Axis angular rate sensors (gyros) on one integrated circuit  Digital-output temperature sensor  6-axis motion processing capability using secondary I 2C interface to directly connect to a digital 3- axis third-party accelerometer  Factory-calibrated scale factor  High cross-axis isolation via proprietary MEMS design  10,000 g shock tolerant

2.2 Digital Output

 Fast Mode (400kHz) I 2C serial interface  16-bit ADCs for digitizing sensor outputs  Angular rate sensors (gyros) with applicatio ns-programmable full-scale-range of ±250°/sec, ±500°/sec, ±1000°/sec, or ±2000°/sec.

2.3 Motion Processing

 Embedded Digital Motion Processing™ (DMP™) engine supports 3D motion processing. When used together with a digital 3-axis third pa rty accelerometer, the IMU-3000 collects the accelerometer data via a dedicated interface, while synchronizing data sampling at a user defined rate. The total data set obtained by the IMU- 3000 includes 3-axis gy roscope data, 3-axis accelerometer data, and temperature data.  FIFO buffers complete data set, reducing timing requirements on the system processor and saving power by letting the proc essor burst read the FIFO data, and then go into a low-power sleep mode while the IMU collects more data.  Data collection polled or interrupt driven with on-chip programmable interrupt functionality  Programmable low-pass filters

2.4 Clocking

 On-chip timing generator clock frequency ±1% variation over full temperature range  Optional external clock inpu ts of 32.768kHz or 19.2MHz  1MHz clock output to synchronize with digital 3-axis accelerometer

2.5 Power

 VDD analog supply voltage range of 2.1V to 3.6V  Flexible VLOGIC reference voltage allows for I 2C interface voltages from 1.71V to VDD  Power consumption with all three axis active: 6.5mA  Sleep mode: 5µA  Each axis can be individually powered down

2.6 Package

 4x4x0.9mm QFN plastic package  MEMS structure hermetically sealed and bonded at wafer level  RoHS and Green compliant

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 8 of 54

3 Electrical Characteristics

3.1 Sensor Specifications

Typical Operating Circuit of Section 4.2, VDD = 2.5V, VLOGIC = 2.5V, TA=25°C. Parameter Conditions Min Typical Max Unit Notes GYRO SENSITIVITY Full-Scale Range FS_SEL=0 ±250 º/s 4 FS_SEL=1 ±500 4 FS_SEL=2 ±1000 4 FS_SEL=3 ±2000 4 Gyro ADC Word Length 16 Bits 3 Sensitivity Scale Factor FS_SEL=0 131 LSB/(º/s) 1 FS_SEL=1 65.5 3 FS_SEL=2 32.8 3 FS_SEL=3 16.4 3 Sensitivity Scale Factor Tolerance 25°C -3 +3 % 2 Sensitivity Scale Factor Variation Over Temperature ±2 % 2 Nonlinearity Best fit straight line; 25°C 0.2 % 6 Cross-Axis Sensitivity 2 % 6 GYRO ZERO-RATE OUTPUT (ZRO) Initial ZRO Tolerance 25°C ±40 º/s 2 ZRO Variation Over Temperature -40°C to +85°C ±30 º/s 2 Power-Supply Sensitivity (1-10Hz) Sine wave, 100mVpp; VDD=2.2V 0.2 º/s 5 Power-Supply Sensitivity (10 - 250Hz) Sine wave, 100mVpp; VDD=2.2V 0.2 º/s 5 Power-Supply Sensitivity (250Hz - 100kHz) Sine wave, 100mVpp; VDD=2.2V 4 º/s 5 Linear Acceleration Sensitivity Static 0.1 º/s/ g 6 GYRO NOISE PERFORMANCE FS_SEL=0 Total RMS Noise DLPFCFG=2 (100Hz) 0.2 º/s-rms 1 Rate Noise Spectral Density At 10Hz 0.02 º/s/ √Hz 2 GYRO START-UP TIME DLPFCFG=0 ZRO Settling to ±1º/s of Final 50 ms 5 TEMPERATURE SENSOR Range Sensitivity Untrimmed -40 to 85 280 ºC LSB/ºC Room-Temperature Offset 35 o C -7200 LSB 1 Absolute Accuracy 35 o C TBD °C Linearity Best fit straight line (-30°C to +85°C) ±1 °C 2 TEMPERATURE RANGE Specified Temperature Range -40 85 ºC 2 Notes: 1. Tested in production 2. Based on characterization of 30 parts over temperature on evaluation board or in socket 3. Based on design, through modeling and simulation across PVT 4. Typical. Randomly selected part measured at r oom temperature on evaluation board or in socket 5. Based on characterization of 5 parts over temperature 6. Tested on 5 parts at room temperature

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3.2 Electrical Specifications

Typical Operating Circuit of Section 4.2, VDD = 2.5V, TA = 25°C. Parameters Conditions Min Typical Max Units Notes VDD POWER SUPPLY Operating Voltage Range 2.1 3.6 V 2 Ramp Rate Monotonic ramp. Ramp rate is 10% to 90% of the final value (see Figure in Section 4.4) 0 5 ms 2 Normal Operating Current 6.5 mA 1 Sleep Mode Current 5 µA 5 VLOGIC REFERENCE VOLTAGE Voltage Range VLOGIC must be ≤VDD at all times

1.71 VDD V

Monotonic ramp. Ramp rate is 10% to 90% of the final value (see Figure in Section 4.4) 1 ms 6 Normal Operating Current 100 µA START-UP TIME FOR REGISTER READ/WRITE 20 100 ms 5 I C ADDRESS AD0 = 0 1101000 6 AD0 = 1 1101001 6 DIGITAL INPUTS (AD0, CLKIN) VIH, High Level Input Voltage 0.7*VDD V 5 VIL, Low Level Input Voltage 0.3*VDD V 5 CI, Input Capacitance 5 pF 7 DIGITAL OUTPUT (INT) VOH, High Level Output Voltage RLOAD=1MΩ 0.9*VLOGIC V 2 VOL1, LOW-Level Output Voltage RLOAD=1MΩ 0.1*VLOGIC V 2 VOL.INT1, INT Low-Level Output Voltage OPEN=1, 0.3mA sink current

0.1 V 2

Output Leakage Current OPEN=1 100 nA 4 tINT, INT Pulse Width LATCH_INT_EN=0 50 µs 4 Notes: 1. Tested in production 2. Based on characterization of 30 parts over temperature on evaluation board or in socket 4. Typical. Randomly selected part measured at r oom temperature on evaluation board or in socket 5. Based on characterization of 5 parts over temperature 6. Refer to Section 4.4 for the recommended power-on procedure 7. Guaranteed by design

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 10 of 54

3.3 Electrical Specifications, continued

Typical Operating Circuit of Section 4.2, VDD = 2.5V, VLOGIC = 2.5V, TA=25°C. Parameters Conditions Typical Units Notes Primary I C I/O (SCL, SDA) VIL, LOW-Level Input Voltage -0.5V to 0.3*VLOGIC V 2 VIH, HIGH-Level Input Voltage 0.7*VLOGIC to VLOGIC + 0.5V V 2 Vhys, Hysteresis 0.1*VLOGIC V 2 VOL1, LOW-Level Output Voltage 3mA sink current 0 to 0.4 V 2 IOL, LOW-Level Output Current V OL = 0.4V 3 mA 2 V OL = 0.6V 5 mA 2 Output Leakage Current 100 nA 4 tof, Output Fall Time from VIHmax to VILmax Cb bus capacitance in pF 20+0.1Cb to 250 ns 2 CI, Capacitance for Each I/O pin 10 pF 5 Secondary I C I/O (AUX_CL, AUX_DA) AUX_VDDIO=0 VIL, LOW-Level Input Voltage -0.5V to 0.3*VLOGIC V 2 VIH, HIGH-Level Input Voltage 0.7*VLOGIC to VLOGIC+0.5V V 2 Vhys, Hysteresis 0.1*VLOGIC V 2 VOL1, LOW-Level Output Voltage VLOGIC > 2V; 1mA sink current 0 to 0.4 V 2 VOL3, LOW-Level Output Voltage VLOGIC < 2V; 1mA sink current 0 to 0.2*VLOGIC V 2 IOL, LOW-Level Output Current V OL = 0.4V 1 mA 2 V OL = 0.6V 1 mA 2 Output Leakage Current 100 nA 4 tof, Output Fall Time from VIHmax to VILmax Cb bus capacitance in pF 20+0.1Cb to 250 ns 2 CI, Capacitance for Each I/O pin 10 pF 5 Secondary I C I/O (AUX_CL, AUX_DA) AUX_VDDIO=1 VIL, LOW-Level Input Voltage -0.5 to 0.3*VDD V 2 VIH, HIGH-Level Input Voltage 0.7*VDD to VDD+0.5V V 2 Vhys, Hysteresis 0.1*VDD V 2 VOL1, LOW-Level Output Voltage 1mA sink current 0 to 0.4 V 2 IOL, LOW-Level Output Current V OL = 0.4V 1 mA 2 V OL = 0.6V 1 mA 2 Output Leakage Current 100 nA 4 tof, Output Fall Time from VIHmax to VILmax Cb bus capacitance in pF 20+0.1Cb to 250 ns 2 CI, Capacitance for Each I/O pin 10 pF 5 Notes: 2. Based on characterization of 5 parts over temperature. 4. Typical. Randomly selected part measured at r oom temperature on evaluation board or in socket 5. Guaranteed by design

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 11 of 54

3.4 Electrical Specifications, continued

Typical Operating Circuit of Section 4.2, VDD = 2.5V, VLOGIC = 2.5V, TA=25°C. Parameters Conditions Min Typical Max Units Notes INTERNAL CLOCK SOURCE CLKSEL=0,1,2,3 Sample Rate, Fast DLPFCFG=0 SAMPLERATEDIV = 0 8 kHz 4 Sample Rate, Slow DLPFCFG=1,2,3,4,5, or 6 SAMPLERATEDIV = 0 1 kHz 4 Reference Clock Output CLKOUTEN = 1 1.024 MHz 4 Clock Frequency Initial Tolerance CLKSEL=0, 25°C -3 +3 % 1 CLKSEL=1,2,3; 25°C -1 +1 % 1 Frequency Variation over Temperature CLKSEL=0 -15 to +10 % 2 CLKSEL=1,2,3 ±1 % 2 PLL Settling Time CLKSEL=1,2,3 1 ms 3 EXTERNAL 32.768kHz CLOCK CLKSEL=4 External Clock Frequency 32.768 kHz 3 External Clock Jitter Cycle- to-cycle rms 1 to 2 µs 3 Sample Rate, Fast DLPFCFG=0 SAMPLERATEDIV = 0 8.192 kHz 3 Sample Rate, Slow DLPFCFG=1,2,3,4,5, or 6 SAMPLERATEDIV = 0 1.024 kHz 3 Reference Clock Output CLKOUTEN = 1 1.0486 MHz 3 PLL Settling Time 1 ms 3 EXTERNAL 19.2MHz CLOCK CLKSEL=5 External Clock Frequency 19.2 MHz 3 Sample Rate, Fast DLPFCFG=0 SAMPLERATEDIV = 0 8 kHz 3 Sample Rate, Slow DLPFCFG=1,2,3,4,5, or 6 SAMPLERATEDIV = 0 1 kHz 3 Reference Clock Output CLKOUTEN = 1 1.024 MHz 3 PLL Settling Time 1 ms 3 Notes: 1. Tested in production 2. Based on characterization of 30 parts over temperature on evaluation board or in socket 3. Based on design, through modeling and simulation across PVT 4. Typical. Randomly selected part measured at r oom temperature on evaluation board or in socket 5. Based on characterization of 5 parts over temperature.

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3.5 I 2C Timing Characterization

TA=25°C. Parameters Conditions Min Typical Max Units Notes I2C TIMING I 2C FAST-MODE fSCL, SCL Clock Frequency 0 400 kHz 1 tHD.STA, (Repeated) START Condition Hold Time 0.6 µs 1 tLOW, SCL Low Period 1.3 µs 1 tHIGH, SCL High Period 0.6 µs 1 tSU.STA, Repeated START Condition Setup Time 0.6 µs 1 tHD.DAT, SDA Data Hold Time 0 µs 1 tSU.DAT, SDA Data Setup Time 100 ns 1 tr, SDA and SCL Rise Time Cb bus cap. from 10 to 400pF 20+0.1 Cb 300 ns 1 tf, SDA and SCL Fall Time Cb bus cap. from 10 to 400pF 20+0.1 Cb 300 ns 1 tSU.STO, STOP Condition Setup Time 0.6 µs 1 tBUF, Bus Free Time Between STOP and START Condition 1.3 µs 1 Cb, Capacitive Load for each Bus Line 400 pF 2 tVD.DAT, Data Valid Time 0.9 µs 1 tVD.ACK, Data Valid Acknowledge Time 0.9 µs 1 Notes: 1. Based on characterization of 5 parts over temperature on evaluation board or in socket 2. Guaranteed by design I2C Bus Timing Diagram

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 13 of 54

3.6 Absolute Maximum Ratings

Stress above those listed as “Absolute Maximum Ratings” may cause permanent damage to the device. These are stress ratings only and functional operation of the device at these conditions is not implied. Exposure to the absolute maximum ratings conditions for extended periods may affect device reliability. Absolute Maximum Ratings Parameter Rating Supply Voltage, VDD -0.5V to +6V VLOGIC Input Voltage Level -0.5V to VDD + 0.5V REGOUT -0.5V to 2V Input Voltage Level (CLKIN, AUX_DA, AD0, INT, SCL, SDA) -0.5V to VDD + 0.5V CPOUT (2.1V ≤ VDD ≤ 3.6V ) -0.5V to 30V Acceleration (Any Axis, unpowered) 10,000 g for 0.3ms Operating Temperature Range -40°C to +105°C Storage Temperature Range -40°C to +125°C Electrostatic Discharge (ESD) Protection 1.5kV (HBM); 200V (MM)

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 14 of 54

4 Applications Information

4.1 Pin Out and Signal Description

Pin Number Pin Name Pin Description

1 CLKIN External reference clock input

6 AUX_DA Interface to a 3

party accelerometer, SDA pin. Logic levels are set to be either VDD or VLOGIC. See Section 7 for more details.

7 AUX_CL Interface to a 3

party accelerometer, SCL pin. Logic levels are set to be either VDD or VLOGIC. See Section 7 for more details. 8 VLOGIC Digital I/O supply voltage. VLOGIC must be ≤ VDD at all times.

9 AD0 I

10 REGOUT Regulator filter capacitor connection

11 RESV-G Reserved – Connect to Ground.

12 INT Interrupt digital output (totem pole or open-drain)

13 VDD Power supply voltage and Digital I/O supply voltage

18 GND Power supply ground

19 RESV Reserved. Do not connect.

20 CPOUT Charge pump capacitor connection

21 RESV Reserved. Do not connect.

22 CLKOUT 1MHz clock output for third-party accelerometer synchronization

23 SCL I

24 SDA I

2, 3, 4, 5, 14, 15, 16, 17 NC Not internally connected. May be used for PCB trace routing. 7 8 9 10 11 12 AUX_CL VLOGIC AD0 REGOUT RESV-G INT NC NC NC VDD NC GND NC NC NC AUX_DA NC CLKIN 24 23 22 21 20 19 RESV CPOUT RESV CLKOUT SCL SDA IMU-3000 24-pin, 4mm x 4mm x 0.9mm Orientation of Axes of Sensitivity and Polarity of Rotation IMU-3000

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4.2 Typical Operating Circuit

4.3 Bill of Materials for External Components

Component Label Specification Quantity VDD Bypass Capacitor C1 Ceramic, X7R, 0.1µF ±10%, 4V 1 Regulator Filter Capacitor C2 Ceramic, X7R, 0.1µF ±10%, 2V 1 Charge Pump Capacitor C3 Ceramic, X7R, 2.2nF ±10%, 50V 1 VLOGIC Bypass Capacitor C4 Cera mic, X7R, 10nF ±10%, 4V 1

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4.4 Recommended Power-on Procedure

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5 Functional Overview

5.1 Block Diagram

(DMP) Slave (Primary) I2C Serial Interface Master (Secondary) I2C Serial Interface Config Register Clock CPOUT Secondary Interface Bypass Mux AUX_CL AUX_DA Interrupt Status Register INT12 Sensor Register OTP FIFO VDD Bias & LDO GND REGOUT 13 18 10 RESV-G 1CLKIN CLKOUT ADC ADC ADC Signal Conditioning Signal Conditioning Signal Conditioning ADC VLOGIC8

5.2 Overview

The IMU-3000 is comprised of the following key blocks / functions:  Three-axis MEMS rate gyroscope sensors with 16-bit ADCs and signal conditioning  Digital Motion Processor (DMP)  Primary I 2C serial communications interface  Secondary I 2C serial interface for 3rd party accelerometer  Clocking  Sensor Data Registers  FIFO  Interrupts  Digital-Output Temperature Sensor  Bias and LDO  Charge Pump

5.3 Three-Axis MEMS Gyroscope with 16-bit ADCs and Signal Conditioning

The IMU-3000 consists of three independent vibrator y MEMS rate gyroscopes, which detect rotation about the X, Y, and Z axes. When the gyros are rotated about any of the sense ax es, the Coriolis Effect causes a vibration that is detected by a capaci tive pickoff. The resulting signal is amplified, demodulated, and filtered to produce a voltage that is proportional to the angular ra te. This voltage is digitized using individual on-chip 16-bit Analog-to-Digital Converters (A DCs) to sample each axis. The full-scale range of the gyro sensors may be digitally programmed to ±250, ±500, ±1000, or ±2000 degrees per second (dps). ADC sample rate is programmable from 8,000 samples per second, down to 3.9 samples per second, and user-selectable low- pass filters enable a wide range of cut-off frequencies.

5.4 Digital Motion Processor

The embedded Digital Motion Processor (DMP) is loca ted within the IMU-3000 and offloads computation of motion processing algorithms from the host processor. The DMP acquires and processes data from the on-

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 18 of 54 chip gyroscopes and an external accelerometer. The resulting data can be read from IMU-3000’s FIFO. The DMP has access to certain of the IMU’s external pins, which can be used for synchronizing external devices to the motion sensors, or generating interrupts for the application. The purpose of the DMP is to offload both timing requirements and processing power from the host processor. Typically, motion processing algorithms should be run at a high rate, often around 200Hz, in order to provide accurate results with low latency. This is required even if the application updates at a much lower rate; for example, a low power user interface may update as slowly as 5Hz, but the motion processing should still run at 200Hz. The DMP can be used as a tool in order to minimize power, simplify timing and software architecture, and save valuable MIPS on the host processor for use in the application.

5.5 Primary I 2C Serial Communications Interface

The IMU-3000 communicates to a system processor using the I 2C serial interface; the device always acts as a slave when communicating to the system processor. The logic level for communications to the master is set by the voltage on the VLOGIC pin. The LSB of the of the I2C slave address is set by pin 9 (AD0).

5.6 Secondary I 2C Serial Interface for third-party Accelerometer

The IMU-3000 has a secondary I2C bus for communicating to an off-chip 3-axis digital output accelerometer. This bus has two operating modes: I 2C Master Mode, where the IMU-3000 acts as a master to an external accelerometer connected to the secondary I 2C bus; and Pass-Through Mode, where the IMU-3000 directly connects the primary and secondary I 2C buses together, to allow the sy stem processor to directly communicate with the external accelerometer. Secondary I2C Bus Modes of Operation:  I 2C Master Mode : allows the IMU-3000 to directly access the data registers of an external digital accelerometer. In this mode, the IMU-3000 directly obtains sensor data from an accelerometer thus allowing the on-chip DMP to generate sensor fu sion data without intervention from the system applications processor. In I2C master mode, the IMU-3000 can be configured to perform burst reads, returning the following data from the accelerometer:  X accelerometer data (2 bytes)  Y accelerometer data (2 bytes)  Z accelerometer data (2 bytes)  Pass-Through Mode : allows an external system processor to act as master and directly communicate to the external accelerometer connected to the secondary I 2C bus pins (AUX_DA and AUX_CL). This is useful for configuring the ac celerometer, or for keeping the IMU-3000 in a low- power mode, when only the accelerometer is to be used. In this mode, the secondary I 2C bus control logic (third-party accelerometer Interf ace block) of the IMU-3000 is disabled, and the secondary I2C pins AUX_DA and AUX_CL (Pins 6 and 7) are connected to the main I2C bus (Pins 23 and 24) through analog switches. Secondary I2C Bus I/O Logic Levels The logic levels of the secondary I 2C bus can be programmed to be either VDD or VLOGIC (see Sections 7 and 8).

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6 Clocking

6.1 Internal Clock Generation

The IMU-3000 has a flexible clocking scheme, allowing for a variety of internal or external clock sources for the internal synchronous circuitry. This synchronous circuitry includes the signal conditioning and ADCs, the DMP, and various control circuits and registers. An on-chip PLL provides flexibility in the allowable inputs for generating this clock. Allowable internal sources for generating the internal clock are:  An internal relaxation oscillator  Any of the X, Y, or Z gyros (MEMS oscillators with a variation of ±1% over temperature range) Allowable external clocking sources are:  32.768kHz square wave  19.2MHz square wave Which source to select for generating the internal sync hronous clock depends on the availability of external sources and the requirements for power consumption an d clock accuracy. Most likely, these requirements will vary by mode of operation. For example, in one mode, where the biggest concern is power consumption, one may wish to operate the Digital Motion Processor of the IMU-3000 to process accelerometer data, while keeping the gyros off. In this case, the internal relaxation oscillator is a good clock choice. However, in another mode, where the gyros are active, selecting t he gyros as the clock source provides for a more- accurate clock source. Clock accuracy is important, since timing errors directly affect the distance and angle calculations performed by the Digital Motion Processor (or by extension, by any processor). There are also start-up conditions to consider. When the IMU-3000 first starts up, the device operates off of its internal clock, until programmed to operate from another source. This allows the user, for example, to wait for the MEMS oscillators to stabilize before they are selected as the clock source.

6.2 Clock Output

In addition, the IMU-3000 provides a 1MHz clock outpu t, which allows the device to operate synchronously with an external digital 3-axis accelerometer. Op erating synchronously provides for higher-quality sensor fusion data, since the sampling instant for the sensor data can be set to be coincident for all sensors.

6.3 Sensor Data Registers

The sensor data registers contain the latest gyro a nd temperature data. They are read-only registers, and are accessed via the Serial Interface. Data from these registers may be read anytime, however, the interrupt function may be used to determine when new data is available.

6.4 FIFO

The IMU-3000 contains a 512-byte FIFO register that is accessible via the Serial Interface. The FIFO configuration register determines what data goes into it, with possible choices being gyro data, accelerometer data, temperature readings, and auxiliary ADC readings. A FIFO counter keeps track of how many bytes of valid data are contained in the FIFO. T he FIFO register supports burst reads. The interrupt function may be used to determine when new data is available.

6.5 Interrupts

Interrupt functionality is configured via the Interrupt Configuration register. Items that are configurable include the INT pin configuration, th e interrupt latching and clearing method, and triggers for the interrupt. Items that can trigger an interrupt are (1) Clock generator locked to new reference oscillator (used when switching clock sources); (2) Digital Motion Proces sor Done (programmable function); (3) new data is available to be read (from the FIFO and Data regi sters); and (4) the IMU-3000 did not receive an acknowledge from the accelerometer on the Secondary I 2C bus. The interrupt status can be read from the Interrupt Status register.

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6.6 Digital-Output Temperature Sensor

An on-chip temperature sensor and ADC are used to measure the IMU-3000 die temperature. The readings from the ADC can be read from the FIFO or the Sensor Data registers.

6.7 Bias and LDO

The bias and LDO section generates the internal supply and the reference voltages and currents required by the IMU-3000. Its inputs are an unregulated VDD of 2.1V to 3.6V and a VLOGIC - logic reference supply voltage - of 1.71V to VDD. The LDO output is bypassed by a 0.1µF capacitor at REGOUT.

6.8 Charge Pump

An on-board charge pump generates the high voltage requi red for the MEMS oscill ators. Its output is bypassed by a 2.2nF capacitor at CPOUT.

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7 Digital Interface

7.1 I 2C Serial Interface

The internal registers of the IMU-3000 can be accessed using I2C at up to 400kHz. Serial Interface Pin Number Pin Name Pin Description 8 VLOGIC Digital I/O supply voltage. VLOGIC must be ≤ VDD at all times.

9 AD0 I 2C Slave Address LSB

23 SCL I 2C serial clock

24 SDA I 2C serial data

7.1.1 I 2C Interface

I2C is a two-wire interface comprised of the signals seri al data (SDA) and serial cl ock (SCL). In general, the lines are open-drain and bi-directional. In a generalized I 2C interface implementation, attached devices can be a master or a slave. The master device puts the slave address on the bus, and the slave device with the matching address acknowledges the master. The IMU-3000 always operates as a slave device when communicating to the system processor, which thus acts as the master. SDA and SCL lines typically need pull-up resistors to VDD. The maximum bus speed is 400kHz. The slave address of the IMU-3000 is b110100X which is 7 bits long. The LSB bit of the 7 bit address is determined by the logic level on pin ADO. This allo ws two IMU-3000s to be connected to the same I 2C bus. When used in this configuration, the address of the one of the devices should be b1101000 (pin ADO is logic low) and the address of the other should be b1101001 (pin AD0 is logic high). The I 2C address is stored in the WHO_AM_I register. I2C Communications Protocol START (S) and STOP (P) Conditions Communication on the I 2C bus starts when the master puts the START condition (S) on the bus, which is defined as a HIGH-to-LOW tr ansition of the SDA line while SCL line is HIGH (see figure below). The bus is considered to be busy until the master puts a STOP c ondition (P) on the bus, which is defined as a LOW to HIGH transition on the SDA line while SCL is HIGH (see figure below). Additionally, the bus remains busy if a repeated START (Sr) is generated instead of a STOP condition. SDA SCL S START condition STOP condition P START and STOP Conditions

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 22 of 54 Data Format / Acknowledge I2C data bytes are defined to be 8 bits long. There is no restriction to the number of bytes transmitted per data transfer. Each byte transferred must be follo wed by an acknowledge (ACK) signal. The clock for the acknowledge signal is generated by the master, while the receiver generates the actual acknowledge signal by pulling down SDA and holding it low during the HIGH portion of the acknowledge clock pulse. If a slave is busy and cannot transmit or receive anot her byte of data until some other task has been performed, it can hold SCL LOW, thus forcing the master into a wait state. Normal data transfer resumes when the slave is ready, and releases the clock line (refer to the following figure). Acknowledge on the I2C Bus Communications After beginning communications with the START condit ion (S), the master sends a 7-bit slave address followed by an 8th bit, the read/write bit. The read/write bit indicates whether the master is receiving data from or is writing to the slave device. Then, the master releases the SDA line and waits for the acknowledge signal (ACK) from the slave device. Each byte transferred must be followed by an acknowledge bit. To acknowledge, the slave device pulls the SDA line LOW and keeps it LOW for the high period of the SCL line. Data transmission is always terminated by the mast er with a STOP condition (P), thus freeing the communications line. However, the master can ge nerate a repeated START c ondition (Sr), and address another slave without first generating a STOP condition (P). A LOW to HIGH transition on the SDA line while SCL is HIGH defines the stop condition. All SDA chang es should take place when SCL is low, with the exception of start and stop conditions. Complete I2C Data Transfer

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 23 of 54 To write the internal IMU-3000 regist ers, the master transmits the star t condition (S), followed by the I 2C address and the write bit (0). At the 9 th clock cycle (when the clock is hi gh), the IMU-3000 acknowledges the transfer. Then the master puts the register address (RA) on the bus. After the IMU-3000 acknowledges the reception of the register address, the master puts the register data onto the bus. This is followed by the ACK signal, and data transfer may be concluded by the stop co ndition (P). To write multiple bytes after the last ACK signal, the master can continue outputting data rather than transmitting a stop signal. In this case, the IMU-3000 automatically increments the register addre ss and loads the data to the appropriate register. The following figures show single and two-byte write sequences. Single-Byte Write Sequence Burst Write Sequence To read the internal IMU-3000 registers, the ma ster sends a start condition, followed by the I 2C address and a write bit, and then the register address that is going to be read. Upon receiving the ACK signal from the IMU-3000, the master transmits a start signal followe d by the slave address and read bit. As a result, the IMU-3000 sends an ACK signal and the data. The communication ends with a not acknowledge (NACK) signal and a stop bit from master. The NACK condition is defined such that the SDA line remains high at the th clock cycle. The following figures show single and two-byte read sequences. Single-Byte Read Sequence Burst Read Sequence I 2C Terms Signal Description S Start Condition: SDA goes from high to low while SCL is high AD Slave I 2C address W Write bit (0) R Read bit (1) ACK Acknowledge: SDA line is low while the SCL line is high at the 9 th clock cycle NACK Not-Acknowledge: SDA line stays high at the 9 th clock cycle RA IMU-3000 internal register address DATA Transmit or received data P Stop condition: SDA going from low to high while SCL is high Master S AD+W RA DATA P Slave ACK ACK ACK Master S AD+W RA DATA DATA P Slave ACK ACK ACK ACK Master S AD+W RA S AD+R NACK P Slave ACK ACK ACK DATA Master S AD+W RA S AD+R ACK NACK P Slave ACK ACK ACK DATA DATA

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7.2 Supported Interfaces

The IMU-3000 supports I2C communications on both its primary (microprocessor) serial interface and its secondary (accelerometer) interface.

7.3 Logic Levels

The IMU-3000 accelerometer bus I/O logic levels are set to be either VDD or VLOGIC, as shown in the table below. I/O Logic Levels vs. AUX_VDDIO bit AUX_VDDIO MICROPROCESSOR LOGIC LEVELS (Pins: SDA, SCL, AD0, CLKIN, INT) ACCELEROMETER LOGIC LEVELS (Pins: AUX_DA, AUX_CL)

0 VLOGIC VLOGIC

1 VLOGIC VDD

Notes: 1. CLKOUT has logic levels that are always referenced to VDD 2. The power-on-reset value for AUX_VDDIO is 0. VLOGIC may be set to be equal to VDD or to anot her voltage, such that at all times VLOGIC is ≤ VDD. When AUX_VDDIO is set to 0 (its power-on-reset value), VLOGIC is the reference voltage for both the microprocessor system bus and the accelerometer secondary bus, as sh own in the figure of Section 8.2.1. When AUX_VDDIO is set to 1, VLOGIC is the reference voltage for the microprocessor system bus and VDD is the reference voltage for the accelerometer secondary bus, as shown in the figure of Section 8.2.2.

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7.3.1 AUX_VDDIO = 0

The figure below shows logic levels and voltage conne ctions for AUX_VDDIO = 0. Note that the actual configuration will depend on the type of third-party accelerometer used. I/O Levels and Connections for AUX_VDDIO = 0

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7.3.2 AUX_VDDIO = 1

When AUX_VDDIO is set to 1 by the user, VLOGIC is the re ference voltage for the microprocessor system bus and VDD is the reference voltage for the accelerome ter secondary bus, as shown in the figure below. This is useful when interfacing to a third-party accelerometer where there is only one supply for both the logic and analog sections of the 3rd party accelerometer. I/O Levels and Connections for Two Example Power Configurations (AUX_VDDIO = 1)

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8 Motion Processing Library (MPL)

To assist in the rapid development and deployment of products using the IMU-3000, InvenSense provides a Motion Processing Library (MPL) softw are development kit that has been ve rified to work in the hardware and software environment shown in the figure below. IMU‐3000 Evaluation Board USB InvenSense ARM Evaluation Board IMU‐3000 USB to I2C WinXP PC 20‐pin connector Minu‐USB connector Gyro DMP FIFO Accel Accel The MPL contains the core algorithm engines for mo tion processing, and includes an API layer which provides a simple interface into using these engines (see figure below).

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 28 of 54 The MPL communicates with the System Layer, which is a platform-specific interface into the hardware and software environment; this System Layer software must be implemented by the customer for his particular environment. The software development kit includes s hell functions to speed up the development of this System Layer software. The MPL is independent of the Operating System (OS) since the System Layer software handles OS-specific requirements. The purpose of the DMP is to offload both timing requirements and processing requirements from the host processor. Typically, raw data integration (sensor fusion) should be run at a high rate, often around 200Hz, in order to provide accurate results with low latency. Th is is required even if the app lication updates at a much lower rate; for example, a low power user interface may update as slowly as 5Hz, but the sensor fusion should still run at 200Hz. The DMP can be used to minimize power, simplify timing and software architecture, and saving valuable MIPS on the host processor for use in the application. The IMU-3000 MPL Functional Specification describes in detail the API and System Layer routines needed for interfacing to the IMU-3000.

8.1 Demo Software

InvenSense provides demonstration software in the form of source code and a compiled demonstration that runs on a PC running Windows XP. This software wo rks in conjunction with the hardware shown in the figure at the top of Section 8. The PC demo software pr ovides the functionality that allows a user to become familiar with the use of gyros and accelerometers.

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9 Register Map

(Hex) Addr (Decimal) Register Name R/W Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 0 0 WHO_AM_I R/W 0 ID - C 12 X_OFFS_USRH R/W X_OFF_H D 13 X_OFFS_USRL R/W X_OFF_L E 14 Y_OFFS_USRH R/W Y_OFFS_H F 15 Y_OFFS_USRL R/W Y_OFFS_L 10 16 Z_OFFS_USRH R/W Z_OFFS_H 11 17 Z_OFFS_USRL R/W Z_OFFS_L] 12 18 FIFO_EN R/W TEMP_ OUT GYRO_ XOUT GYRO_ YOUT GYRO_ ZOUT AUX_ XOUT AUX_ YOUT AUX_ ZOUT FIFO_ FOOTER 13 19 AUX_VDDIO R/W 0 0 0 0 0 AUX_ VDDIO 0 0 14 20 AUX_SLV_ ADDR R/W CLKOUT EN AUX_ID 15 21 SMPLRT_DIV R/W SMPLRT_DIV 16 22 DLPF_FS R/W 0 0 0 FS_SEL DLPF_CFG 17 23 INT_CFG R/W ACTL OPEN LATCH_ INT_EN INT_ ANYRD_ 2CLEAR I2C_MST _ERR_E N IMU_ RDY_ EN DMP_ DONE _EN RAW_ RDY_ EN 18 24 AUX_BURST_AD DR R/W BURST_ADDR 1A 26 INT_STATUS R FIFO_FU LL - - I2C_MST _ERR IMU_ RDY DMP_ DONE RAW_ DATA_ RDY 1B 27 TEMP_OUT_H R TEMP_OUT_H 1C 28 TEMP_OUT_L R TEMP_OUT_L 1D 29 GYRO_XOUT_H R GYRO_XOUT_H 1E 30 GYRO_XOUT_L R GYRO_XOUT_L 1F 31 GYRO_YOUT_H R GYRO_YOUT_H 20 32 GYRO_YOUT_L R GYRO_YOUT_L 21 33 GYRO_ZOUT_H R GYRO_ZOUT_H 22 34 GYRO_ZOUT_L R GYRO_ZOUT_L 35 53 DMP_REG1 R/W RESERVED1 36 54 DMP_REG2 R/W RESERVED2 37 55 DMP_REG3 R/W RESERVED3 38 56 DMP_REG4 R/W RESERVED4 39 57 DMP_REG5 R/W RESERVED5 3A 58 FIFO_COUNTH R - - - - - - FIFO_COUNT_H 3B 59 FIFO_COUNT L R FIFO_COUNT_L 3C 60 FIFO_R R FIFO_DATA 3D 61 USER_CTRL R/W DMP_ EN FIFO_EN AUX_IF_EN - AUX_IF_RST DMP_RST FIFO_RST GYRO_RST 3E 62 PWR_MGM R/W H_RESET SLEEP STBY_XG STBY_YG STBY_ZG CLK_SEL

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10 Register Description

This section details each register within the InvenSens e IMU-3000 gyroscope. Note that any bit that is not defined should be set to zero in order to be compatible with future InvenSense devices. The register space allows single-byte reads and writes , as well as burst reads and writes. When performing burst reads or writes, the memory pointer will increment until either (1) reading or writing is terminated by the master, or (2) the memory pointer reaches registers 57 or 60.

10.1 Register 0 – Who Am I

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 0 0 0 ID - Description: This register is used to verify the identity of the device. Parameters: ID Contains the I 2C address of the device, which can be changed by writing to this register. 0 This register bit must be set to 0 when writing to this register. The Power-On-Reset value of Bit6: Bit1 is 110 100. The Power-On-Reset value of Bit7 is 0.

10.2 Registers 12 to 17 – Gyro Offsets

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 C 12 X_OFFS_H D 13 X_OFFS_L E 14 Y_OFFS_H F 15 Y_OFFS_L 10 16 Z_OFFS_H 11 17 Z_OFFS_L Description: These registers are used to remove DC bias from the sensor outputs. The values in these registers are subtracted from the gyro sensor values before going into the sensor registers (see registers 29 to 34). Parameters: X_OFFS_H/L 16-bit offset (high and low bytes) of X gyro offset (2’s complement) Y_OFFS_H/L 16-bit offset (high and low bytes) of Y gyro offset (2’s complement) Z_OFFS_H/L 16-bit offset (high and low bytes) of Z gyro offset (2’s complement)

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10.3 Register 18 – FIFO Enable

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 12 18 TEMP_ OUT GYRO_ XOUT GYRO_ YOUT GYRO_ ZOUT AUX_ XOUT AUX_ YOUT AUX_ ZOUT FIFO_ FOOTER 00h Description: This register determines what data goes into the IM U-3000 FIFO, which is a 512 byte First-In-First- Out buffer (see register 60). Sensor data is aut omatically placed into the FIFO after each ADC sampling period is complete. The ADC sample rate is controlled by register 21. The order at which the data is put into the FIFO is from MSB to LSB, which means that it will match the order shown in the parameter detail below. Two bytes are used for each reading. For example, if Gyro X, Gyro Y, Gyro Z, and FIFO_FOOTER are configured to go into the FIFO, then each sample period the following 8 bytes would be inserted into the FIFO, as shown below: Gyro X High byte Gyro X Low byte Gyro Y High byte Gyro Y Low byte Gyro Z High byte Gyro Z Low byte FIFO_FOOTER High byte FIFO_FOOTER Low byte Parameters: TEMP_OUT Setting this inserts the Temperature reading into FIFO GYRO_XOUT Setting this inserts the X Gyro reading into FIFO GYRO_YOUT Setting this inserts the Y Gyro reading into FIFO GYRO_ZOUT Setting this inserts the Z Gyro reading into FIFO AUX_XOUT Setting this inserts the X Accelerometer reading into FIFO AUX_YOUT Setting this inserts the Y Accelerometer reading into FIFO AUX_ZOUT Setting this inserts the Z Accelerometer reading into FIFO FIFO_FOOTER Last word (2 bytes) for FIFO read. Described in more detail in Section 60

10.4 Registers 19 – AUX (Accel) VDDIO

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 13 19 0 0 0 0 0 AUX_ VDDIO 0 0 00h Description: This register determines the I/O logic levels for the secondary I2C bus clock and data lines (AUX_CL, AUX_DA). 1=VDD, 0=VLOGIC. Parameters: AUX_VDDIO I/O logic levels for the secondary I 2C bus clock and data lines (AUX_CL, AUX_DA). 1=VDD, 0=VLOGIC. 0 Load zeros into Bits 0, 1, 3-7.

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10.5 Register 20 – AUX (Accel) Slave Address

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 14 20 CLKOUTEN AUX_ID 00h Description: This register contains the enable bit for the refere nce clock output and the 7-bit slave address of the external 3rd party accelerometer. The CLKOUTEN bit is used to enable (1) or disabl e (0) the reference clock output at the CLKOUT pin. AUX_ID, the 7-bit accelero meter slave address, is used to access the accelerometer so that its sensor reading can be automatically read during each sample period at the same time as the gyro sensors. When reading the external accelerometer registers, the IMU-3000 takes over the secondary I2C bus, as a master to the accel, performing a burst read of the sensor registers. For this interface to be active, the AUX_IF_EN flag in the User Control register (61) must be set (set to 1). Whenever changing this register, the secondary accel interface must be reset with AUX _IF_RST to take effect. Refer to the User Control register (61). Parameters: CLKOUTEN The enable bit for the reference clock out put that is provided at the CLKOUT pin. 1=clock output enabled; 0=clock output disabled. AUX_ID Contains the I 2C address of the external accelerometer. The address can be changed by writing to this register.

10.6 Register 21 – Sample Rate Divider

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 15 21 SMPLRT_DIV 00h Description: This register determines the sample rate of t he IMU-3000 gyros. The analog gyros are sampled internally at either 1kHz or 8kHz, determined by the DLPF_CFG setting (see register 22). This sampling is then filtered digitally and delivered into the sensor registers afte r the number of cycles determined by this register. The sample rate is given by the following formula: Fsample = Finternal / (divider+1), where Finternal is either 1kHz or 8kHz As an example, if the internal sampling is at 1kHz , then setting this register to 7 would give the following: Fsample = 1kHz / (7 + 1) = 125Hz, or 8ms per sample Parameters: SMPLRT_DIV Sample rate divider: 0 to 255

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10.7 Register 22 – DLPF, Full Scale

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 16 22 0 0 0 FS_SEL DLPF_CFG 00h Description: This register configures parameters related to the sensor acquisition. The FS_SEL parameter allows setting the full-scale range of the gyro sensors, as described in the table below. FS_SEL FS_SEL Gyro Full-Scale Range 0 ±250°/sec 1 ±500°/sec 2 ±1000°/sec 3 ±2000°/sec The DLPF_CFG parameter sets the digital low pass filter configuration. It also determines the internal analog sampling rate used by the device as shown in the table below. DLPF_CFG DLPF_CFG Low Pass Filter Bandwidth Analog Sample Rate 0 256Hz 8kHz 1 188Hz 1kHz 2 98Hz 1kHz 3 42Hz 1kHz 4 20Hz 1kHz 5 10Hz 1kHz 6 5Hz 1kHz

7 Reserved Reserved

Parameters: FS_SEL Full scale selection for gyro sensor data DLPF_CFG Digital low pass filter configuration

0 Load zeros into Bits 5-7 of the DLPF, Full Scale register

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 34 of 54 DLPF Characteristics: The gain and phase responses of the digital low pass filter settings (DLPF_CFG) are shown below: Gain and Phase vs. Digital Filter Setting Gain and Phase vs. Digital Filter Setting, Showing Passband Details -50 -40 -30 -20 -10 Magnitude (dB) -90 -45 Phase (deg) Bode Diagram Frequency (Hz) 6 5 4 3 2 1 0 6 5 4 3 2 1 0 Magnitude (dB) -15 -10 Phase (deg) Bode Diagram Frequency (Hz) 6 5 4 3 2 1 0 6 5 4 3 2 1 0

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10.8 Register 23 – Interrupt Configuration

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 17 23 ACTL OPEN LATCH_ INT_EN INT_ ANYRD_ 2CLEAR I2C_MST _ERR_E N IMU_ RDY_ EN DMP_ DONE _EN RAW_ RDY_ EN 00h Description: This register configures the interrupt operation of the IMU-3000. The interrupt output pin (INT) configuration can be set, the interrupt latching/cle aring method can be set, and the triggers for the interrupt can be set. If LATCH_INT_EN = 1, the INT pin is held active until the interrupt status register is cleared. Note that if the application requires reading every sa mple of data from the IMU-3000, it is best to enable the raw data ready interrupt (RAW_RDY_EN). This allows the application to know when new sample data is available. Parameters: ACTL Logic level for INT output pin – 1=active low, 0=active high OPEN Drive type for INT output pi n – 1=open drain, 0=push-pull LATCH_INT_EN Latch mode – 1=latch until interrupt is cleared, 0=50µs pulse INT_ANYRD_2CLEAR Interrupt status register clear method – 1=clear by reading any register, 0=clear by reading interrupt status register (26) only I2C_MST_ERR_EN Enable interrupt when accelerometer on secondary I2C bus does not acknowledge IMU-3000 IMU_RDY_EN Enable interrupt when device is ready (PLL ready after changing clock source) DMP_DONE_EN Enable interrupt when DMP is done (programmable functionality) RAW_RDY_EN Enable interrupt when data is available

10.9 Register 24 – AUX (Accel) Burst Read Address / Secondary I 2C Bus I/O Level

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 18 24 BURST_ADDR 00h Description: This register configures the burst-mode-read starting address for an accelerometer attached to the secondary I2C bus of the IMU-3000, and determines the I/O logic levels of the secondary I 2C bus clock and data lines (AUX_CL, AUX_DA). Parameters: AUX_VDDIO I/O logic levels for the secondary I 2C bus clock and data lines (AUX_CL, AUX_DA; 1=VDD, 0=VLOGIC) BURST_ADDR Burst-mode-read starting address for external accelerometer attached to secondary I2C bus of the IMU-3000.

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10.10 Register 26 – Interrupt Status

Type: Read only Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 1A 26 FIFO_FULL - - - I2C_MST _ERR IMU_ RDY DMP_ DONE RAW_ DATA_ RDY 00h Description: This register is used to determine the status of the IMU-3000 interrupt. Whenever one of the interrupt sources is tri ggered, the correspo nding bit will be set. The polarity of the interrupt pin (active high/low) and the latch type (pulse or latch) has no affect on these status bits. In normal use, the RAW_DATA_RDY interrupt is used to determine when new sensor data is available in either the sensor registers (27 to 34) or in the FIFO (60). Interrupt Status bits get cleared as determi ned by INT_ANYRD_2CLEAR in the interrupt configuration register (23). Parameters: FIFO_FULL FIFO has overflowed. Cleared when Register 26 is read and when FIFO_RST (register 61) is set. I2C_MST_ERR The IMU-3000 did not receive an acknowledge from the accelerometer on the secondary I2C bus when the IMU-3000 was acting as a master IMU_RDY PLL ready DMP_DONE Digital Motion Processor (DMP) is done RAW_DATA_RDY Raw data or FIFO data is ready

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10.11 Registers 27 to 34 – Sensor Registers

Type: Read only Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value* 1B 27 TEMP_OUT_H 00h 1C 28 TEMP_OUT_L 00h 1D 29 GYRO_XOUT_H 00h 1E 30 GYRO_XOUT_L 00h 1F 31 GYRO_YOUT_H 00h 20 32 GYRO_YOUT_L 00h 21 33 GYRO_ZOUT_H 00h 22 34 GYRO_ZOUT_L 00h *Default Value applies if sensor is disabled. Description: These registers contain the gyro and temperature sensor data for the IMU-3000. At any time, these values can be read from the device; however it is best to use the interrupt function to determine when new data is available. If the FIFO is used, the contents of these registers are automatica lly copied into the FIFO at each sample period, and then this data can be read from the FIFO (register 60). Before being placed into these registers, the sensor data are first manipulated by the full scale setting (register 22) and the offset settings (registers 12 to 17). Parameters: TEMP_OUT_H/L 16-bit temperature data (2’s complement data format) GYRO_XOUT_H/L 16-bit X gyro output data (2’s complement data format) GYRO_YOUT_H/L 16-bit Y gyro output data (2’s complement data format) GYRO_ZOUT_H/L 16-bit Z gyro output data (2’s complement data format)

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10.12 Registers 53 to 57 – DMP Registers

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 35 53 RESERVED1 36 54 RESERVED2 37 55 RESERVED3 38 56 RESERVED4 38 57 RESERVED5 Description: The data for these registers is included in a source code file supplied by InvenSense, and is used for the Digital Motion Processor (DMP) operation. Th is data is only necessary if the DMP is enabled using the User Control register (register 61). Parameters: RESERVED1 Reserved data1 for the DMP RESERVED2 Reserved data2 for the DMP RESERVED3 Reserved data3 for the DMP RESERVED4 Reserved data4 for the DMP RESERVED5 Reserved data5 for the DMP

10.13 Registers 58 to 59 – FIFO Count

Type: Read only Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 3A 58 - - - - - - FIFO_COUNT_H 00h 3B 59 FIFO_COUNT_L 00h Description: These registers indicate how many bytes of valid data are contained in the FIFO. The FIFO can contain up to 512 bytes of data If the FIFO gets filled up completely, the length will r ead 512. In this state, the IMU-3000 continues to put new sensor data into the FIFO, thus overwr iting old FIFO data. Note, however, that the alignment of sensor data can change in this ov erflow condition. InvenSense recommends resetting the FIFO if an overflow condition occurs (use register 61), which will clear out the FIFO. Parameters: FIFO_COUNT_H/L Number of bytes currently in FIFO

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10.14 Register 60 – FIFO Data

Type: Read only Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 3C 60 FIFO_DATA 00h Parameters: FIFO_DATA Contains the FIFO data Description: This is the output register of the FIFO. Each read of this register gets the oldest contents of the IMU- 3000 FIFO buffer; thus the data is read out in the sa me order that the IMU-3000 put the data in. If the FIFO operation is enabled, the IMU-3000 puts new data into the FIFO at each sample interval. The data that goes in is determined by the FIFO enable register (18). A burst read or write is required for reading or writing multiple bytes to or from this register, since any read or write on this register causes an auto increment and a prefetch to occur. Proper operation of the FIFO requires that at least one word (2 bytes) of data be left in the FIFO during any read operation. To implement this, it is recommended that one extra two byte word (FIFO_FOOTER) be added to the end of the FIFO data so that all desired data can be read at each cycle, leaving the extra word remaining in the FIFO. This extra word will be read out (first) during the next read operation on the FIFO. Data is read into the FIFO in the following order: TEMP_OUT Temperature high and low bytes (2 bytes) GYRO_XOUT X Gyro high and low bytes (2 bytes) GYRO_YOUT Y Gyro high and low bytes (2 bytes) GYRO_ZOUT Z Gyro high and low bytes (2 bytes) AUX_XOUT X Accelerometer high and low bytes (2 bytes) AUX_YOUT Y Accelerometer high and low bytes (2 bytes) AUX_ZOUT Z Accelerometer high and low bytes (2 bytes) FIFO_FOOTER Last word for FIFO read (2 bytes) For example, if it is desired to obtain temperature, gyro, and accelerometer data from the FIFO, then one should also add FIFO_FOOTER into the FIFO enable register (18) in addition to the desired data. As shown in the figure below, the first time data is written to the FIFO, the FIFO will contain: TEMP_OUT, GYRO_XOUT, GYRO_YOUT, GYRO_ZOUT, AUX_XOUT, AUX_YOUT, AUX_ZOUT, and FIFO_FOOTER. The first FIFO read will read all but the FIFO_FOOTER data, which will be read in the 2 nd FIFO read. In the 2nd FIFO read, the FIFO_FOOTER data that was left over from the previous read is read out first, followed by all but the last FIFO_FOOTER data in the FIFO. This pattern of reading is continued, as shown in the figure. Note that the first FIFO read is similar to the subsequent reads in that one word of data is always left in the FIFO. It differs, though, in that the in subsequent reads the leftover data from the previous read is read first; however, for the first read there is no leftover data from a previous read. If the FIFO is allowed to overflow, it operates as a circular buffer in which at any time it contains the most recent 512 bytes. Recommended operation in this mode is to disable data going into the FIFO prior to reading the FIFO to avoid pointer conflicts. After halting the FIFO input, the 512 bytes in the FIFO should be read out in a single burst read. The first byte read will not be valid.

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 40 of 54 Reading from the FIFO (Note that AUX_XOUT, AUX_YOUT, and AUX_ZOUT are the X, Y, and Z accelerometer outputs, respectively.)

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10.15 Register 61 – User Control

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 3D 61 DMP_ EN FIFO_ EN AUX_IF_ EN - AUX_IF_ RST DMP_ RST FIFO_ RST GYRO_ RST 00h Description: This register is used to enable various modes on the IMU-3000, as well as reset these functions. For each of the functions that can be enabled, the function should be reset at the same time to assure it works properly. Note that the reset bits in the register are automatically cleared after the function is reset. For example, to enable the FIFO set both the FIFO_EN and the FIFO_RST bits. This will start the FIFO storage on the next sample period. As an additional example, for an external processo r to communicate directly to the external accelerometer (i.e. have the secondary I 2C bus be directly connected to the primary I 2C bus), the AUX_IF_EN bit should be cleared and the AUX_IF_RST bit should be set. This will allow the I2C bus to pass through the IMU-3000 and allow the processo r to control the accelerometer device (as well as the IMU). Pass through mode is useful for allowing the processor to configure the accelerometer, since the IMU-3000 can perform burst reads on the ac celerometer, but is not set up to configure the device. Parameters: DMP_EN Enable Digital Motion Processor (DMP) FIFO_EN Enable FIFO operation for sensor data AUX_IF_EN Enable IMU as master to accelerometer interface via secondary I2C (clear bit to configure primary I2C bus to pass through directly to the secondary I2C bus) AUX_IF_RST Reset secondary accelerometer interface function; set this whenever changing AUX_IF_EN DMP_RST Reset DMP function; set this whenever changing DMP_EN FIFO_RST Reset FIFO function; set this to clear FIFO or when changing FIFO_EN GYRO_RST Reset gyro analog and digital functions

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10.16 Register 62 – Power Management

Type: Read/Write Register (Hex) Register (Decimal) Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Default Value 3E 62 H_RESET SLEEP STBY _XG STBY _YG STBY _ZG CLK_SEL 00h Description: This register is used to manage the power contro l, select the clock source, and to issue a master reset to the device. H_RESET is used to reset the device and set the internal registers to the power-up default settings. STBY_XG, STBY_YG, and STBY_ZG are used to place the gyros into a standby or active mode (1=standby; 0=normal operating mode). Setting the SLEEP bit in the register puts the device into a low power sleep mode. In this mode, only the serial interface and internal registers remain active, allowing for a very low standby current. Clearing this bit puts the device back into normal mode. The individual standby selections for each of the gyros should be used if any of them are not used by the application. The CLK_SEL setting determines the device clock source as follows: CLK_SEL CLK_SEL Clock Source

0 Internal oscillator

1 PLL with X Gyro reference

2 PLL with Y Gyro reference

3 PLL with Z Gyro reference

4 PLL with external 32.768kHz reference 5 PLL with external 19.2MHz reference

6 Reserved

7 Stop clock and synchronous reset clock state

On power up, the IMU-3000 defaults to the internal oscillator. It is highly recommended that the device is configured to use one of the gyros (or an ex ternal clock) as the clock reference, due to the improved stability. Parameters: H_RESET Reset device and internal registers to the power-up-default settings SLEEP Enable low power sleep mode STBY_XG Put gyro X in standby mode (1=standby, 0=normal) STBY_YG Put gyro Y in standby mode (1=standby, 0=normal) STBY_ZG Put gyro Z in standby mode (1=standby, 0=normal) CLK_SEL Select device clock source

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11 Assembly

This section provides general guidelines for asse mbling InvenSense Micro Electro-Mechanical Systems (MEMS) gyros packaged in Quad Flat No leads pa ckage (QFN) surface mount integrated circuits. The following six best practices will ensure higher quality in assembly. 1. Do not leave parts out of the original moistu re-sealed bags for more than 48 hours before assembly 2. Do not solder the center pad 3. Do not place large insertion components, such as buttons, switches, connec tors, or shielding boxes at a distance of less than 6 mm from the MEMS gyro 4. Do use Electrostatic Discharge (ESD) protection at or better than 200V, preferably 150V, to prevent Machine Model (MM) type ESD damage 5. Do use ESD protection measures to ensure t hat personnel prevent Human Body Model (HBM) type ESD damage 6. Do not mechanically impact or shock the package in any of the production processes

11.1 Orientation

The diagram below shows the orientation of the axes of sensitivity and the polarity of rotation.

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11.2 PCB Layout Guidelines

11.2.1 Package Dimensions

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11.2.2 PCB Design Guidelines

InvenSense MEMS Gyros sense rate of rotation. In addition, gyroscopes sense mechanical stress coming from the PCB. This PCB stress is minimized with simple design rules: 1. Component Placement – Testing indicates that ther e are no specific design considerations other than generally accepted industry design practices for co mponent placement near the IMU-3000 gyroscope to prevent noise coupling and thermo-mechanical stress. 2. The area below the MEMS gyro (on the same side of the board) must be defined as a keep-out area. It is strongly recommended to not place any structure in top metal layer underneath the keep-out area. 3. Traces connected to pads should be as much symmetric as possible. Symmetry and balance for pad connection will help component self alignment and will le ad to better control of solder paste reduction after reflow. 4. Testing indicates that 3-Volt peak -to-peak signals run under the gyro package or directly on top of the package of frequencies from DC to 1MHz do not a ffect the operation of the MEMS gyro. However, routing traces or vias under the MEMS gyro package such that they run under the exposed die pad is prohibited. 5. To achieve best performance over temperature and to prevent thermo-mechanical package stress, do not place large insertion components like buttons, conne ctors, or shielding boxes at a distance of less than 6 mm from the MEMS gyro.

11.2.3 Exposed Die Pad Precautions

The IMU-3000 has very low active and standby current consumption. The exposed die pad is not required for heat sinking, and should not be soldered to the PCB since soldering to it contributes to performance changes due to package thermo-mechanical stress.

11.2.4 Gyro Removal from PCB

Never apply high mechanical force while removing ME MS gyros from PCB. Otherwise, the QFN package leads can be removed and failure analysis of the gyro unit will be impossible. Tweezers are practical. Do not apply a pulling force upward. Instead apply a gentle force sideward while heating. When sufficient heat has been applied, the unit will start to slide side ways and can now be pulled gently upwards with the tweezers. In any case, mechanical or thermo-mechanical overstre ss during manual handling and soldering, (especially contact between the soldering iron or hot air gun and the package) has to be avoided. If safe removal of the suspected component is not possible or deemed too risky, send the whole PCB or the part of the PCB containing the defective component back to InvenSense. If requested, we will return the PCB after we have removed the gyro.

11.3 Trace Routing

Testing indicates that 3-Volt peak-t o-peak signals run under the gyro package or directly on top of the package of frequencies from DC to 1MHz do not affect the operation of the MEMS gyro. However, routing traces or vias under the MEMS gyro package such that they run under the exposed die pad is prohibited.

11.4 Soldering Exposed Die Pad

The IMU-3000 has very low active and standby current consumption. The exposed die pad is not required for heat sinking, and should not be soldered to the PCB since soldering to it contributes to performance changes due to package thermo-mechanical stress.

11.5 Component Placement

Do not place large insertion components such as keyboard or similar buttons, connectors, or shielding boxes at a distance of less than 6 mm from the MEMS gyro. Maintain generally accepted industry design practices for component placement near the IMU-3000 to prevent noise coupling and thermo-mechanical stress.

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11.6 PCB Mounting and Cross-Axis Sensitivity

Orientation errors of the gyroscope mounted to the prin ted circuit board can cause cross-axis sensitivity in which one gyro responds to rotation about another axis , for example, the X-axis gyroscope responding to rotation about the Y or Z axes. The orientation mounting errors are illustrated in the figure below. The table below shows the cross-axis sensitivity as a percentage of the specified gyroscope’s sensitivity for a given orientation error. Cross-Axis Sensitivity vs. Orientation Error Orientation Error (θ or Φ) Cross-Axis Sensitivity (sinθ or sinΦ) 0º 0% 0.5º 0.87% 1º 1.75% The specification for cross-ax is sensitivity in Section 3 includes the e ffect of the die orientation error with respect to the package.

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11.7 MEMS Handling Instructions

MEMS (Micro Electro-Mechanical Systems) are a time -proven, robust technology used in hundreds of millions of consumer, automotive and industrial products. ME MS devices consist of microscopic moving mechanical structures. They differ from conventional IC products even though they can be found in similar packages. Therefore, MEMS devices require different handling precautions than conventional ICs prior to mounting onto printed circuit boards (PCBs). The IMU-3000 gyroscope has a shock tolerance of 10,000 g. InvenSense packages its gyroscopes as it deems proper for protection against normal handling and shipping. It recommends the following handling precautions to prevent potential damage.  Individually packaged or trays of gyroscopes should not be dropped onto hard surfaces. Components placed in trays could be subject to g-forces in excess of 10,000g if dropped.  Printed circuit boards that incorporate mounted gyroscopes should not be separated by manually snapping apart. This could also create g-forces in excess of 10,000g.

11.8 ESD Considerations

Establish and use ESD-safe handling precautions when unpacking and handling ESD-sensitive devices.  The Tape-and-Reel moisture-sealed bag is an ESD approved barrier. The best practice is to keep the units in the original moisture sealed bags until ready for assembly.  Restrict all device handling to ESD protected work areas that measure less than 200V static charge, or better, to less than 150V. Ensure that all workstations are properly grounded.  Store ESD sensitive devices in ESD sa fe containers until ready for use.  Ensure that personnel are pr operly grounded to prevent ESD.

11.9 Gyroscope Surface Mount Guidelines

Any material used in the surface mount assembly process of the MEMS gyro scope should be free of restricted RoHS elements or compounds. Pb-free solders should be used for assembly. In order to assure gyroscope performance, several indu stry standard guidelines need to be considered for surface mounting. These guidelines are for both pr inted circuit board (PCB) design and surface mount assembly and are available from packaging and assembly houses. When using MEMS gyroscope components in plasti c packages, package stress due to PCB mounting and assembly could affect the output offset and its value over a wide range of temperatures. This is caused by the mismatch between the Coefficient Temperature Ex pansion (CTE) of the package material and the PCB. Care must be taken to avoid package stress due to mounting.

11.10 Reflow Specification

The approved solder reflow curve shown in the fi gure below conforms to IPC/JEDEC J-STD-020D.01 (Moisture/Reflow Sensitivity Classification for Nonhe rmetic Solid State Surface Mount Devices) with a maximum peak temperature (Tc = 260°C). This is specified for component-supplier reliability qualification testing using lead-free solder for package thicknesses less than 1.6 mm. The reliability qualification pre- conditioning used by InvenSense incorporates three of these conforming reflow cycles. All temperatures refer to the topside of the QFN package, as measured on the package body surface. Customer solder-reflow processes should use the solder manufacturer’s recommendations, making sure to never exceed the constraints listed in the table and figure below, as these represent the maximum tolerable ratings for the device. For optimum results, production solder refl ow processes should use lower temperatures, reduced exposure times to high temperatures, and lower ramp-up and ramp-down rates than those listed below.

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 48 of 54 Approved IR/Convection Solder Reflow Curve Temperature Set Points for IR / Convection Reflow Corresponding to Figure Above Step Setting CONSTRAINTS Temp (°C) Time (sec) Rate (°C/sec) A T room 25 B T Smin 150 C T Smax 200 60 < t BC < 120 D T Liquidus 217 r(TLiquidus-TPmax) < 3 E TPmin [< TPmax-5°C, 250°C] 255 r(TLiquidus-TPmax) < 3 F TPmax [< TPmax, 260°C] 260 t AF < 480 r(TLiquidus-TPmax) < 3 G TPmin [< TPmax-5°C, 250°C 255 t EG < 30 r(TPmax-TLiquidus) < 4 H T Liquidus 217 60 < t DH < 120 I T room 25

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11.11 Storage Specifications

The storage specification of the IM U-3000 conforms to IPC/JEDEC J-STD- 020C Moisture Sensitivity Level (MSL) 3. Storage Specifications for IMU-3000 Calculated shelf-life in moisture-sealed bag 12 months -- Storage conditions: <40°C and <90% RH After opening moisture-sealed bag 168 hours -- Storage conditions: ambient ≤30°C at 60% RH

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11.12 Package Marking Specification

Package Marking Specification

11.13 Tape & Reel Specification

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 51 of 54 Reel Outline Drawing Reel Dimensions and Package Size PACKAGE SIZE REEL (mm) L V W Z 4x4 330 100 13.2 2.2 Tape and Reel Specification Reel Specifications Quantity Per Reel 5,000 Reels per Box 1 Boxes Per Carton (max) 3 Pieces per Carton (max) 15,000 Package Orientation Pin 1 User Direction of Feed Cover Tape (Anti-Static) Carrier Tape (Anti-Static) Label Reel Terminal Tape

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11.14 Label

11.15 Packaging

Tape & Reel Label Reel in Box Box with Tape & Reel Label Location of Label Moisture-Sensitive Caution Label

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12 Reliability

12.1 Qualificatio n Test Policy

InvenSense’s products complete a Qualification Te st Plan before being released to production. The Qualification Test Plan follows the JEDEC 47D Standards, “Stress-Test-D riven Qualification of Integrated Circuits,” with the individual tests described below.

12.2 Qualification Test Plan

(HTOL/LFR) JEDEC JESD22-A108C, Dynamic, 3.63V biased, Tj>125°C [read-points 168, 500, 1000 hours] 3 77 (0/1) Steady-State Temperature Humidity Bias Life (1) JEDEC JESD22-A101C, 85°C/85%RH [read-points 168, 500 hours], Information Only 1000 hours] 3 77 (0/1) High Temperature Storage Life JEDEC JESD22-A103C, Cond. A, 125°C Non-Bias Bake [read-points 168, 500, 1000 hours] 77 (0/1) Device Component Level Tests TEST Method/Condition Lot Quantity Sampl e / Lot Acc / Reject Criteria ESD-HBM JEDEC JESD22-A114F, Class 2 (1.5KV) 1 3 (0/1) ESD-MM JEDEC JESD22-A115-A, Class B (200V) 1 3 (0/1) Latch Up JEDEC JESD78B Level 2, 125C, ±100mA 1 6 (0/1) Mechanical Shock JEDEC JESD22-B104C, Mil-Std-883, method 2002, Cond. D, 10,000g’s, 0.3ms, ±X,Y,Z – 6 directions, 5 times/direction (0/1) Vibration JEDEC JESD22-B103B, Variable Frequency (random), Cond. B, 5-500Hz, X,Y,Z – 4 times/direction 3 5 (0/1) Temperature Cycling (1) JEDEC JESD22-A104D Condition N, -40°C to +85°C, Soak Mode 2, 100 cycles 3 77 (0/1) Board Level Tests TEST Method/Condition/ Lot Quantity Sampl e / Lot Acc / Reject Criteria Board Mechanical Shock JEDEC JESD22-B104C,Mil-Std-883, method 2002, Cond. D, 10,000g’s, 0.3ms, +-X,Y,Z – 6 directions, 5 times/direction (0/1) Board T/C JEDEC JESD22-A104D Condition N, -40°C to +85°C, Soak Mode 2, 100 cycles 1 40 (0/1) (1) – Tests are preceded by MSL3 Preconditioning in accordance with JEDEC JESD22-A113F

IMU-3000 Product Specification Document Number: PS-IMU-3000A-00-01 Revision: 1.0 Release Date: 05/26/2010 CONFIDENTIAL & PROPRIETARY 54 of 54 This information furnished by InvenSense is believed to be accu rate and reliable. However, no responsibility is assumed by Inve nSense for its use, or for any infringements of patents or other rights of third parties that may result from its use. Specifications are subject to change without notice. InvenSense reserves t he right to make changes to this product, including its circuits and software, in o rder to improve its design and/or performance, without prior notice. Inv enSense makes no warranties, neither expressed nor implied, reg arding the information and specifications contai ned in this document. InvenSense assumes no responsibility for any claims or damages a rising from information contained in this document, or from the use of products and services detailed t herein. This includes, but is n ot limited to, claims or damages based on the infringement of patents, copyrights, mask work and/or other intellectual property rights. Certain intellectual property owned by InvenSense and described in this document is patent protected. No license is granted by implication or otherwise under any patent or patent rights of InvenSense. This publication s upersedes and replaces all informat ion previously supplied. Trademarks that are r egistered trademarks are the property of thei r respective compani es. InvenSense senso rs should not be used or sold in the development, storage, production or utilization of any conventional or mass-destructive weapons or for any other weapons or life threatening applications, as well as in any other life critical applicat ions such as medical equipmen t, transportation, aerospace and nuclear instruments, undersea e quipment, power plant equipment, disaster prevention and crime prevention equipment. InvenSense TM , IMU TM , IMU-3000 TM , Motion Processing Unit TM , Digital Motion Processing TM , and DMP TM are trademarks of InvenSense, Inc. ©2010 InvenSense, Inc. All rights reserved.