F3M-S1213 OMRON | Alldatasheet

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Technical content

R Silicon Wafer Mapping Sensor F3M-S Allows Simultaneous Mapping of up to 25 Silicon Wafers H Economical, one sensor detects most wafer types, including dummy wafers H Models match wafer sizes of 300 mm, 200 mm and 150 mm H Automatic and remote teaching capability H Self-diagnostic functions reduce downtime

Ordering Information

Applicable wafer size Number of cassette slots Function Remarks Part number 6 inches (4.76-mm pitch) 25 Self-diagnosis --- F3M-S6256 inches (4.76 mm pitch) 8 inches (6.35-mm pitch) 25 Self-diagnosis --- F3M-S8258 inches (6.35 mm pitch) 12 inches (10-mm pitch) 13 Self-diagnosis CE marking F3M-S121312 inches (10 mm pitch)

25 Self-diagnosis CE marking F3M-S1225

Detects Transparent Glass Wafers with a Transparency of 92% (F3M-S6j and F3M-S8j) The F3M-S allows the mapping of cassettes that have both silicon wafers and glass wafers. The F3M-S also accurately detects dummy wafers in the carrier used to test coating or processing tolerances. Automatic Teaching Saves Setting Time Remote Teaching Available The F3M-S has an automatic teaching function that ensures easy adjustments within a minimal time. The remote teaching function allows quick, on-the-fly set up. Answer-back Alarms for Setting Errors and Self-diagnostic Alarms for Operation Errors These alarms help reduce system downtime and shorten troubleshooting time. Note: The self-diagnostic output function is not incorporated by the F3M-S826/-S626. Static Electricity Protection OMRON’s optical system, including an emitter and receiver, prevents Sensor malfunction and damage by protecting the Sensor from static electricity that may be charged on semiconductor wafers at the time of mapping.

Part number F3M-S625 F3M-S626 F3M-S825 F3M-S826 F3M-S1213 F3M-S1225 Sensing object 6-inch (5-inch) semiconductor silicon wafers and transparent wafers (with transparency of 92% max.) (See Note.) 8-inch semiconductor silicon wafers and transparent wafers (with transparency of 92% max.) (See Note.) 12-inch semiconductor silicon wafers and 12-inch SIC wafers (with transparency of 30% max.) Number of channels 25 26 25 26 13 25 Optical axis pitch 4.76 mm 6.35 mm 10 mm Optical axis width 1.5 mm Light source Infrared LED (940 nm) Power supply voltage 12 to 24 VDC±10%, ripple (p-p): 10% max. Current consumption 120 mA max. Output Control output Load power supply voltage: 30 VDC Load current: 20 mA max. (residual voltage: 1 V max.) Inflow current: 20 mA Parallel output from all channels, NPN open collector Dark-ON operation Answer-back output When remote teaching is ON, pin 28 will be used for this function. Self- diagnostic output Load power supply voltage: 30 VDC max. Load current: 20 mA max. (Residual voltage: 1 V max.) Inflow current: 20 mA NPN open collector --- Load power supply voltage: 30 VDC max. Load current: 20 mA max. (Residual voltage: 1 V max.) Inflow current: 20 mA NPN open collector --- Load power supply voltage: 30 VDC max. Load current: 20 mA max. (Residual voltage: 1 V max.) Inflow current: 20 mA NPN open collector Indicators Power Green indicator is ON when power is being supplied. Warning Red indicator is ON under the following conditions: Teaching, no sensing object, insufficient light, or error. Response time 10 ms max. Control output interrupt input All outputs interrupted: GND and control output interrupt input terminals are short-circuited and 0-V short-circuit current is 1 mA max. Output interrupt reset: GND and control output interrupt input terminals are opened or the voltage is between 9 V and the working power supply voltage. Remote ON GND and remote input terminals are short-circuited and 0-V short-circuit current is 1 mA max.Remote teaching input OFF GND and remote input terminals are opened or the voltage is between 9 V and the working power supply voltage. Teaching check function Orange LED indicator Ambient temperature Operating 0°Ct o4 0°C( 3 2°F to 104°F) with no icing or condensation 0°Ct o5 5°C( 3 2°F to 131°F) with no icing or condensationp Storage -- 2 5°Ct o6 0°C( - - 1 3°F to 140°F) -- 2 5°Ct o6 0°C( - - 1 3°F to 140°F) Relative humidity 35% to 85% with no condensation Ambient illumination Fluorescent lamp: 1,500ℓxm a x . Noise resistance Power supply line:±480 V in normal mode with noise simulatorNoise resistance Static electrical noise: No malfunction or destruction at±8k V Vibration resistance 10 to 55 Hz, 0.5-mm double amplitude for 2 hrs each in X, Y, and Z axes Shock resistance 300 m/s2 (30G) for 3 times each in X, Y, and Z axes Degree of protection IEC60529 IP40 Connection Preleaded cable (standard cable length: 100 mm) Connector (This table continues on the next page.)

Specifications Table - - continued from previous page Part number F3M-S625 F3M-S626 F3M-S825 F3M-S826 F3M-S1213 F3M-S1225 Weight (packed state) Approx. 110 g Approx. 200 g Approx. 300 g Material Optical axis PolycarbonateMaterial Case ABS ABS, aluminum (alumite treated/clear finish) Cable Vinyl-insulated, bending type --- Accessories Spacer and instruction manual Instruction manual Note: Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details. J AUTOMATIC TEACHING FUNCTION F3M-S6j and F3M-S8j Power indicator Warning indicator T eaching button RUN/TEACH mode selector T eaching indicator F3M-S12j Power indicator Warning indicatorT eaching button RUN/TEACH mode selector T eaching indicator The remote or manual automatic teaching of the F3M-S is possible with the following two sensitivity settings: 1. Max. Sensitivity Setting: Detects semiconductor silicon wafers, translucent dummy wafers, and SIC wafers. 2. Teaching with No Target Object: Detects transparent wafers (except F3M-S12j). The sensitivity is set to maximum before shipping. Refer to the Instruction Manual when setting the sensitivity of the F3M-S. J ANSWER-BACK FUNCTION AND SELF-DIAGNOSTIC FUNCTION The F3M-S has an answer-back function to warn the user about setting errors and a self-diagnostic function (except F3M-S626 and F3M-S826) to warn the user about operational errors.

  • Answer-back Function: Normal or error teaching output turns ON.
  • Self-diagnostic Function: Warning output turns ON for a decrease in optical input.

(OUT1) Output (see note) (OUT26) Main circuit Control output interrupt input Remote teaching input Note: When remote teaching is input, this outputwill be for answer-back output. For Sensors other than F3M-S626/F3M-S826, this output is for self-diagnostic output. For F3M-S626/F3M-S826, this output is OUT26. J I/O TERMINAL ARRANGEMENT Pin assignment Pin Assignment Pin Assignment

1 GND (0 V) 16 OUT14

2 VCC ( 1 2t o2 4V )17 OUT15

3 OUT1 18 OUT16

4 OUT2 19 OUT17

5 OUT3 20 OUT18

6 OUT4 21 OUT19

7 OUT5 22 OUT20

8 OUT6 23 OUT21

9 OUT7 24 OUT22

10 OUT8 25 OUT23

11 OUT9 26 OUT24

12 OUT10 27 OUT25

13 OUT11 28 Self-diagnostic output/OUT26

(see note 1)

14 OUT12 29 Control output interrupt input

15 OUT13 30 Remote teaching input

Note: 1. Pin 28 will have answer-back output only when remote teaching input is turned ON. Otherwise, for Sensors other than F3M-S626/F3M-S826, this output is for self- diagnostic output. For F3M-S626/F3M-S826, this out- put is OUT26. 2. For the F3M-S1213, terminals for pins 16 to 27 are not used.

Unit: mm (inch) Tw o , R 4 Tw o , M4 Thirty, (19/0.08 dia.) vinyl-insulated, flat bending cable Width: 38.1 Pitch: 1.27 Optical axis Side mark Tw o , 4.2-dia. mounting holes T eaching button RUN/TEACH mode selector Warning indicator T eaching indicator Power indicator Mounting Dimensions Tw o , M4 OMRON XG4E-3031 Connector Tw o , 4.2-dia. mounting holes Thirty, (19/0.08 dia.) vinyl-insulated, flat bending cable Width: 38.1 Pitch: 1.27 OMRON XG4E-3031 Connector Optical axis Side mark T eaching button RUN/TEACH mode selector Warning indicator T eaching indicator Power indicator Mounting Dimensions (1.97) 18.5 (0.71) 135 (5.31) 14 (0.55) (3.94) (4.72) (1.97) 18.5 (0.71) 135 (5.31) 14 (0.55) (3.94) (4.72) J F3M-S625 J F3M-S626 J F3M-S825 J F3M-S826 Optical axis Side mark Thirty, (19/0.08 dia.) vinyl-insulated, flat bending cable Width: 38.1 Pitch: 1.27 Tw o , 4.2-dia. mounting holes OMRON XG4E-3031 Connector T eaching button RUN/TEACH mode selector Warning indicator T eaching indicator Power indicator Mounting Dimensions Two , R5 Tw o , M4 Optical axis Side mark Thirty, (19/0.08 dia.) vinyl-insulated, flat bending cable Width: 38.1 Pitch: 1.27 Tw o , 4.2-dia. mounting holes T eaching button RUN/TEACH mode selector Warning indicator T eaching indicator Power indicator Mounting Dimensions Two , R5 Tw o , M4 OMRON XG4E-3031 Connector (1.97) 18.5 (0.71) 170 (6.69) 14 (0.55) (3.94) (6.30) (1.97) 18.5 (0.71) 175 (6.89) 14 (0.55) (3.94) (6.30)

T wo, M4, depth: 8 (mounting holes) OMRON XG4A-3034 Connector T eaching button RUN/TEACH mode selector Warning indicator T eaching indicator Power indicator Optical axis Optical axis T wo, M4, depth: 8 (mounting holes) OMRON XG4A-3034 Connector T eaching button RUN/TEACH mode selector Warning indicator T eaching indicator Power indicator Optical axis Optical axis Optical axis50 (1.97) 140 (5.51) 25 (0.98) 18 (0.71) (1.97) 260 (10.24) 25 (0.98) 18 (0.71) Precautions J CORRECT USE Avoid Damage to the F3M-S

  • Do not use the F3M-S at a voltage that exceeds the rated voltage range.
  • Do not make mistakes in wiring, such as mistakes in polarity.
  • Do not short-circuit the load.
  • Do not connect AC to the F3M-S. J INSTALLATION/ENVIRONMENT Do NOT use the F3M-S in the following places:
  • Places exposed to direct sunlight.
  • Places with high humidity that may cause condensation.
  • Places with corrosive gas.
  • Places with vibration or shock directly affecting the Sensor. J CONNECTION AND MOUNTING
  • A maximum of 24 VDC+10% can be imposed on the F3M-S. Check that the voltage of the power supply is within the per- missible range before turning on the F3M-S. The power sup- ply must be constructed so that the secondary circuit is insu- lated with an isolating transformer.
  • Do not wire power lines or high-tension lines within the same conduit with the lines of the F3M-S, or the F3M-S may be damaged or malfunction due to induction. You must wire the lines of the F3M-S separate from power lines or high-tension lines or laid in an separate, shielded conduit.
  • Avoid mechanical impact when mounting the F3M-S, or the water-resistant properties of the F3M-Swill be reduced. J CLEANING Do not attempt to clean the F3M-S using paint thinner, to avoid damaging the surface of the F3M-S. J POWER SUPPLY If a standard switching power supply is connected to the F3M-S, be sure to ground the FG (frame ground) and G (ground) terminals of the power supply. The F3M-S may malfunction due to switching noise that will begenerated from the power supply if these terminals are not grounded.

Schaumburg, IL 60173 NOTE: DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters to inches divide by 25.4. 1-800-55-OMRON OMRON CANADA, INC.

885 Milner Avenue

Scarborough, Ontario M1B 5V8 416-286-6465 R OMRON ON- -LINE Global - -http://www.omron.com USA - -http://www.omron.com/oei Canada - -http://www.omron.com/oci