EG353 ADVANCEDENERGY | Alldatasheet
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©2018 Advanced Energy Industries, Inc. Dependable, high-stability power supplies for scanning electron microscopes (SEM) with built-in flexibility to accommodate various Schottky emission electron gun configurations. The HiTek Power® EG353 series comes standard with Advanced Energy’s Direct Drive Digital Control (D3C), enabling wide range of operational and diagnostic capabilities through an intuitive GUI. D 3C improves MTBF and reliability while using a smaller footprint. Max Output Voltage Accelerator -30 kV, 200 µA (-35 kV for conditioning) Extractor +10 kV, 400 µA Suppressor -1 kV, 100 µA Heater +5 V, 3 A Max Output Power Accelerator: 6 W Extractor: 4 W Suppressor: 0.1 W Heater: 15 W Control Digital Type Low-ripple electron beam power Temp Coefficient Accelerator: < 25 ppm/°C Extractor: < 25 ppm/°C Suppressor: < 20 ppm/°C Heater: < 100 ppm/°C AT A GLANCE HITEK POWER EG353 SERIES HIGH-STABILITY 35 kV HIGH VOLTAGE POWER SUPPLIES PRODUCT HIGHLIGHTS Lowest ripple and high-stability power supplies for resolutions to -1 nm Small footprint module or 19 in rack-mounted option provides greatest installation flexibility Market leading reliability and performance enabled by AE's Direct Drive Digital Control (D3C) technology Better efficiency, more consistent operation, low variance to component change, greater reliability, and easier testing Low ripple (< 1.6 ppm, accelerator), and high stability (< 10 ppm, accelerator) Additional grounded outputs may be added for greater flexibility Easy-to-use digital control and monitoring minimizes setup and configuration times (fiber-isolated RS-232) Customer defined derivatives and connection options available upon request TYPICAL APPLICATIONS SEM and electron microscopy using Schottky emission electron guns with LaB6 or CeB6 cathodes Systems with resolutions normally from > 1 to < 20 nm
2 advanced-energy.com HITEK POWER EG353 SERIES ELECTRICAL SPECIFICATIONS Voltage 23 to 25 VDC, 24 VDC nominal Current 2.3 ADC max at 23 VDC input Protection 5 A time delay internal PCB-mounted fuse Electrical Output Accelerator Suppressor Extractor Filament Line Regulation < 0.3 V for a 1 VDC input voltage change < 0.1 V for a 1 VDC input voltage change < 0.5 V for a 1 VDC input voltage change 1 mA max for a 10% change in input voltage Load Regulation < 0.3 V for a 100 μA load change < 0.1 V for a 10 μA load change < 0.5 V for a 400 μA load change 2 mA max from 0.4 to 1 Ω load change at 3 A Output -30 kV, 200 μA, -35 kV for conditioning only (ground referenced) -1 kV, 100 μA (accelerator referenced) +10 kV, 400 μA (accelerator referenced)
3 A at 5 V max
(accelerator referenced) Accuracy ±20 V ±5 V ±15 V N/A Voltage Ripple LF: 50 mV peak to peak max under specified conditions LF: 30 mV peak to peak max under specified conditions LF: 20 mV peak to peak max under all conditions LF: 1 mA peak to peak max under all conditions* HF: 25 mV peak to peak max under specified conditions HF: 20 mV peak to peak max under specified conditions HF: 15 mV peak to peak max under all conditions HF: 5 mV peak to peak max under all conditions* Voltage Monitor 0 to -35 kV, accuracy ±0.5% 0 to -1 kV, accuracy ±0.5% 0 to +10 kV, accuracy ±0.5% 0 to +6 V, 16 bit resolution, accuracy ±1% Current Monitor 0 to 250 μA 16-bit resolution ±0.5% accuracy 0 to 150 μA 16-bit resolution ±0.5% accuracy 0 to 500 μA 16-bit resolution ±0.5% accuracy 0 to 3 A 16-bit resolution ±2 mA accuracy for 2 to 3A ±20 mA accuracy for all other values Stability < 0.3 V over a 15 min period (after warmup period) < 0.2 V over a 15 min period (after warmup period) < 0.3 V over a 15 min period (after warmup period) 0.5 mA over a 1 hour period (after warmup period) Thermal Drift 25 ppm max/°C over operating temperature 25 ppm max/°C over operating temperature 25 ppm max/°C over operating temperature 100 ppm max/°C over operating temperature Environmental Operational Temperature 10 to 45°C (50 to 113°F) Storage/Transport Temperature -20 to +70°C (-4 to 158°F) Altitude Sea level to 2000 m (6562 ft) Humidity 80% max relative humidity up to 31°C, reducing linearly to 50% at 40°C (140°F), non-condensing (ref. EN61010-1) Cooling Free convection Regulatory Certifications RoHS compliant to EU Directive 2011/65/EU CE marked for EU LV Directive 2006/95/EC
advanced-energy.com 3 HITEK POWER EG353 SERIES MECHANICAL SPECIFICATIONS Physical Module 19 in Rack Dimensions (W x H x D) See mechanical drawings Weight (Approx.) 10.2 kg (22.5 lb) 12 kg (26.5 lb) Construction Steel and aluminum with protective treatment MODULE FORMAT RACK MOUNT FORMAT
4 advanced-energy.com HITEK POWER EG353 SERIES INTERFACE Input Connector 2-way PTR/Phoenix STLZ950/2-G-5.08-green (pin 1 positive, pin 2 negative) HV Output Connectors Heater: 2 wires of customer 4-way HV connector Suppressor: 1 wire of customer 4-way HV connector Extractor: 1 wire of customer 4-way HV connector Interlock Connector HP versatile optical link: HP T-1521/HP R-2521 (rear-panel mounted) Control Interface Connector HP versatile optical link: HP T-1521/HP R-2521 Control Interface RS-232; supplied by fully-isolated fiber optics (9-way female D-type connector) STANDARD OPTIONS Supply Connectors Standard EG353 4-point connector Claymount CA12 connector Installation Type Compact module 19 in rack mount
advanced-energy.com 5 HITEK POWER EG353 SERIES ACCESSORIES A number of standard and custom accessories are available to simplify the installation, configuration and operation of the EG353 series. The list below identifies a number of the common accessories available. Contact Advanced Energy to request more information on any specific requirements. High-voltage cables with customized lengths, EG353 connectors, and SEM column connectors Fiber optic serial to USB adapter, supplied with 1 m long fiber optic cable with interlock switch Graphical User Interface (GUI) for installation, configuration and diagnostics Part Number Description A1053803-1M0 Cable EG353 HV Output 1 m (3.2 ft) A1053803-3M0 Cable EG353 HV Output 3 m (9.8 ft) A1053803-5M0 Cable EG353 HV Output 5 m (16.4 ft) 33400218-00 Cable Serial to Optical Interface with 1 M (3.2 Ft) "X" DIMENSION EG353 HV CABLE ASSEMBLY 102mm (EG353 POKE-HOME END) UN-TERMINATED END 30kV 130660 HV CABLE
ORDERING INFORMATION
For ordering information, please contact your local Advanced Energy sales representative.
Since 1981, Advanced Energy (AE) has perfected how power performs for its customers. For both end users and OEMs, AE’s comprehensive portfolio of standard and custom high voltage components precisely match system specifications to deliver unparalleled energy, quality, and performance. Through close customer collaboration, design expertise, application insight, and world-class support, AE creates successful partnerships and enables customers to push the boundaries of innovation and stay ahead of evolving market needs. Read and understand all documentation before you install, operate, or maintain Advanced Energy high voltage power supplies. Follow all safety instructions and precautions to protect against property damage and serious or possibly fatal bodily injury. Never defeat safety interlocks or grounds. CAUTION: High Voltage Specifications are subject to change without notice. Not responsible for errors or omissions. ©2018 Advanced Energy Industries, Inc. All rights reserved. Advanced Energy®, AE®, and HiTek Power® are U.S. trademarks of Advanced Energy Industries, Inc. For international contact information, visit advanced-energy .com. HVSales@aei.com +1.970.221.0108 ENG-HV-EG353-235-05 4.18