E32-V OMRON | Alldatasheet
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Technical content
Fiber-Optic System for Sensing Under VacuumE32-V Omron’s First Complete System for Sensing Under Vacuum Vacuum rated to 1 x 10–10 Pa m3/s max. (7.5 x 10 -10 torr l/s) The industry’s First 4-Channel Snap-On Fiber Mounting Feature allows ease of use and implementation A Single-Channel Flange with screw-mounting is also available Increases process productivity by performing operations inside vacuum chambers The external fiber can be cut on both ends, allowing customized lengths Stainless steel and fluoro-resin fiber cables are available for vacuum processes CE approval
Ordering Information
CONFIGURATION EXAMPLE (TYPICAL) To Order a Complete Fiber-Optic System for Sensing Under Vacuum E39-F1V Lens Unit Vacuum chamber Inside vacuum chamber Outside A combination of E32-T51V, E32-T54V, and E32-T84SV Vacuum Fibers E32-VF4 Four-Channel Flange or E32-VF1 One-Channel Flange A pair of E32-T10V Fibers for outside E3X-NM or E3X-NH11 Amplifier Unit Select: A Flange Vacuum Fibers External Fiber Cable A Lens Unit (if necessary) The Appropriate Fiber-Optic Amplifier FLANGES Item Part number Four channel E32-VF4 One-channel E32-VF1 VACUUM FIBERS Item Through-beam, straight model Through-beam, 90° model Through-beam, heat-resistant model Part number E32-T51V 1M E32-T54V 1M E32-T84SV 1M E32-T51V 0.5M E32-T54V 0.5M ––
External Fiber Cable E32-T10V 2M LENS UNIT Item Part number Long distance lens E39-F1V AMPLIFIER UNIT W/HIGH-PRECISION SENSING AND TEACH FUNCTION (SOLD SEPARATELY) Item NPN output PNP output Part number E3X-NH11 E3X-NH41 Appearance Light source Red LED (λ = 680 nm) Power supply voltage 12 to 24 VDC ±10%, ripple (p-p) 10% max. Current consumption 75 mA max. Response time 1 ms max. (see note) Output Control output NPN open collector, load current:
50 A id l lt 1 VAlarm output
50 mA max., residual voltage: 1 V max. Sensitivity setting Teaching method Fine sensitivity adjustment Automatic or manual fine threshold adjustment (13 levels) Note: The E3X-NH adopts a new digital sensing algorithm and has the same capacity for detecting minute objects as the conventional E3X-NT 1 (response time of 0.5 ms). FOUR-CHANNEL AMPLIFIER UNIT WITH TEACH FUNCTION (SOLD SEPARATELY) Item Four-channel Part number E3X-NM11 (NPN output) E3X-NM41 (PNP output) Appearance 32.2 Light source Red LED (λ = 680 nm) Power supply voltage 12 to 24 VDC ±10%, ripple (p-p) 10% max. Current consumption 150 mA max. Response time 500 µs max. at rated sensing distance Control output PNP or NPN open collector, load current: 100 mA, residual voltage: 1 V max. Timer function (see note) OFF-delay timer (fixed to 40 ms) (independent channel) Teaching confirmation function Indicator (red/green LEDs) and buzzer Remote teaching input Pink and blue (0 V) wires are short-circuited when remote input is ON. (0 V short-circuit current: 1 mA max.) Pink and blue (0 V) wires are not short-circuited when remote input is OFF. (Open or 9 V min.; max. input voltage: 24 V) Response time is 0.5 ms max. when remote input is OFF. Mode Light-ON and Dark-ON switch-selectable Note: It is possible to disable the OFF-delay timer function by using the switch setting.
DIGITAL FIBER AMPLIFIER UNIT (SOLD SEPARATELY) Item NPN output PNP output NPN output PNP output Part number E3X-DA11 E3X-DA41 E3X-DA21 E3X-DA51 Appearance Light source (wavelength) Red LED (660 nm) Supply voltage 12 to 24 VDC ± 10%, ripple (p-p) 10% max. Current consumption 75 mA max. Response time High-speed mode: 250 s for operation and reset Standard mode: 1 ms for operation and reset Long-distance mode: 4 ms for operation and reset Control output ON/OFF output NPN open collector Load current: 50 mA max. Residual voltage: 1 V max. PNP open collector Load current: 50 mA max. Residual voltage: 2 V max. NPN open collector Load current: 50 mA max. Residual voltage: 1 V max. PNP open collector Load current: 50 mA max. Residual voltage: 2 V max. Monitor output -– Load 1 to 5 VDC, 10 kΩ min. Load resistance 10 kΩ min. Sensitivity setting Teaching or manual method Timer function OFF-delay timer, range: 0 to 200 ms (5 ms increment)
Number of channels Four-channel One-channel Vacuum ratings 1 x 10–10 Pa m3/s max. (7.5 x 10 -10 torr l/s) Ambient operating temperature –25°C to 55°C (–13°F to 131°F) with no icing Material Aluminum (A5056) Stainless steel (SS 304) Flange seal material Fluoro rubber Weight Approx. 250 g Approx. 220 g Fiber Unit for Outside Item E32-T10V Standard length 2 m (cut freely) Ambient operating temperature –25°C to 70°C (–13°F to 158°F) with no icing Permissible bending radius 25 mm max. Material Core Acrylic resin Sheath Fluoro-resin Protection tube Black polyethylene Vacuum Fibers Item E32-T51V E32-T54V E32-T84SV Sensing method Through-beam Standard length 1 m (not cut freely) Sensing distance E3X-NM11/NM41 60 mm 40 mm 150 mmg E3X-NH11 100 mm 100 mm 400 mm Ambient operating temperature –25°C to 120°C (–13°F to 248°F) with no icing –25°C to 200°C Permissible bending radius 30 mm max. 25 mm max. Material Core Quartz Optical glass Sheath Fluoro-resin Optical glass Protection tube Fluoro-resin Stainless steel (SS 304) Fiber head/ Connection tube Aluminum (A5056), Stainless steel (SS 304) Lens Unit Item E39-F1V Applicable fiber E32-T51V E32-T54V Sensing distance E3X-NM11/NM41 360 mm 240 mmg E3X-NH11 700 mm 600 mm Ambient operating temperature –25°C to 120°C (–13°F to 248°F) with no icing Material Housing Aluminum (A5056) Lens Optical glass
Unit: mm (inch) FLANGES (0.87) (0.94) (0.87) Two, M14 44 (1.73) dia. (0.75) (0.90) (0.31) 49 (1.93) 36 (1.42) dia. E32-VF4 Flange (vacuum side) O ring Flange (outside) Mounting hole: 38 ±0.5 (1.50 ±0.02) dia. E32-VF1 Nut Washer O ring Connector Four, 10 dia. 45° 90 (3.54) dia. 80 (3.15) 80 (3.15) 96 (3.78) 63 (2.48) 30 (1.18) 33.53 (1.32) 70 (2.76) dia. 20 (0.79) dia. (0.39) (0.23)
14.2 (0.56) 12 (0.47) (0.47) 4 (0.16) dia. 2.9-(0.11) dia. flexible tube (stainless steel) 2-dia. lens 3 (0.12)-dia. sensing head (stainless steel) 2.2-(0.09) dia. sleeve 3.5 dia. 3 dia. 4 dia. 90°30 (1.18) (0.24) standard length:1,000 (39.37) 15 (0.59) (0.59) (0.31) (0.12) E32-T51V Nut Washer 3-(0.12) dia. optical fiber E32-T54V E39-L54V Mounting Bracket (Sold Separately) Connects to Flange (vacuum side). Connects to Flange (vacuum side). Material: SS 304 E32-T84SV 1.15 (0.05) dia. 4 (0.16) dia. (0.16) dia. 3 (0.12) dia. 5 dia. 3 (0.12) dia. 2.2 (0.09) dia. 2.2 (0.09) dia. M4x0.7 M2.6x0.45 26 (1.02) M2.6x0.45 4 (0.16) (0.47) 4R918 (0.71) 4.5 4.5 (0.18) 4 (0.16) 0.5 (0.02) (0.90) 4.1 (0.16) 4.1 (0.16) (0.31) 1.15 (0.05) dia. (0.16) dia. (0.16) dia. -(0.12) 20 (0.79) 30 (1.18) 1,000 or 500 (39.37 or 19.69) 1,000 or 500 (39.37 or 19.69) 26 (1.02) 26 (1.02) MOUNTING BRACKET
Unit: mm (inch) EXTERNAL FIBER CABLE E32-T10V 2.2 (0.09)-dia. optical fiber * Freely cut and connected to the outside Flange or Amplifier Unit. 2000 (78.74) LENS UNIT (0.24) E32-F1V 0.5-dia. (0.02) hole M2.6 x 0.45 Effective depth: 3.8 (0.15) Spot facing depth: 0.9 (0.04) (0.16) dia. 8.9 (0.35) AMPLIFIER (SOLD SEPARATELY) E3X-NH11 Operation indicator Threshold indicators (Side A – see note) Note: The mounting bracket can be at- tached to side A. Two, 3.2- (0.13) dia. holes Mounting bracket Cable: Polyvinyl chloride covered cable 4-mm dia. (18/0.12 dia), 4 cores Standard length: 2 m Weight: Approx. 100 g Incident level indicators Two, 2.4 dia. Two, mounting holes (0.39) 4.1 (0.16) 32.5 (1.28) 10.7 (0.42) 13 (0.51) (1.30)8 (0.31) 34.8 (1.37) 44 (1.73) 16 (0.63) 3.4 (0.13) 58 (2.28) 2.4 (0.09) 4 (0.16) (0.24) 22.4 (0.88) 9.8 (0.39) 7 (0.28)
AMPLIFIER UNIT (SOLD SEPARATELY) 6.2 (0.24) 16 (0.63) (0.28) (0.28) E3X-NM11 E3X-NM41 32.2 (1.27) Eight, 2.4 dia. 8 (0.31) 8.3 (0.33) 59 (2.32) Mounting bracket 3.8 (0.15) Two, 3.2-dia. holes Cable: Polyvinyl chloride-covered cable 4-mm dia. (40/0.08 dia), 7 cores Standard length: 2 m Weight: Approx. 200 g Two, mounting holes Operation indicator Stability indicator Note: The mounting bracket can be attached to this side. 10.8 (0.43) 21.4 (0.84) (1.30) 32.5 (1.28) 7 (0.28) 10.7 (0.42) 4.1 (0.16) 3.5 (0.14) 6.1 (0.24) 22.4 (0.88) 22.4 (0.88) 16 (0.63) (0.21) 7 (0.28)
E3X-DA 1 Operation indicator (orange) Incident level display Threshold level displayThe mounting bracket can be attached to this side. Two, 3.2-mm-dia. holes Mounting bracket SUS304 stainless steel Two, mounting holes Mounting Holes 4 mm-dia. vinyl-insulated round cable with 3/4 conduc- tors (40/0.12 mm-dia) Standard length: 2 m Two, M3Two, 2.4 mm-dia. 4.1 10.7 (0.39) 3.3 (0.13) (2.40)6 22.4 10.75 2.4 34.8 3.4 32.5 (1.28) 22.4 16 4.4
Engineering Data (with E3X-NM11/NM41 Amplifier Unit) EXCESS GAIN RATIO VS. DISTANCE CHARACTERISTICS (TYPICAL) E32-T51V E32-T54VExcess gain ratio Sensing distance (cm) Excess gain ratio Sensing distance (cm) Sensing distance Sensing distance E32-T84SV Excess gain ratio Sensing distance (cm) Sensing distance E32-T54V with E39-F1V E32-T54VE32-T51V E32-T51V with E39-F1V PARALLEL OPERATING RANGE (TYPICAL) E32-T51V E32-T54V E32-T54V E32-T84SV Parallel operating range Y (mm)Parallel operating range Y (mm) Parallel operating range Y (mm) E32-T54V with E39-F1V E32-T51V with E39-F1V E32-T51V Sensing distance X (cm) Sensing distance X (cm) Sensing distance X (cm)
Engineering Data (with E3X-NH11 Amplifier Unit) EXCESS GAIN RATIO VS. DISTANCE CHARACTERISTICS (TYPICAL) Sensing Distance (mm) Excess gain ratio 50 100 150 200 250 300 E32-T51V 100 200 300 400 Excess gain ratio E32-T54V Sensing Distance (mm) 1000 1500 2000 Excess gain ratio 0 500 E32-T51V + E39-F1V 200 400 600 800 1000 1200 1400 1600 1800 2000 Excess gain ratio E32-T54V – E39-F1V Sensing Distance (mm) Sensing Distance (mm) 100 200 300 400 5000 Sensing Distance (mm) Excess gain ratio 600 700
PARALLEL OPERATING RANGE (TYPICAL) E32-T51V E32-T51V + E39-F1V 100 150 –50 –100 –150 0 500 1000 1500 2000 Sensing Distance (mm) Parallel operating range (mm) Fiber Fiber with lens E32-T54V E32-T54V + E39-F1V Fiber Fiber with lens Sensing Distance (mm) Parallel operating range (mm) 100 –80 –100 –60 –40 –20 0 500 1000 1500 E32-T84SV –20 –15 –10 Parallel operating range (mm) Sensing Distance (mm) 1000 1500500 2000
APPLICATIONS
The E32-V Vacuum Fiber Unit is used to detect a variety of objects located in high-vacuum chambers heated up to 120°C (some chambers operate at a maximum temperature of 200°C). CLEANING Although Flanges, Vacuum Fibers, and Lens Units are cleaned before shipping, clean them with alcohol before use in high-vacuum chambers to make sure there is no foreign matter on them. ORGANIC SOLVENTS Keep organic solvents away from the E32-V Vacuum Sensor. EXCESSIVE FORCE The E32-V Vacuum Fiber Unit can resist a maximum force of 29.4 N (3 kgf). Do not impose extreme force, such as pulling force or pressure, on the E32-V Fibers. FOR CONDITIONS OR ENVIRONMENTS NOT SPECIFIED FOR THIS PRODUCT Consult your OMRON representative before attempting an application for: conditions or environments not specified in instruction manuals, and applications insuring safety, including nuclear reactor control, train facilities, aviation facilities, motorized vehicles, furnaces, medical equipment, amusement equipment, and safety equipment. Note: You must allow a sufficient margin between ratings and re- quired performance in addition to providing appropriate fail-safe measures and other safety measures when using the E32-V in applications such as mentioned above. OMRON ELECTRONICS, INC. One East Commerce Drive Schaumburg, IL 60173 NOTE: DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters to inches divide by 25.4. 1-800-55-OMRON OMRON CANADA, INC.
885 Milner Avenue
Scarborough, Ontario M1B 5V8 416-286-6465