DISTAX-300A

DISTAX-300A ACCRETECH | Alldatasheet

Document overview

• Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
• PDF pages: 12

Technical content

Max. 2-axis automatic measurement Optical fiber coupled

Automation of Machine Tool Accuracy Inspection Full Automation of Machine Tool Accuracy Inspection! The 3-axis measuring head and machine tool dedicated software (DISTAX MANAGER) provide full-automatic measurement in measurement correction inspection. The optical fibers provide easy attachment. The compact body allows you to easily carry. Straight axis measurement Measurement at a speed approx. 7 times faster than the conventional model 'MFYJCMFBUUBDINFOUPG PQUJDBMGJCFSDBCMFT &YBNQMF$PNQPTJUFGJOJTIJOHNBDIJOF &YBNQMF)PSJ[POUBMUZQFNBDIJOJOHDFOUFS This product can be easily attached even to a horizontal-type machining center and a machine with a slant angle, which have been difficult to measure with a laser gage interferometer. In addition, the interference optical head and the fibers are screwed in, providing easy replacement. The fiber cables are covered with stainless steel and therefore not entangled. [Conventional Measurement Method] [DISTAX Measurement Method]

• Space for a tripod is necessary. This takes time to install.
• The adopted optical fiber cables allow flexible installation anywhere! Example: DISTAX enables attachment of the measuring head to the main axis, providing easy attachment in the same way as a horizontal axis. DISTAX When the Y axis of a horizontal type machining center needs to be measured, the stroke reaches the underside of the table and therefore, unless a laser is attached to the main axis, the full-stroke measurement cannot be performed. Conventional Reflector Main axis Light source Deflection unit Main axis DISTAX enables the measurement without any problems since the measuring head can be attached to the main axis. DISTAX Length measuring head Corner cube Optical fiber A conventional tripod- type measuring machine cannot measure an axis with a slant angle. Even though a model in which the beam is deflected to a slant angle with a mirror is available, it is very difficult to attach and takes time to start measurement. Conventional Slant angle

)JSUIDPVQMJOHNFUIPE %*45"9 Magnet Rotation stopper jig Rotary encoder Angle measurement interference head Optical fiber $PNQBSBUJWFFYBNQMFPOBOHMFJOEFYJOH NFBTVSFNFOUQSPDFTT End (13 min. in total) End (40 min. in total) Alignment (15 min.) Alignment (5 min.) 360° turn 360° turn 10° reverse (Measurement) 10° turn 10° turn Stop (Measurement) Rotary encoder detects rotation. Attachment (3 min.) Main axis Corner cube Attachment (10 min.) Angle Indexing System Easy and a short-time Measurement (former a Ratio 1/3)

• Easy attachment!
• Measurement at high speed!
• Full automatic measurement!

Non-contact measurement of behavior of stage moving at high speed!

• Laser interferometer anyone can use!
• High sampling rate that does not miss even slight motion First in this class!
• The 2-axis simultaneous measurement provides the relation between the position and the posture. Achievement of both of the industry's first simultaneous 2-axis synchronous measurement and an industry leading high sampling rate of 1 MHz! Stage Behavior Measurement Dynamic measurement that catches motion by a high sampling rate Static measurement that correctly catches positioning accuracy.
• Distance, Speed, and Acceleration display function
• Graph's partial enlargement function
• Yawing/Pitching measurement and straightness measurement are supported.
• Keyboard input
• Auto input : Determination of Stop/Move based on the standard deviation and automatic input at the time of stop
• Timer input : Input based on the clock in the personal computer Effective in long-time measurement etc. Dynamic measurement software Data link software Appropriate sampling rate selection provides various measurements that could not be available until now. Tables and graphs of each measurement can be easily customized to the preferable format. (Microsoft Excel add-in software) Best for vibration and behavior measurement for stage Best for thermal deformation / distortion measurement etc. High sampling rate: 1-axis Low sampling rate Measurement setting screen Measurement result (Distance, speed, and acceleration) Partial enlargement Averaging process (Length: Tilt correction / Speed and Acceleration: Simple average) The trigger for positioning can be selected from the following three types: Measurement screen Measurement result graph (an example) The motion analysis system includes two types of software programs: Dynamic measurement software and data link software.
• Positioning measurement (Stage-related)
• Behavioral analysis
• Dimension measurement Linear guide motor Stage speed ripple test Stage statically determinate / stop state measurement Various vibration measurements
• Machine tool positioning test Semiconductor manufacturing device
• Bonder, Visual inspection device
• Stepper lens test equipment
• Liquid crystal test equipment
• Color filter dimensional inspection
• Visual inspection device
• Mounting machine
• Mounter/Sorter
• Printed circuit board exposure device
• PCB substrate drilling device
• Automatic welding machine positioning test
• Printing machine positioning test
• Printer/Plotter
• Scanner positioning test Wafer warp inspection Long-time positional variation (Thermal displacement, Vehicle body deformation) Gage test equipment Universal end measuring machine scale Actuator precision stage

and the stage, the Abbe error becomes high. Coarse stage Corner cube Length measuring head Printer Length measuring head HDD Shaft Length measuring head A multistage consisting of a coarse stage, a fine stage, a rotary stage, etc. has many degrees of freedom but its Abbe error is high since the height difference from the position control encoder is great when stages are stacked. The dynamic measurement contributes not only to startup and statically determinate characteristics but also to construction of a high accuracy and high-speed positioning stage by determining the exact behavior of the stage through yaw pitch analysis. For a column of a machine tool a measuring machine, etc, thermal displacement occurs due to temperature change in the column itself or the ball screw. This would be the most troublesome issue for a machine requiring positioning accuracy due to the tradeoff relation between weight reduction and rigidity. Thermal displacement can be measured for a long period of time by lengthening the sampling time in DISTAX dynamic measurement. When there is a constant relation between the body temperature and the thermal displacement, the thermal displacement can also be corrected. A body of rotation can be sampled and its runout can be analyzed. The positioning and statically determinate time of a printer head can be measured, contributing to accurate printing and print speed enhancement. The power zoom distance of a digital camera can be analyzed. A corner cube is attached to the lens part for measurement. When a condensing lens is equipped, a slight wafer warp can be measured. DISTAX with a high sampling rate can measure a compact slider which is used for semiconductor etc. The positioning accuracy of cutting plotters for apparel and wire bonders for semiconductors can be measured. A slight displacement of a cantilever can be correctly measured using a piece of very small mirror. Multistage Example: Dynamic measurement Example: Static measurement Thermal displacement analysis of machine column HDD face runout analysis / Shaft eccentricity analysis Printer head behavioral analysis Digital camera zoom behavioral analysis Test equipment reference of various gages Mirror wafer warp measurement Compact slider behavioral analysis Positioning test of plotter, bonder, etc. Measurement of slight displacement of cantilever DISTAX Accuracy Measurement with Limitless Possibilities Corner cube Length measuring head Machine tool Length measuring head Compact slider Length measuring head Cantilever Piece of very small mirror Corner cube Length measuring head Length measuring head Condensing lens Mirror wafer References of various gages which must be accurate can be correctly measured. Corner cube Length measuring head gauge Camera Corner cube

Maximum measurement range Corner cube specification: 10m Length of optical fiber 3m: Standard / 5m, 10m: Option Resolution Corner cube specification: 630 mm/s (Special order: 1000 mm/s) Accuracy +/- (L x 10 - 7 + 0.01 x 10 - 6) m L = Measurement length Sampling rate 1-axis model: 1 MHz (1 µsec) to 1 Hz (1s) Sampling point number 1 million points per axis Light source Wavelength stabilization single mode He-Ne laser Optical output approx. 0.3 mW (per axis) Wavelength stability ±1x10-7 Number of outgoing optical axes Up to two axes Warm-up time approx. 10 min. Input voltage AC100~240V ±10% Frequency: 50/60 Hz Power consumption Laser head light source LH-3000CE: 90 VA / PC expansion box: 90 VA Dimension Laser head light source: 160 (W) x 455 (D) x 116 (H) mm, 7.5 kg / PC expansion box: Specifications to order Operating environment Temperature: 10 to 40˚C (Temperature change in operation: within ±10˚C) / Humidity: 10 to 90% (Non-condensing) Basic specification Unit Software Oprion Product Code Product Name Remarks

4500118 DISTAX Manager

4500119 NC error measurement program

4500120 ISO standard measurement program

4500125 VID standard measurement program

4500171 DISTAX data link software

4250988 Angle measurement program

903268 Straightness measurement program

4500224 Inkjet printer Paper size: A4

4281074 Printer USB cable Length: 1.8m

4500411 Carrying case MODEL1 For laser gage interferometer

4500412 Carrying case MODEL2 For data processor

Product code Product Name Model Interference head Reflective mirror Remarks

903182 Length measurement

interference head LI-02A For distance measurement (up to 10m) Corner cube of ø20 (supplied) 4500603 Ultrasmall length measurement interference head LI-04A For distance measurement (up to 3m) Corner cube of ø10 (supplied)

903350 Length measurement

Plane mirror type for distance measurement (up to 5m) * The plane mirror is a build-to-order product.

4500155 Single beam interference

head LI-02C Single beam type for distance measurement (up to 5m) Corner cube of ø10 (supplied)

903185 Interference head LI-02D For angle measurement (yawing/pitching) (up to 5m)

Dual corner cube (supplied)

903258 Interference head LI-02E

Reflecting prism for straightness measurement (up to 3m) (Left) Polarizing prism (Right): 1 prism supplied for each

Machine tool measurement selection Basic component Product Code Product Name Optical system Description

4500371 Machine tool measurement

One axis of a machine tool can be automatically measured. A changeover is necessary for each measurement axis. Most basic system

4500156 National standard measurement

3-axis measurement interference head Corner cube specification Three axes of a national standard machine can be automatically measured, in which the optical axes are changed in order. A changeover is not necessary for each axis. Full automatic measurement is achieved.

4500158 X-Y stage measurement system

L-IM-301-22 Plane mirror interference head Best for measurement with a plane mirror attached to the X-Y stage side

4500320 X-Y stage measurement system

Ultrasmall length measuring head Corner cube type The ultrasmall body is effective also for the fine stage measurement which cannot be weighted. Low cost compared to a plane mirror Product Code Product Name Remarks

0903321 Motion analysis system (1-axis)

(Win XP version )

• Laser interference system (Transmission and reception fiber of 3m, LI-02A interference optical head reflector, Interference head mounting jig, Reflector mounting jig)
• Dynamic measurement software, Data link software
• Environment sensor, Object temperature sensor
• Box computer, LCD, Keyboard *For various interference optical heads and change in fiber length, contact us.

0903322 Motion analysis system (2-axis)

(Win XP version ) Product Code Product Name Model Interference head Reflective mirror Remarks 4500706 3-axis measuring head LI-42A Switching controller for distance measurement is supplied (up to 5m). Corner cube of ø20 (3 cubes supplied) 4500708 Angle indexing accuracy measurement system (without an angle head) LI-04ANG Combination with LI-02D Laser head light source Corner cube Interference head Optical fiber PC expansion box Object temperature sensor Reflector mounting jig (Option) Interference head mounting jig (Option) DISTAX Manager Data Link Software NC Controller RS-232C Personal computer Printer (Option) Software: Windows applications (1-axis: 4-slot / 2-axis: 7-slot) The laser wavelength is influenced by temperature, air pressure, and humidity when transmitted through the air. The environment sensor automatically corrects change in wavelength with high precision in the installation environment. The object temperature sensor is used to calculate the thermal expansion of a device under test and to automatically corrects to the condition at 20̊C. Corner cube Optical fiber Laser head light source Interference head PC expansion box Object temperature sensor Reflector mounting jig (Option) Interference head mounting jig (Option) DISTAX Manager Data Link Software Personal computer Printer (Option) Software: Windows applications* (1-axis: 4-slot / 2-axis: 7-slot) The laser wavelength is influenced by temperature, air pressure, and humidity when transmitted through the air. The environment sensor automatically corrects change in wavelength with high precision in the installation environment. The object temperature sensor is used to calculate the thermal expansion of a device under test and to automatically corrects to the condition at 20̊C. Environment sensor Environment sensor

Unit combinations provide various measurements. 2-axis simultaneous measurement is also available! Various 2-axis simultaneous measurements are available by unit combinations, such as Distance x Distance, Distance x Yawing, Distance x Straightness, Pitching x Yawing, Horizontal straightness x Vertical straightness, etc. A corner cube is attached to the stage side (1-axis) for inspection of the moving accuracy. The use of a plane mirror enables 2-axis simultaneous inspection of the X and Y axes. An interference pattern occurs due to an interference phenomenon caused by composition of the light wave reflected from a fixed reference mirror and the light wave reflected from a moving mirror, and measurement is performed by counting as the travel distance changes. A dual corner cube is attached to the stage for inspection of yawing/pitching with an angle measuring head. Yawing/ Pitching are measured based on an optical path length difference between two beams from an interference head onto a reflector and the center of the reflector of the dual corner cube. Positioning measurement Yawing/Pitching measurement LI-02A LI-42A Corner cube of ø20 LI-02D Dual corner cube * The plane mirror is an option. OPTION Unit composition Unit composition Stage movement Stage Stage Yawing Pitching Stage Plane mirror* Stage movement Corner cube Length measuring head Length measuring head Angle measurements head Machine tool movement Machine tool movement Dual corner cube Dual corner cube Angle measurements head straightness x Vertical straightness, etc.

Straightness is inspected along with the stage guide. Manually pitch-feed the reflector mounted on the foot spacer between spacers along with the straight edge and measure the 2-point chain straightness from the posture angle of the measuring surface at each stop position. A polarizing prism and a reflecting prism are attached to the stage to inspect horizontal/vertical straightness using straightness measuring head. Two light beams from the straightness interference head are deflected in a V shape through the polarizing prism and then enter into the reflecting prism. The beams are reflected on the same optical path through the reflecting prism. When the polarizing prism attached to the object to be measured moves in the horizontal or vertical direction, a difference occurs between the two optical paths and it is counted and measured to determine the straightness. 2-point chain straightness measurement Straightness measurement LI-02D LI-02E Polarizing prism Reflecting prismDual corner cube OPTION OPTION Unit composition Unit composition OPTIONDynamic measurement Simultaneous achievement of the industry’s first simultaneous 2-axis measurement and an industry leading high sampling rate of 1 MHz Appropriate sampling selection provides various applications that could not be available until now. High sampling rate 1 MHz ! (1-axis) 05MHz ! (2-axis) For vibration measurement Servomechanism performance evaluation Risetime, Hunting etc Long-time measurement Thermal deformation Distortion measurement Low-temperature sampling Distance, Angle, Straightness All Supported! Simultaneous 2-axis measurement Corner cube Length measuring head Machine tool Length measuring head Printer Corner cube HDD Length measuring head Shaft Length measuring head A high precision rotary encoder and an interference head for angle measurement are attached to the rotary table to be measured. Although the rotary encoder shaft rotates with the table to be measured, the rotary encoder is free from the rotary shaft via the bearing and the rotation stopper jig controls the rotation. The rotation angle of the slightly rotating rotary encoder body is measured by the laser interference head for angle measurement. Then the result is added to the measurement value of the rotary encoder to determine an exact angle of rotation. LI-02D Dual corner cube Angle indexing measurement Rotary encoder OPTIONAngle indexing measurement DISTAX Rotation stopper jig Magnet Rotary encoder Angle measurement interference head Optical fiber Angle measurements head Guide/Surface Move Horizontal straightness Stage Stage Polarizing prism Polarizing prism Reflecting prism Reflecting prism Straightness measuring head Straightness measuring head Vertical straightness Stage movement Stage movement Head mount Foot spacer

Controller requirements in automatic measurement (Manual measurement can be performed even if the requirements are not satisfied.) NC pitch error correction software (Supporting straight/rotation axis) ISO230-2 Standard Measurement software (Supporting straight/rotation axis) VDI standard 3441/DGQ measurement software (Supporting straight/rotation axis) Correction values (positioning/backlash) are automatically calculated from the measured positioning value of the machine tool and input into the controller. Parameters of the machine tool are downloaded to adjust correction values to the controller and set up target values. This is achieved by retry + overwrite operation. G code programs for measurement are automatically created, enabling remote operation of the machine tool. Machine tool inspection standard ISO230- 2-compliant software Setting measurement positions automatically creates G code programs for measurement, enabling remote operation of the machine tool. The FY 1988 and FY 2006 formats required in customs clearance are supported. Tables and graphs following the standard can be printed. Machine tool inspection standard VDI3441/ DGQ-compliant software A sequence of positioning processes of the linear position, the origin reference point, and the turning point can be selected. G code programs for measurement are automatically created, enabling remote operation of the machine tool. Software lineup Automatic continuous measurement is supported. Automatic continuous measurement is supported. Software dedicated to machine tools Full-automatic measurement software Data are automatically loaded and NC machine tools are automatically operated. Furthermore, correction values are automatically transmitted and correction is automatically performed. Various controllers are supported. The safety check program improves the safety, such as collision prevention of the measuring head! User-friendly with one-click startup, simplified settings, print preview etc. Interference head NC controller Automatic data loading Automatic correction data transmission Interface One of RS-232C ports; COM1 to COM16 Available NC controller FANUC series 30i/31i/32i300i/310i/320i/16/18/21/16i/18i/21i/160i/180i/210i/(0i/0i Mate/15i/150i) *2 MELDAS series 60/60S/70 * Automatic measurement needs an NC controller with RS-232 communication ports, programmable parameters, RS-communication DNC operation (RMT mode). *1: Windows 7 is a trademark of Microsoft Corporation in the United States. *2: The FANUC16 compatible format shall be supported.

Angle Measurements Software (Yawing, Pitching, 2-point chain straightness) Dynamic analysis software DATA Link Software (Excel Add-in Software) Straightness Measurement Software Posture changing with movement of the measuring object (Yawing/Pitching) is measured. The measurement value connecting function allows flexible measurement. This function is effective for a retry in the middle of measurement and sectional measurement in major axis measurement. In addition, 2-point chain straightness measurement is also available. This measurement calculates and chains straightness data from distance and angle data. Straightness changing with movement of the measuring object (Vertical/Horizontal direction) is measured. Two- way measurement is performed and start-to-end point and least square corrections are available. Behavioral analyses of the vibration level and the stage acceleration/deceleration can be performed at a high sampling rate and thermal displacement analysis can be performed at a low sampling rate. Not only all of positioning, yawing/pitching, and straightness measurements can be selected but also simultaneous 2-axis measurement is also available. The comprehensive behavior consisting of positioning and posture can be analyzed. With full of user-friendliness with various functions including FFT and zooming functions, we are confident of this software. This software comes standard with the DISTAX system. For the direct input to Excel, the following three types of triggers are available: (1) Keyboard input (2) Auto input Measured values are automatically input by monitoring the degree of variation in measurement as the standard deviation and then determining Move -> Stop based on the specified thresholds of Stop/Move. (3) Timer input A timer trigger time can be input based on the clock in the personal computer. The flexible data handling in Excel provides simple and excellent user-friendliness. All of positioning, yawing/pitching, and straightness measurements are available. Posture/Straightness Level Measurement Software Dynamic Measurement Software Standard software

• JAPAN TEL.81-42-642-1240 • TAIWAN TEL.886-3-6669161• CHINA TEL.86-138-1818-0289 • KOREA TEL.82-02-2026-5543
• EU (Germany) TEL.49-89-546788-0 / EU (Hungary) TEL.49-89-546788-0
• INDNESIA TEL.62-21-8967-7651 • INDIA TEL.91-124-4241-673 • THAILAND TEL.66-2751-9563 • USA TEL.513-373-4844 Please contact the following dealer to place an order. Combination example of interference head and jig 3-axis measurement model (Interference unit) 3-axis measurement model (Interference unit) Positioning measurement (Reflector) Angle measurement (Reflector) Dual corner cube Corner cube ̏̎ɽ̑ ʢ̒̔ɽ̑ʣ ̍̍̌ ̓̎ɽ̑ ̍̌̎ɽ̑