CPW2870B10-47 CPI | Alldatasheet
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DC SPUTTERING CPW2870B10-47 & STD Z POWER SUPPLY 36kW – 460/480 VAC WITH INTEGRATED ACTIVE ARC SUPPRESSIO N
DESCRIPTION
In the 1980s, CPI Canada pioneered Resonant Power Conversion Technology for high power processing. This method offers unique advantages in sputtering systems in the areas of wide load range (without tap changing), reliability (using an inherently short- circuit proof, rugged power chain), and wide control range (from < 1% to full power). CPI has continued to evolve this technology into higher powers with 36 kW now available in a 8.75” high chassis. When it comes to Watts/inch3 (size), Watts/lbs (weight), Watts/$ (price), and proven field reliability, CPI is unmatched in the industry. SPECIFICATIONS Input power requirements: 414V - 528VAC Interlocks for safe operation at 58 amps max 50/60Hz, 4 wire 3 phase + gnd Protection: O ver temperature Efficiency: > 90% Over-current , over-voltage, over-power Input undervoltage Output power: 36kW C ooling: Forced air: Front panel Monitors o/p power, T ambient = 35°C max. at full power Digital Meter: voltage and current W eight: approx. 110 lbs User Interface: Remote Analog Sensing Input/ Output Power connectors for easy installation. Digital Interface: RS-232, 422, 485 Dim ensions: 8.75” H x 23.2” DP - 19” rack mount R emote control via digital ports B10 STD Z Ignition voltage: 1000V 1500V Output voltage: 550V max 800V max Output Current: 120A max 80A max
Higher Power Configurations: Can be configured with two more units to give 108 kW output power without any changes to the units or the Host interfaces PRODUCT ADVANTAGES Delivery time: Typically 2 to 4 weeks for unforecasted units JIT for scheduled production Integrated Active Arc Suppression: Built in to act upon arcs and extinguish them within 10 µsecs. Highest output power in a 8.75” chassis: 36 kW over a wide process range Wide load range: STD Z = 800V max & 80A and Low Z = 550V & 120A to cover many different processes running at different powers, different materials and argon pressures. We can adjust load range for specific customer requests! Optional Interfaces Others available upon request. Product certification: IEC 950, UL 1950, CSA 950, CE Product compliant: NEC, NFPA 79, S2-93 Reliability designed in: Extensive worst case analysis design reviews Based on continuous duty cycle Uses established technology with proven reliability record of >280,000 hours MTBF. Reliability built in and tested: E.S.S. (Environmental Stress Screening) on 100% production
- Random frequency vibration along 3 axis (20 grms)
- Rapid temperature change (25°C/ min) ISO 9001 Communications & Power Industries Canada Inc.
45 River Drive
Georgetown, Ontario, Canada L7G 2J4 Tel: (905) 877-0161 Fax: (905) 877-5327 Email: marketing @ cmp.cpii.com Website: www.cpii.com/cmp