C39

C39 TDK | Alldatasheet

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Technical content

Series/Type: AEA 1.200 C39/1 Ordering code: B58600E3914B637 Date: 2017-05-18 Version: 4  EPCOS AG 2017. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited. EPCOS AG is a TDK Group Company. Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Pressure sensors Identification/Classification 2 (header 2 + bottom left header bar): C39 series Ordering code: (top right header bar) B58600E3914B637 Series/Type: (bottom right header bar) AEA 1.200 C39/1 Preliminary data (optional): Department: BL TPS PS PD SD Date: 2017-05-18 Version: 4

Pressure sensors B58600E3914B637 C39 series AEA 1.200 C39/1 BL TPS PS PD SD 2017-05-18 Please read Cautions and warnings and Page 2 of 9 Important notes at the end of this document.

Applications

 Medical devices  Weather stations  Handheld devices (cell phone, navigation, etc.)  Automation

Features

 Piezoresistive MEMS technology  Small dimensions: 0.65 × 0.65 mm²  Square diaphragm  Measured media (front side): Dry non-aggressive gases. Unsuitable for substances which react with silicon or aluminum.  Wheatstone bridge with mV output, ratiometric to supply voltage  Rated pressure range is 1.2 bar abs  Outstanding long-term stability  RoHS-compatible Delivery mode  Tape Dimensional drawings X10: Substrate X5 : VDD+ X4 : Vout+ X2 : VDD- X1 : Vout- p X10 Circuit diagram: Si 100 Acceptable chipping: Front side max. 50 µm Back side max. 80 µm All dimensions in µm 480 480 650±50 650±50 235±12 Bond pad area

Pressure sensors B58600E3914B637 C39 series AEA 1.200 C39/1 BL TPS PS PD SD 2017-05-18 Please read Cautions and warnings and Page 3 of 9 Important notes at the end of this document. Technical data Absolute maximum ratings Parameter Symbol Conditions Min. Typ. Max. Unit Supply voltage Maximum supply voltage VDD Without damage 1) 10 V Temperature ranges Operating temperature range Ta 2) –40 135 °C For t <15 min –40 140 °C Storage temperature range Tst 3) –40 150 °C Pressure ranges Operating pressure ranges pr Absolute pressure 4) 0 1.2 bar Over pressure pov Absolute pressure 5) 3 pr Burst pressure pberst Absolute pressure 6) 5 pr Electrical specifications Parameter Symbol Conditions Min. Typ. Max. Units Operating pressure pr 4) See next table bar Supply voltage / bridge resistance Operating supply voltage VDD 7) 1.0 3.0 6.0 V Total bridge resistance Rb @ 25 °C 8) 4.8 5.7 7.2 kΩ Temperature coefficient of total bridge resistance αRb @ 25 °C 9) 1.2 1.5 1.8 10–3/K βRb 4 7 10 10–6/K2 Output signal @ VDD = 5 V Offset V0 @ 25 °C 10) –6 0 +6 mV/V Sensitivity S @ 25 °C 13) See next table mV/Vbar Temperature coefficient of the sensitivity βS 0 4 8 10–6/K2 Pressure hysteresis pHys 16) –0.1 0.1 % FSON Long-term stability (Full scale normal output FSON) Temperature hysteresis of offset THV0 17) -0.3 ±0.1 0.3 % FSON Temperature cycle drift of offset TCDV0 High temperature drift of offset HTDV0 17) -0.4 ±0.1 0.4 % FSON Long term stability of offset LTSV0 17) -0.35 ±0.1 0.35 % FSON

Pressure sensors B58600E3914B637 C39 series AEA 1.200 C39/1 BL TPS PS PD SD 2017-05-18 Please read Cautions and warnings and Page 4 of 9 Important notes at the end of this document. Operating pressures and ordering codes Parameter @ 25 °C, VDD = 5 V Symbol Typ. Units Operating pressure 4) pr 1.2 bar Temperature coefficient of offset voltage (unglued) 11) [typ/max] TCV0 – 0/±5 µV/V/K TCV0 + 0/±5 µV/V/K Nonlinearity 14) [typ/max] L ±0.2/±0.4 % FS Sensitivity 13) [min/typ/max] S 12/15/18 mV/V bar Product type AEA 1.200 C39/1 Ordering code B58600E3914B637 Other operating pressures upon request.

Pressure sensors B58600E3914B637 C39 series AEA 1.200 C39/1 BL TPS PS PD SD 2017-05-18 Please read Cautions and warnings and Page 5 of 9 Important notes at the end of this document. Symbols and Terms 1) Maximum power supply VDD This is the maximal allowed voltage, which may be applied to the piezoresistive bridge circuit without damage. 2) Operating temperature range Ta This is the operating Temperature range Ta,min to Ta,max. Because most of the sensor parameters depend on assembling conditions like gluing, wire bonding etc, the die has to be tested over the operating temperature range by the customer fully assembled. For design verification and process control samples, mounted on TO39 base are tested over the temperature range of Tmin to Tmax. 3) Storage temperature range Tst If the pressure sensor dies are stored in the temperature range Tst,min to Tst,max without applied voltage power supply, this will not affect the performance of the pressure sensor dies. 4) Operating pressure range pr In the operating pressure range 0 to pr,max the pressure sensor die output characteristic is as defined in this specification. 5) Over pressure pOV Pressure cycles in the pressure range 0 to pov do not affect the performance of the pressure sensor dies. 6) Burst pressure pberst Up to the burst pressure pberst the diaphragm of the sensor die will not be destroyed mechanically. This parameter is tested at room temperature on samples mounted on an aluminium socket by increasing the applied pressure until the diaphragm is destroyed. Since the burst pressure depends on several assembling conditions, this parameter has to be verified by the customer with his assembling possibilities. 7) Operating power supply VDD The pressure sensor parameters are defined for a power supply voltage of VDD = 5 V. In the operating power supply voltage range VDD,min to VDD,max the ratiometric parameters r(VDD) like sensitivity, offset voltage and the temperature coefficient of the offset voltage are defined by: ( ) ]V[5 V])V[5(rVr DD DD = 8) Total bridge resistance RS The total bridge resistance is defined between pad X5 and X2, (see the dimensional drawing in this data sheet) of the closed piezoresistive bridge circuit. The total bridge resistance is in a good approximation the output impedance of the piezoresistive bridge circuit. This parameter is tested completely on a wafer (wafer level test measurement). 9) Temperature coefficients of resistance αRs and βRs: The temperature coefficients of resistance are tested for design verification on samples, mounted on a TO39 base package (AT2 series) over the temperature range Tmin to Tmax with TR = 25 °C. The temperature coefficients of first and second order are defined with the polynomial: ( ) ( )   °−β+°−α+°== RsRsSS C25TC25T1)C25T(R)T(R The coefficients αRs and βRs are calculated using the three measurement points of Rs(T) at Tmeas,min, TR and Tmeas,max. 10) Offset voltage V0 The offset voltage V0 is the output voltage Vout(p = 0 bar abs) at zero absolute pressure and for a bridge voltage power supply VDD = 5 V. For design verification V0 is measured on samples, mounted in TO39 base package (AT2 series) by extrapolating the output characteristic to zero bar. Since the offset voltage depends on several assembling conditions, this parameter has to be verified by the customer with his assembling possibilities. 11) Temperature coefficients of offset voltage TCV0 The temperature coefficients of offset voltage are defined for a bridge voltage power supply VDD = 5 V. These parameters strongly depend on assembly conditions like gluing, wire bonding etc. The temperature coefficients of offset voltage are tested for design verification on samples, mounted on TO39 base package (AT2 series) over the temperature range Tmin to Tmax . TCV0+ and TCV0- are defined for the measurement temperature range by: C25T )C25(V)T(VTCVo max omaxo °−=+ C25T )C25(V)T(VTCVo min omino °−=−

Pressure sensors B58600E3914B637 C39 series AEA 1.200 C39/1 BL TPS PS PD SD 2017-05-18 Please read Cautions and warnings and Page 6 of 9 Important notes at the end of this document. Since the TCV0 depends on several assembling conditions, this parameter has to be verified by the customer with his assembling possibilities. 12) Full scale value FS omaxrout V)p(VFS −= 13) Sensitivity S The sensitivity is defined for a bridge voltage power supply VDD = 5 V. It can be determined by the formula: maxr omaxrout p V)p(VS −= This parameter is tested for process control on samples, mounted on a TO39 base package (AT2 series). 14) Nonlinearity L This parameter may be influenced by assembly. The nonlinearity is measured using the endpoint method. Assuming a characteristic, this can be approximated by a polynomial of second order, where the maximum is at px = prmax/2. The nonlinearity is defined at px = prmax/2, using the equation: maxr x omaxrout oxout p p V)p(V V)p(VL −− This parameter is tested for process control on samples, mounted on a TO39 base. 15) Temperature coefficient of sensitivity αS and βS: These parameters may be influenced by assembly. The temperature coefficients of sensitivity are tested for design verification on samples, mounted on a TO39 base package (AT2 series) over the temperature range Tmin to Tmax with TR = 25 °C. The temperature coefficients of first and second order are defined with the polynomial: ( ) ( )   °−β+°−α+°== SS C25TC25T1)C25T(S)T(S The coefficients αS and βS are calculated using the three measurement points of S(T) at Tmeas,min, TR and Tmeas,max. 16) Pressure hysteresis pHys The pressure hysteresis is the difference between output voltages at constant pressure and constant temperature while applying a pressure cycle with pressure steps of pr, min, p1, p2, p3, pr,max, p3, p2, p1, pr, min: FS )p(V)p(VpHys k1,outk2,out −= This parameter is tested for design verification on samples, mounted on a TO39 base package (AT2 series). Since the pHys depends on several assembling conditions, this parameter has to be verified by the customer with his assembling possibilities. 17) Reliability data For long-term stability of offset voltage LTSV0 please refer to the defined Aktiv Sensor’s standard AS100001 in chapter “Reliability data” on the internet. Since the LTSV0 depends on several assembling conditions, this parameter has to be verified by the customer with his assembling possibilities.

Pressure sensors B58600E3914B637 C39 series AEA 1.200 C39/1 BL TPS PS PD SD 2017-05-18 Please read Cautions and warnings and Page 7 of 9 Important notes at the end of this document. Cautions and warnings Storage (general) All pressure sensor s should be stored in their original packaging. They should not be placed in harmful environments such as corrosive gases nor exposed to heat or direct sunlight, which may cause deformations. Similar effects may result from extreme storage temperatures and climatic conditions. Avoid storing the sensor dies in an environment where condensation may form or in a location exposed to corrosive gases, which will adversely affect their performance. Plastic materials should not be used for wrapping/packing when stor ing or transporting these dies, as they may become charged. Pressure sensor dies should be used soon after opening their seal and packaging. Operation (general) Media compatibility with the pressure sensors must be ensured to prevent their failure. The use of other media can cause damage and malfunction. Never use pressure sensors in atmospheres containing explosive liquids or gases. Ensure pressure equalization to the environment, if gauge pressure sensors are used. Avoid operating the pressure sensors in an environment where condensation may form or in a location exposed to corrosive gases. These environments adversely affect their performance. If the operating pressure is above the rated over pressure range, it may change the output characteristics. This may also happen with pressure sensor dies if an incorrect mounting method is used. Be sure that the applicable pressure does not exceed the overpressure, as it may damage the pressure sensor. Do not exceed the maximum rated supply voltage nor the rated st orage temperature range, as it may damage the pressure sensor. Temperature variations in both the ambient conditions and the media (liquid or gas) can affect the accuracy of the output signal from the pressure sensors. Be sure to check the operating temper ature range and thermal error specification of the pressure sensors to determine their suitability for the application. Connections must be wired in accordance with the terminal assignment specified in the data sheets . Care should be taken as reversed pin connections can damage the pressure transmitters or degrade their performance. Contact between the pressure sensor terminals and metals or other materials may cause errors in the output characteristics. Design notes (dies) This specification describes the mechanical, electrical and physical requirements of a piezoresistive sensor die for measuring pressure. The specified parameters are valid for the pressure sensor die with pressure application either to the front or back side of the diaphragm as described in the data sheet . Pressure application to the other side may result in differing data. Most of the parameters are influenced by assembl y conditions. Hence these parameters and the reliability have to be specified for each specific application and tested over its temperature range by the customer. Handling/Mounting (dies) Pressure sensor dies should be handled appropriately and not be touched with bare hands. They should only be picked up manually by the sides using tweezers. Their top surface should never be touched with tweezers. Latex gloves should not be used for handling them, as this will inhibit the curing of the adhesive used to bond the die to the carrier. When handling, be careful to avoid cuts caused by the sharp-edged terminals. The sensor die must not be contaminated during manufacturing processes (gluing, soldering, silk -screen process). The package of pressure sensor dies should not to be opened until the die is mounted and should be closed after use. The sensor die m ust not be cleaned. The sensor die m ust not be damaged during the assembly process (especially scratches on the diaphragm).

Pressure sensors B58600E3914B637 C39 series AEA 1.200 C39/1 BL TPS PS PD SD 2017-05-18 Please read Cautions and warnings and Page 8 of 9 Important notes at the end of this document. Storage conditions Used materials for storage should be ESD protective according JESD625, non-outgassing, and chemically stable. Furthermore the following storage conditions should be preserved: 1. Storage in cabinets (if shipment package is opened): a. Atmosphere: inert gas, dry air or dry nitrogen b. Temperature range (in cabinet): 20±3 °C c. Relative humidity range (in cabinet): < 40 % d. Particle count (in cabinet): Class 6 per ISO 14644:1999 (equivalent FED STD 209E Class 1000) e. Shelf life under these conditions: 24 months for deliveries in trays f. Shelf life under these conditions: 12 months for deliveries on tape 2. Storage in containers (if shipment package is sealed): a. Sealed as delivered or backfilled with inert gas, dry air or dry nitrogen and re-sealed b. Temperature range: 20±3 °C c. Relative humidity range: < 50 % d. Particle count (during backfill): Class 6 per ISO 14644:1999 (equivalent FED STD 209E Class 1000) e. Shelf life under these conditions: 12 months for deliveries in trays f. Shelf life under these conditions: 6 months for deliveries on tape This listing does not claim to be complete, but merely reflects the experience of EPCOS AG. Display of ordering codes for EPCOS products The ordering code for one and the same EPCOS product can be represented differently in data sheets, data books, other publications, on the EPCOS website, or in order-related documents such as shipping notes, order confirmations and product labels. The varying representations of the ordering codes are due to different processes employed and do not affect the specifications of the respective products. Detailed information can be found on the Internet under www.epcos.com/orderingcodes

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