AMS6916

AMS6916 ANALOGMICRO | Alldatasheet

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Board mount pressure sensor with ratiometric analog output Analog Microelectronics GmbH An der Fahrt 13, D – 55124 Mainz April 2019 – Rev. 1.0, preliminary Phone:+49 (0)6131/91 0730-0 Fax: +49 (0)6131/91 073-30 Internet: www.analog-micro.com E–Mail: info@analogmicro.de

FEATURES

 Piezoresistive pressure sensor with amplified analog output  Calibrated and temperature compensated  Ratiometric voltage output, 0.5 … 4.5 V  Digital signal conditioning , 12 bit output resolution  Differential, relative (gage), bidirectional differential, absolute and barometric versions  Accuracy of 0.5 %FSO at room temperature (for pressure ranges > 10 mbar)  Small overall error (TEB) within a temperature range of 0 … 60 °C  Supply voltage range 4.75 … 5.25 V  Operating temperature range -25 … 85 °C  High long term stability  Short circuit protected output and diagnostic functions  Miniaturized DIL package for PCB assembly  Horizontal and vertical pressure port configurations available  Ready to use  RoHS and REACH compliant TYPICAL APPLICATIONS  Static and dynamic pressure measurement  Industrial process control  Medical instrumentation  Heating, Ventilation and Air Conditioning (HVAC)  Barometric pressure measurement  Vacuum monitoring  Gas flow measurement GENERAL DESCRIPTION AMS 6916 is an OEM pressure sensor s series offering an analog voltage output in a compact DIL package for assembly on printed circuit boards (PCBs) . The high-precision pressure sensors feature a short circuit protected ratiometric 0.5 … 4.5 V output and diagnostic functions indicating sensor errors. The sensors in the AMS 6916 series are digitally calibrated, linearized and temperature compensated with an operating temperature range of -25 … 85 °C. Combining a high quality piezoresistive MEMS sensing element with a modern, mixed -signal conditioning ASIC on a ceramic substrate the AMS 6916 achieves a small total error band together with excellent long term stability. AMS 6916 sensors are available for all pressure types in various pressure ranges: differential / rel- ative pressure sensors in ranges from 0 … 5 mbar up to 0 … 1 bar, absolute pressure sensors for 0 … 500 mbar and 0 … 1 bar and a barometric type (700 … 1200 mbar) . Bidirectional differential pressure sensors are offered in ranges from -5 … +5 mbar up to -1 … +1 bar. Custom specific pressure ranges or further modifications are avail- able on request. The robust AMS 6916 are especially suitable for precise low and medium differential pressure measurements in applications, where a cons e- quent miniaturization is required.

Board mount pressure sensor with ratiometric analog output April 2019 – Rev. 1.0, preliminary Page 2/9 www.analog-micro.com PRESSURE RANGES AND TYPES Pressure sensor code Pressure type Pressure range in mbar Burst pressure1) in bar Pressure range in PSI Burst pressure in PSI Ultra low pressure AMS 6916-0005-D-… differential (relative) 0 … 5 > 0.2 0 … 0.0725 > 3 AMS 6916-0005-D-B-… bidirectional differential -5 … +5 > 0.2 -0.0725 … +0.0725 > 3 AMS 6916-0010-D-… differential (relative) 0 … 10 > 0.2 0 … 0.145 > 3 AMS 6916-0010-D-B-… bidirectional differential -10 … +10 > 0.2 -0.145 … +0.145 > 3 Low pressure AMS 6916-0020-D-… differential (relative) 0 … 20 > 0.4 0 … 0.29 > 6 AMS 6916-0020-D-B-… bidirectional differential -20 … +20 > 0.4 -0.29 … +0.29 > 6 AMS 6916-0050-D-… differential (relative) 0 … 50 > 1 0 … 0.725 > 15 AMS 6916-0050-D-B-… bidirectional differential -50 … +50 > 1 -0.725 … +0.725 > 15 AMS 6916-0100-D-… differential (relative) 0 … 100 > 1 0 … 1.450 > 15 Standard pressure AMS 6916-0200-D-… differential (relative) 0 … 200 > 1.7 0 … 2.901 > 25 AMS 6916-0200-G-… relative 0 … 200 > 1.7 0 … 2.901 > 25 AMS 6916-0200-D-B-… bidirectional differential -200 … +200 > 1.7 -2.901 … +2.901 > 25 AMS 6916-0350-D-… differential (relative) 0 … 350 > 1.7 0 … 5.076 > 25 AMS 6916-0350-G-… relative 0 … 350 > 1.7 0 … 5.076 > 25 AMS 6916-0350-D-B-… bidirectional differential -350 … +350 > 1.7 -5.076 … +5.076 > 25 AMS 6916-1000-D-… differential (relative) 0 … 1000 > 5 0 … 14.50 > 72 AMS 6916-1000-G-… relative 0 … 1000 > 5 0 … 14.50 > 72 AMS 6916-1000-D-B-… bidirectional differential -1000 … +1000 > 5 -14.50 … +14.50 > 72 AMS 6916-0500-A absolute 0 … 500 > 5 0 … 7.25 > 72 AMS 6916-1000-A absolute 0 … 1000 > 5 0 … 14.5 > 72 AMS 6916-1200-B barometric 700 … 1200 > 5 10.88 … 17.4 > 72 Table 1: AMS 6916 standard pressure ranges (other ranges on request) MAXIMUM RATINGS Parameter Minimum Typical Maximum Units Maximum supply voltage: VS,max 6.0 V Operating temperature: Top -25 85 °C Storage temperature: Tamb -25 85 °C Common mode pressure pCM 2) 16 bar Table 2: Maximum ratings Notes: 1) Burst pressure is defined as the maximum pressure, which may be applied to one pressure port relative to the other port (or while only one pressure port is connected) without causing leaks in the sensor. 2) Common mode pressure is defined as the maximum pressure, which can be applied simultaneously on both pressure ports of a differential or bidirectional transmitter without causing damages, while no further differential pressure is ap- plied.

Board mount pressure sensor with ratiometric analog output April 2019 – Rev. 1.0, preliminary Page 3/9 www.analog-micro.com SPECIFICATIONS All parameters apply to Top = 25 °C and VS = 5.0 V unless otherwise stated. Parameter Minimum Typical Maximum Units Analog output signal 1) @ specified minimum pressure (see "pressure ranges") 2) 0.5 V @ specified maximum pressure (see "pressure ranges") 2) 4.5 V Full span output (FSO) 3) 4 V without pressure (bidirectional differential types) 2.5 V Accuracy 4) @ T = 25 °C Ultra low pressure sensors (5, 10 mbar) ± 1.0 %FSO Low pressure sensors (20, 50, 100 mbar) ± 0.5 %FSO Standard pressure sensors (> 100 mbar) ± 0.5 %FSO Overall error 5) (TEB) @ T = 0 … 60 °C Ultra low pressure sensors (5, 10 mbar) ± 1.5 %FSO Low pressure sensors (20, 50, 100 mbar) ± 1.0 %FSO Standard pressure sensors (> 100 mbar) ± 1.0 %FSO Long term stability 0.2 6) < 0.5 %FSO/a Resolution A/D converter 14 bits Resolution analog output signal 12 bits Supply voltage range (VS) 4.75 5.00 5.25 V Overall ratiometricity error (@ VS = 4.9 … 5.1 V) 7) ± 0.1 %FSO Current consumption 3 mA Reaction time (10 % … 90 % rise time) 1 2 ms Start up time (Power up to data ready) 8 ms Load resistance at output RL to GND 8) 5 kΩ Capacitive load 15 nF Diagnostic output level 0 … 2.5 and 97.5 … 100 % VS Pressure changes 106 Compensated temperature range -25 85 °C Weight 1.5 g Media compatibility See "Specification notes" 9) 10) Table 3: Specifications SPECIFICATION NOTES 1) The analog output signal is ratiometric to the supply voltage. 2) For pressure ranges see Table 1. 3) The Full Span Output (FSO) is the algebraic difference between the output signal at the specified maximum pressure and the output signal at the specified minimum pressure (see "Pressure ranges"). 4) Accuracy is defined as the measurement value’s maximum deviation from the ideal characteristic curve at room temperature (RT) in %FSO including the adjustment error (offset and span), nonlinearity, pressure hysteresis and repeatability. Nonlinearity i s the measured deviation from the best fit straight line (BFSL) across the entire pressure range. Pressure hysteresis is the maximum deviation of the output value at any pressure within the specified range when th e pressure is cycled to and from the minimu m or maximum rated pressure. Repeatability is the maximum deviation of the output value at any pressure within the specified range after 10 pressure cycles.

Board mount pressure sensor with ratiometric analog output April 2019 – Rev. 1.0, preliminary Page 4/9 www.analog-micro.com 5) The overall error (TEB) is defined as the measurement value ’s maximum deviation from the ideal characteristic curve in %FSO in the temperature range of 0 … 60 °C. 6) The long term stability is tested on a sample base. 7) The ratiometricity error is defined as the maximum deviation of the measurement output voltage at a supply voltage VS from the measurement output voltage at 5 V supply multiplied with VS / 5 V at room temperature (RT) in %FSO at any pressure within the specified range. VS has to be in the specified range. 8) A load resistor of RL = 10 kΩ is recommended, if the diagnostic feature is used to detect a power loss. 9) Media compatibility of pressure port 1 (for a description of port 1, see Figure 3): fluids and gases non-corrosive to LCP, silicon, Pyrex, RTV silicone rubber and epoxy. 10) Media compatibility of pressure port 2 (for a description of port 2, see Figure 3): clean, dry gases, non-corrosive to LCP, silicon, RTV silicone rubber, epoxy, gold (alkaline or acidic liquids can destroy the sensor). FUNCTIONAL DESCRIPTION The pressure sensors from the AMS 6916 series combine a high quality , piezoresistive MEMS silicon sens- ing element with a modern mixed -signal CMOS ASIC for digital signal-conditioning on a ceramic substrate. This combination enables high precision measurements and excellent drift and long -term stability. The functional principle of the AMS 6916 sensors is explained using Figure 1. The physical pressure measurement is done at AMS 6916's piezoresistive pressure sensing element , which converts the applied pressure into a differential voltage signal almost proportional to the applied pressure. This differential voltage signal is corrected and conditioned by the connected ASIC in multiple steps. At first the differential voltage signal from the sensing element is pre-amplified by the ASIC ’s amplifier block (Amp) and transmitted to the integrated A/D converter (ADC) by the multiplexer stage (MUX). The ADC converts this voltage signal into a digital value with a resolution of 14 bit. Th is digitized pressure signal is corrected and calibrated in the subsequent ASIC microcontroller (uC) block. Figure 1: Functional principle

Board mount pressure sensor with ratiometric analog output April 2019 – Rev. 1.0, preliminary Page 5/9 www.analog-micro.com During AMS 691 6’s factory calibration sensor-specific correction coefficients are determined and stored in each sensor’s EEPROM . This permits sensor -specific calibration and correction (i.e. temperature compensation and linearization) of the digitized pressure signal. The temperature signal necessary for temperature compensation is generated at the ASIC’s temperature reference block (TSig) and is transmitted by the multiplexer to the ADC, where it is digitized. The ASIC ’s microcontroller block runs a cyclic program , which continuously calculates the current standardized and corrected digital pressure value using the current digitized pressure and temperature values as well as the stored correction coefficients. Based on the linearized, tempera ture compensated and calibrated digital pressure value calculated by the microcontroller, the 12-bit D/A converter (DAC) block generates a ratiometric analog output voltage signal, which is factory calibrated to 0.5 … 4.5 V at 5 V supply voltage. AMS 6916’s ideal output voltage VOUT rat at pin 1 (OUT) is a linear function of the applied pressure p and the supply voltage VS . It can be calculated by: VOUT rat (p, VS) = ( p - pmin pmax - pmin Therein pmin and pmax are the sensor’s specified minimum and maximum pressure, given by the sensor’s pressure range in Table 1. The applied measurement pressure p is defined by p = p1 - p2 for differential and bi-directional types p = p1 for relative types (with p1 referenced to ambient pressure) p = p2 for absolute and barometric types (with p2 referenced to vacuum) with the definition p1 = pressure at port 1 and p2 = pressure at port 2 of AMS 6915 (for port definition see Figure 3). Furthermore the output at pin 1 (OUT) is short circuit protected against GND and Vs. AMS 6916’s diagnostic function The AMS 6916 series has integrated diagnostic features to ensure that the sensor is working properly. The proof of functionality is done by the signal conditioning ASIC ’s diagnostics block , which is able to detect the following errors: - failures in EEPROM contents (checked after Power On) - failures in the pressure sensing elem ent’s electrical connections (checked during measurement operation) - failures in the sensor’s power or ground connection (Vs or GND loss, check ed during measurement operation). If the diagnostics block detects an error, the output voltage is set to a value in the diagnostic range, with VOUT ≤ 0.025 · Vs or VOUT ≥ 0.975 · Vs.

Board mount pressure sensor with ratiometric analog output April 2019 – Rev. 1.0, preliminary Page 6/9 www.analog-micro.com INITIAL OPERATION AMS 6916 is connected electrically by assembly on a PCB or by mounting it on a suitable socket1. Pins 1 to 3 have to be connected as shown in Figure 2, pins 4 to 8 are not connected internally, so they can be left open or shorted to GND. The pressure connection is established using suitable hoses 2 attached to AMS 691 6’s barbed pressure ports. Depending on the type of sensor and the type of pressure measurement one or two pressure ports have to be connected up to the measuring media / volumes. For the pressures at port 1 and 2 (for port definition see Figure 3) the following requirements have to be fulfilled (according to the definition p1 = pressure at port 1 and p2 = pressure at port 2): for differential pressure types3 (AMS 6916-XXXX-D-…): p1 > p2 for relative / gage pressure types (AMS 6916-XXXX-G-…): p1 > pambient, p1 = measuring pressure for bidirectional differential pressure types (AMS 6916-XXXX-D-B-…): p1 > p2 and p1 < p2 possible for absolute pressure types (AMS 6916-XXXX-A-…): p2 = measuring pressure for barometric pressure types (AMS 6916-XXXX-B-…): p2 = measuring pressure The guidelines on media compatibility have to be taken into account (see "Specification notes", 9) and 10)). Notes: 1. ESD precautions are necessary, it is essential to ground machi nes and personnel properly during assembly and handling of the device 2. For horizontal pressure port configuration Analog Microelectronics recommends a silicone hose tubing with inner diameter Ø = 1.6 mm, outer diameter Ø = 3.2 mm and for vertical pressure port configuration a silicone hose tubing with inner diameter Ø = 2 mm, outer diameter Ø = 6 mm. 3. In general a differential pressure sensor can also be used for relative pressure measurements. In case of positive pressure relative to ambient pressure the me asurement pressure has to be applied to port 1. For negative pressure relative to ambient pressure the measurement pressure is applied to port 2. Figure 2: Principle electrical circuit

Board mount pressure sensor with ratiometric analog output April 2019 – Rev. 1.0, preliminary Page 7/9 www.analog-micro.com DIMENSIONS AND PINOUT Figure 3: AMS 6916 dimensions and pinout

Board mount pressure sensor with ratiometric analog output April 2019 – Rev. 1.0, preliminary Page 8/9 www.analog-micro.com ORDERING CODES Horizontal pressure port configuration (DIL package) Ordering Code mbar kPa PSI Differential pressure types (-D) Bidirectional differential pressure types (-D-B) Absolute pressure types (-A) Barometric (absolute) pressure types (-B) Vertical pressure port configuration (DIL package) Ordering Code mbar kPa PSI Relative (Gage) pressure types (-G)

Board mount pressure sensor with ratiometric analog output April 2019 – Rev. 1.0, preliminary Page 9/9 www.analog-micro.com NOTES Analog Microelectronics GmbH reserves the right to amend any dimensions, technical data or other information contained herein without prior notification.