AMS5612 ANALOGMICRO | Alldatasheet

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Calibrated and temperature compensated pressure sensor Analog Microelectronics GmbH An der Fahrt 13, D – 55124 Mainz March 2015 - Rev. 1.4, preliminary Phone:+49 (0)6131/91 0730 -0 Fax: +49 (0)6131/91 073-30 Internet: www.analogmicro.de E–Mail: info@analogmicro.de

FEATURES

  • Calibrated and temperature compensated pressure sensor, fully analog
  • Differential, gage / relative and absolute versions
  • Standard and low pressure types
  • Unamplfied ratiometric mV-output signal -typ. 25 mV FSO for low pressure types -typ. 40 mV FSO for standard pressure types
  • Constant voltage excitation up to 20 V
  • 0 .. 60 ºC compensated temperature range
  • High performance, stable silicon chip
  • Dual in-line package (DIP)
  • REACH and RoHS compliant TYPICAL APPLICATIONS
  • Industrial control
  • Medical equipment
  • Respiration control
  • Level detection
  • Flow measurement
  • Barometric pressure measurement
  • Vacuum monitoring
  • Heating, Ventilation and Air Conditioning (HVAC) GENERAL DESCRIPTION AMS 5612 is a series of unamplified, laser trimmed pressure sensors with differential, ratiometric mV output signal. They are designed for constant voltage excitation with a supply voltage up to 20 V . All AMS 5612 are calibrated and temperature compensated within a range of 0 .. 60 °C. AMS 5612 comes as a dual in-line package (DIP) for assembly on printed circuit boards (PCBs). The electrical connection is made via the DIP solder pins; pressure is connected via vertical metal tubes. The AMS 5612 series uses micromachined high quality piezoresistive silicon pressure sensor chip s in a ceramic package. The calibration of offset and span as well as temperature compensation is done individually during the manufacturing process by laser trimming of thick film resistors. The fully analog construction of this series enables precision, high speed measurements combined with an excellent long-term stability.

Calibrated and temperature compensated pressure sensor March 2015 - Rev. 1.4, preliminary Pag e 2/6 www.analogmicro.de PRESSURE RANGES Sensor type (code) Pressure type Pressure range in PSI Burst pressure 1) in PSI Pressure range in mbar Burst pressure 1) in bar Low pressure AMS 5612-0003-D AMS 5612-0008-D AMS 5612-0015-D AMS 5612-0030-D AMS 5612-0003-G AMS 5612-0008-G AMS 5612-0015-G AMS 5612-0030-G differential differential differential differential relative / gage relative / gage relative / gage relative / gage 0 .. 0.3 0 .. 0.8 0 .. 1.5 0 … 3 0 .. 0.3 0 .. 0.8 0 .. 1.5 0 .. 3 > 3 > 8 > 15 > 30 > 3 > 8 > 15 > 30 0 .. 20.68 0 .. 55.16 0 .. 103.4 0 .. 206.8 0 .. 20.68 0 .. 55.16 0 .. 103.4 0 .. 206.8 > 0.2 > 0.5 > 1 > 2 > 0.2 > 0.5 > 1 > 2 Standard pressure AMS 5612-0050-D AMS 5612-0150-D AMS 5612-0050-G AMS 5612-0150-G AMS 5612-0150-A differential differential relative / gage relative / gage absolute 0 .. 5 0 .. 15 0 .. 5 0 .. 15 0 .. 15 > 25 > 72 > 25 > 72 > 72 0 .. 344.7 0 .. 1034 0 .. 344.7 0 .. 1034 0 .. 1034 > 1.7 > 5 > 1.7 > 5 > 5 Table 1: AMS 5612 standard pressure ranges (other ranges on request) Notes: 1) Burst pressure is defined as the maximum pressure which can be applied to one pressure port relative to the other port (or while only one pressure port is connected) without causing leaks in the sensor. MAXIMUM RATINGS Parameter Minimum Typical Maximum Units Maximum supply voltage: VS,max Operating and storage temperature: T 1) Common mode pressure: pCM -40 125 175 V PSI Table 2: Maximum ratings Notes: 1) Temperature effects on offset and span are only specified within a temperature range of 0 .. 60 °C. For negative tem- perature the thermal effect on span becomes increasingly nonlinear. 2) Common mode pressure is defined as the maximum p ressure, which can be applied simultaneously on both pressure ports of a differential or relative / gage transmitter without causing damages, while no differential pressure is applied.

Calibrated and temperature compensated pressure sensor March 2015 - Rev. 1.4, preliminary Pag e 3/6 www.analogmicro.de SPECIFICATIONS All parameters apply to VS = 10.0 V and Top = 25 °C, unless otherwise stated. Parameter Minimum Typical Maximum Units Supply voltage (VS) 1) >0 10 20 V Analog output signal 2) @ specified minimum pressure 3) (offset) Full span output (FSO) 4) – low pressure sensors Full span output (FSO) 4) – standard pressure sensors -2.0 24.5 39.5 25.0 40.0 2.0 25.5 40.5 mV mV mV Performance @ T = 25 °C Nonlinearity 5), 6) Repeatability Pressure hysteresis ± 0.05 ± 0.05 ± 0.3 ± 0.2 ± 0.2 %FSO %FSO %FSO Temperature Performance (range T = 0 .. 60 °C) Thermal effect on span 7) Thermal effect on offset 8) Temperature hysteresis ± 1.00 ± 1.00 ± 0.30 %FSO %FSO %FSO Impedance Input Output 4.50 2.00 8.0 2.50 25.0 3.80 kΩ kΩ Position sensitivity 9) (low press. sensors only) < 0.15 %FSO Long-term stability < 1.0 %FSO/a Pressure changes 10 6 Calibrated temperature range 0 60 °C Weight 3 g Media compatibility See “Specification notes” 10), 11) Table 3: Specifications SPECIFICATION NOTES 1) Supply voltage is defined as voltage between pin 4 and pin 2 (see Figure 2). 2) The analog output signal is ratiometric to the s upply voltage. 3) See Table 1 4) The specified Full Span Output (FSO) is the algebr aic difference between the output signal at the spe cified maximum pressure and the output signal at the specified minimum pressure at V S = 10 V. 5) The maximum deviation from the best fit straight line across the specified pressure range. 6) For AMS 5612-0150-G nonlinearity is smaller than 0 .5 %FSO. 7) Thermal effect on span is defined as the maximum deviation from the span value at room temperature measured at any temperature within the compensated temperature range. It is given in %FSO. 8) Thermal effect on offset is defined as the maxim um deviation from the offset value at room temperature measured at any temperature within the compensated temperature range. It is given in %FSO. 9) The position sensitivity is defined as the maxim um change in output due to a change in orientation relative to the Earth's gravitational field, when no pressure difference is applied. 10) Media compatibility of port 1 (see Figure 2): fluids and gases non-corrosive to silicon, Pyrex, RTV silicone rubber. 11) Media compatibility of port 2 (see Figure 2 ): clean, dry gases, non-corrosive to silicon, RTV s ilicone rubber, aluminium, gold (alkaline or acidic liquids can destroy the sensor).

Calibrated and temperature compensated pressure sensor March 2015 - Rev. 1.4, preliminary Pag e 4/6 www.analogmicro.de EQUIVALENT CIRCUIT The equivalent circuit of the AMS 5612 series is shown in Figure 1. INITIAL OPERATION The sensors are connected electrically by mounting them on a PCB. The supply voltage has to be connect ed between pin 4 and pin 2. The differential output voltage is given between pin 3 and pin 1. Important: DO NOT connect to unlabeled pins (pin 5 .. pin 8)! The sensor pressure connection is made using the me tal pressure ports (hose connectors) on top of the ceramic substrate. Depending on the type of sensor and measuring pressure one or two of the pressure ports have to be connected to the measuring media / volume. Port 1 is connected to the back side of the sensor die, port 2 is connected to the top side of the die (for port definitions see Figure 2). Positive pressure is defined as entry on the back side of the die. The output voltage of the sensor is positive, if th e following conditions are fulfilled (according to the definition p1 = pressure at port 1 and p2 = pressure at port 2): Differential sensors p1 > p 2 Gage / relative sensors: p1 = measuring pressure > ambient pressure Absolute sensors p2 = measuring pressure The guidelines governing media compatibility must b e taken into account here (see “Specification notes ”, 10) and 11)). Figure 1: Equivalent circuit

Calibrated and temperature compensated pressure sensor March 2015 - Rev. 1.4, preliminary Pag e 6/6 www.analogmicro.de INFORMATION FOR ORDERING Ordering code: Pressure range: Pressure range code PSI mbar kPa 0003 0.3 20.68 2.068 0008 0.8 55.16 5.516 0015 1.5 103.4 10.34 0030 3.0 206.8 20.68 0050 5.0 344.7 34.47 0150 15 1034 103.4 Table 4: Pressure ranges Pressure type: Pressure type code Available pressure ranges A absolute 0 .. 15 PSI Table 5: Pressure types Analog Microelectronics GmbH reserves the right to amend any dimensions, technical data or other information contained herein without prior notification. AMS 5612-0015-D Model Pressure range Pressure type