AMS ADVANCEDENERGY | Alldatasheet
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©2019 Advanced Energy Industries, Inc. ASCENT AMS DC POWER SUPPLIES STABLE POWER DELIVERY THROUGH EXTREME ARC CONDITIONS FOR HIGHLY REPEATABLE FILMS
2 advancedenergy.com ASCENT AMS Ascent AMS DC Power Supplies As manufacturing techniques advance, new materials and cathode designs pose greater challenges to process stability and film repeatability. Ascent® AMS power supplies deliver stable, repeatable power, regardless of process material or cathode design. Benefits Features High film quality and throughput Reduced film, substrate, and equipment damage Stable throughput and power delivery under extreme arcing conditions Easy integration and control Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets Set Point Compensation™ technology Arc Sync™ technology — main/satellite up to 12 units and 720 kW Ethernet, EtherCAT®, DeviceNet®, Profibus, RS-232/485, Ethernet/IP , and analog communications
the arc responses of connected units. Automatic arc handling eliminates need to adjust arc management parameters. Primary arc response quickly removes power from arcs. Secondary arc response cools surface and quenches secondary arcs. Controlled power recovery minimizes over-shoot and secondary arcs. Low stored energy — less than 0.4 mJ per kW—reduces arc impact on the process. Figure 1. Fast detection, shutdown, and recovery from arc events
4 advancedenergy.com ASCENT AMS Arc-Sync™ Technology For use with multiple-cathode systems, Arc-Sync technology coordinates the arc responses of up to 12 connected Ascent AMS units (up to 720 kW). General Specifications Cathodes Ascent ® AMS Arc-Sync™ Control Main/Satellite Connection Ascent® AMS Main Unit Ascent AMS 30 kW Ascent AMS 40 kW Ascent AMS 60 kW Input Power 400, 440, or 480 VAC (±10%), 50/60 Hz Output Voltage Up to 1000 VDC (1200 V Ignition) Output Current Up to 150 A Min Output Current 1 A at 400 W 2 A at 600 W I/O Communication Ethernet, EtherCAT®, DeviceNet®, Profibus, RS-232/485, EtherNet/IP , and analog communications Weight ~61.5 kg (136 lb) Mounting 48.26 cm (19"), rack mountable, 6U height Cooling Air Temperature 40°C (104°F) max Cooling Water Temperature 35°C (95°F) max
advancedenergy.com 5 ASCENT AMS Set Point Compensation Technology Ascent AMS power supplies feature a patented algorithm that improves power-delivery repeatability and maintains sputter rate by automatically adjusting power output to compensate for arc shutdowns. Paverage 0 kW 35 kW 0 kW 50 µsec0 µsec 50 µsec0 µsec 15 sec 30 sec 45 sec 1 min 30 kW With SPC Without SPC Power Delivery Over Time Instantaneous Power WITHOUT SPC Instantaneous Power WITH SPC Power On Arc extinguish time
For international contact information, visit advancedenergy .com. sales.support@aei.com +1 970 221 0108 ABOUT ADVANCED ENERGY Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical thermal processes. With deep applications know-how and responsive service and support across the globe, AE builds collaborative partnerships to meet rapid technological developments, propel growth for its customers and power the future of technology. Specifications are subject to change without notice. Not responsible for errors or omissions. ©2023 Advanced Energy Industries, Inc. All rights reserved. Advanced Energy®, AE®, Arc-Sync™, Ascent®, and Set Point Compensation™ are U.S. trademarks of Advanced Energy Industries, Inc. ENG-AscentAMS-235-02 10.23