AE0505D44H40DF

AE0203D04DF NEC | Alldatasheet

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• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 For inquiry, Please call Sales Promotion Department (Japan) Phone: +81-3-3515-9220 Fax: +81-3-3515-9223 http://www.nec-tokin.comhttp://www.nec-tokin.com 2nd Sales Unit Chiyoda First Bldg., 8-1, Nishi-Kanda 3-chome,Chiyoda-ku, Tokyo 101-8362, Japan 1st Overseas Sales Dept. Phone: +81-3-3515-9222 Fax: +81-3-3515-9223 2nd Overseas Sales Dept. Phone: +81-3-3515-9224 Fax: +81-3-3515-9223 3rd Overseas Sales Dept. Phone: +81-3-3515-9228 Fax: +81-3-3515-9223 NEC TOKIN Korea Co.,Ltd. 518, Korea City AIR-Terminal B/D, 159-6, Samsung-dong, Kangnam-gu, Seoul 135-728, Korea Phone: +82-2-551-3651 Fax: +82-2-551-3650 NEC TOKIN America Inc. (Headquarters & Western Area Sales) 2460 North First Street,Suite 220,San Jose,California 95131, U.S.A. Phone: +1-408-324-1790 Fax: +1-408-324-1497 Chicago Branch (Northeast Sales Office) 1600 Golf Road, Corporate Center, Suite 1228, Rolling Meadows, Illinois 60008, U.S.A. Phone: +1-847-981-5047 Fax: +1-847-981-5051 Austin Branch (Southeast Sales Office) 11782 Jollyville Road, Suite 208, Austin, Texas 78759, U.S.A. Phone: +1-512-219-4040 Fax: +1-512-219-4007 NEC TOKIN Hong Kong Ltd. Unit Nos. 1512-1517, Level 15, Tower ᶘ, Grand Central Plaza, 138 Shatin Rural Committee Road, Shatin, New Territories, Hong Kong Phone: +852-2730-0028 Fax: +852-2375-2508 NEC TOKIN Shanghai Co.,Ltd. Room 301-302, Metro Plaza, No.555 Loushanguan Road, Changning District, Shanghai, China 200051 Phone: +86-21-6228-0606 Fax: +86-21-6228-6862 NEC TOKIN Singapore Pte Ltd.

180 Cecil Street, #14-02/03 Bangkok Bank Building, Singapore 069546

Phone: +65-6223-7076 Fax: +65-6223-6093 NEC TOKIN Taiwan Co.,Ltd. Room 411,4F, No.9, Lane 3, Minsheng W.Road, Taipei 104, Taiwan Phone: +886-2-2521-3998 Fax: +886-2-2521-3993 NEC TOKIN Europe GmbH Hellersbergstrasse 14, D-41460 Neuss, Germany Phone: +49-2131-1866-0 Fax: +49-2131-1866-18 Munich Office Sigmund-Riefler-Bogen 8, D-81829 Muenchen, Germany France Branch 9, Rue Paul Dautier, 78142 Velizy-Villacoublay, France Phone: +33-1-39-452011 Fax: +33-1-39-451209 Sweden Representative Office Solkraftsvaegen 25, 13570 Stockholm, Sweden ©NEC TOKIN Corporation 2011 Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 PRECAUTIONS TO BE TAKEN WHEN USING MULTILAYER PIEZOELECTRIC ACTUATORS ʢPlease read these precautions before using our productsʣ 1. Before using our products or designing a system using our products, read the precautions and specifications ʢsuch as level of qualityʣ for the products you intend to use on the last page of this manual. 2. The main failures with multilayer piezoelectric actuators are deterioration of insulation resistance, short-circuit, and open-circuit. Before using the products, design systems carefully to ensure redundancy, prevention of the spread of fire, and prevention of faulty operation allowing for the occurrence of failures. 3. Use the products after checking the working conditions and rated performance of each of the multilayer piezoelectric actuator series. Selection of AE series ʢa resin-coated typeʣ or ASB, ASL and AHB series ʢa metal-sealed typeʣ should be based on the intended working temperature and humidity.

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 NEC TOKINʼs multilayer piezoelectric actuators are available in four series. Resin-coated type General-purpose Metal case type High-performance General-purpose 85ˆ rated AE series 85ˆ rated ASB series 150ˆ rated ASL series High displacement model AHB series * AE series is resin-coated products. Therefore we recommend using metal case type, ASB, ASL and AHB series in high humidity condition. *For detail information of piezoelectric ceramic material, please refer to a catalogue of “Piezoelectric ceramics”. NEC TOKINʼs multilayer piezoelectric actuators are designed using unique element structure technology and using ceramic materials with high electrostrictive factors developed by NEC TOKIN.

Features

□ Special ceramics developed by NEC TOKIN are used in piezoelectric ceramic elements. □ As compared with conventional actuator elements, NEC TOKINʼs multilayer piezoelectric actuators have advantages as follows. ■ Advantages over electromagnetic actuators ⃝Faster response ⃝High resolution for positioning ⃝Large generated force ⃝Low power consumption ⃝No electromagnetic noise ■ Advantages over bimorph piezoelectric actuators ⃝ High energy conversion efficiency （around 7 times the energy conversion efficiency of the bimorph type actuator）, and low power consumption ⃝Large generated force ⃝ Stable displacement, and reduced shift and creep phenomena ⃝ Response speed （more than 100 times the response speed of the bimorph piezoelectric actuator） ■ Advantages over stacked piezoelectric actuators ⃝ Compact size （less than 1/10 the specific volume of the stacked piezoelectric actuator） ⃝Low drive voltage, and ease of use ⃝Inexpensive Structure of NEC TOKINʼs Multilayer Piezoelectric Actuato Insulator Internal electrode Direction of displacement External electrode Ceramic 4 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Resin coated type multilayer piezoelectric actuators Outline Multilayer piezoelectric actuators are ceramic elements for converting electrical energy into mechanical energy such as displacement or force by utilizing the piezoelectric longitudinal effect. NEC TOKIN's multilayer piezoelectric actuators are produced based on our unique element structure design and using originally developed piezoelectric ceramic materials with high electrostrictive factors. Compared to conventional piezoelectric actuators, they are smaller in size but can generate higher displacement and force at low voltages. Especially, the resin-coated AE series actuators feature compact size and wide variety in shape for applications such as ultra-fine positioning mechanisms and drive sources.

Applications

Auto focusing of cell phone camera, Image stabilization of DSC, Positioning, Motors, Pumps, Valves, Vibration source, Vibration controls, Sensors, Mirror / Prism positioning, Manipulators, AFM, Printer, etc ⃝Large generated force: 3,500 N/cm （typ.） ⃝ High-speed response: Driving up to about 1/3 of self- resonant frequency （in several ten kHz） is possible. ⃝Accurate positioning: Controllable in nm order. ⃝ Low power consumption: Can be retained at the leakage current state （100μA or less）. ⃝ Very small size: 1/10 or smaller than conventional multilayer actuators （specific volume） Numbering system AE Series AE 0505 D16 XXX FExample: *Compliant to RoHS directive in effect as of April, 2011 Example: H40ʹOverall length is 40mm DʹThin coating type Indicated by two digits in micrometersʦЖmʧ in succession to D Example: D16ʹ16Жm Unit: Millimetersʦmmʧ Example: 0505ʹ5 mmʷ5 mm *Coating area is not include. AEʹResin-coated type Comply with RoHS Additional codeʢoptionalʣ Nominal displacement: Ceramic cross section: Series name: Multilayer Piezoelectric Actuators Vol.06 5

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Standard Parts List Performance Model DisplacementʦЖmʧ Overall length ʦmmʧ Generated force ʦNʧ Stiffness ʦN/umʧ Resonance frequency ʦkHzʧ Capacitance ʦЖFʧ Insulation resistance ʦMЊʧ Maximum driving voltage ʦ150VDCʧ AE0203D04F 4.6±1.5 5 200 43.5 261 0.09 100 AE0203D04DF AE0203D08F 9.1±1.5 10 200 22.0 138 0.18 100 AE0203D08DF AE0203D16F 17.4±2.0 20 200 11.5 69 0.35 50 AE0203D16DF AE0203D44H40F 42.0±6.6 40 200 4.8 34 0.82 20 AE0203D44H40DF AE0505D08F 9.1±1.5 10 850 93.4 138 0.75 50 AE0505D0 8DF AE0505D16F 17.4±2.0 20 850 48.9 69 1.4 10 AE0505D16DF AE0505D44H40F 42.0±6.6 40 850 20.2 34 3.4 5 AE0505D44H40DF AE1010D16F 18.4±3.5 20 3,500 190.2 69 5.4 5 AE1010D16DF AE1010D44H40F 42.0±6.6 40 3,500 83.3 34 13.6 2 AE1010D44H40DF AE1414D16F 18.4±3.5 20 7,000 380.4 69 10.8 2 *Tow coating types are available. AE＊＊＊＊D＊＊DF has thinner coating thickness. *For detail information of measurement conditio ns and outer dimension, please refer to “Performance” and “Outer Dimension” sections. Item Standard Conditions Operating temperature range ー25 to ＋85℃ When applied with a DC voltage: Ambient temperature When driven by an AC voltage: Ambient temperature + Temperature rise due to generated heat Recommended Storage condition ー5 to ＋40℃/ less than 40%R.H Recommend storage at room temperature. No condensation. Maximum driving voltage 150VDC Displacement See the standard parts list At 150VDC Generated force ʢcompression resistanceʣ See the standard parts list The force required for restricting the displacement to 0 when the maximum driving voltage is applied. Capacitance See the standard parts list f＝1kHz, V＝1VrmsCapacitance allowance ＋/ー20 % Dissipation factor 5% or less Insulation resistance See the standard parts list Value obtained in 1 minute at 150 VDC Resonance frequency See the standard parts list With both ends of element in free state Typical value of the element under our test conditions Tensile strength 1/10 of generated force Typical value of the element under our test conditions Young's modulus 4.4×10 N/m Typical value of the element under our test conditions Temperature cycle test Displacement: Initial value ±20% Capacitance: Initial value ±30% tanδ: Less than initial rated value Insulation resist ance: 1MΩ or more Appearance: No noticeable defect Room temperature （3 min） –25℃ （30 min.） Room temperature （3 min） +85℃ （30 min） Repetition of 10 cycles of the above 6 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Outer Dimensions Note: Factory-shipped polarization : Red lead wire＝（＋）, White lead wire ＝（－） Above drawings do not include dimension of wire connection area and diameter of the wire. Please contact us for details. H Direction of displacement ʢʴʣ ʢʵʣ H ʢʴʣ ʢʵʣ Direction of displacement Unit：mm Model T1 W1 H T2 W2 L AE0203D04F 2±0.1 3±0.1 5±0.1 3.5Max. 4.5Max. 100 AE0203D04DF 2.4Max. 3.4Max. AE0203D08F 2±0.1 3±0.1 10±0.1 3.5Max. 4.5Max. 100 AE0203D08DF 2.4Max. 3.4Max. AE0203D16F 2±0.1 3±0.1 20±0.1 3.5Max. 4.5Max. 100 AE0203D16DF 2.4Max. 3.4Max. AE0203D44H40F 2±0.1 3±0.1 40±0.1 3.5Max. 4.5Max. 100 AE0203D44H40DF 2.4Max. 3.4Max. AE0505D08F 5±0.1 5±0.1 10±0.1 6.5Max. 6.5Max. 100 AE0505D08DF 5.4Max. 5.4Max. AE0505D16F 5±0.1 5±0.1 20±0.1 6.5Max. 6.5Max. 100 AE0505D16DF 5.4Max. 5.4Max. AE0505D44H40F 5±0.1 5±0.1 40±0.1 6.5Max. 6.5Max. 100 AE0505D44H40DF 5.4Max. 5.4Max. AE1010D16F 11.5Max. 11.5Max. 100 AE1010D16DF 10.4Max. 10.4Max. AE1010D44H40F 11.5Max. 11.5Max. 100 AE1010D44H40DF 10.4Max. 10.4Max. *L＝Length of lead wire Overall length 5,10 and 20mm Products Overall length 40mm Product Multilayer Piezoelectric Actuators Vol.06 7

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Lead wire: Copper wire with Tin plating Coating: PTFE （Polytetrafluoroethylene） Unit：mm Model Number Пd ПD L AWG UL number AE0203D04F 0.3 0.5 100 32 1993 AE0203D04DF AE0203D08F 0.3 0.5 100 32 1993 AE0203D08DF AE0203D16F 0.3 0.5 100 32 1993 AE0203D16DF AE0203D44H40F 0.3 0.5 100 32 1993 AE0203D44H40DF AE0505D08F 0.3 0.5 100 32 1993 AE0505D08DF AE0505D16F 0.5 0.8 100 26 1371 AE0505D16DF AE0505D44H40F 0.5 0.8 100 26 1371 AE0505D44H40DF AE1010D16F 0.5 0.8 100 26 1371 AE1010D16DF AE1010D44H40F 0.5 0.8 100 26 1371 AE1010D44H40DF AE1414D16F 0.5 0.8 100 26 1371 AE25 25D15F 0.5 0.8 100 26 1371 L Пd Пd =Diameter of lead wire ПD =Outer diameter including the thickness of coating L =Length of lead wire ПD Wire diameter Special Design Parts Non-standard parts are available per order basis. Please use the guideline below as reference regarding generated displacement and generated force. Displacement: Roughly proportional to the element length Generated force: Roughly proportional to the sectional area of the element Shape: Product cross-section: 1mm×1mm square or larger Product length: 1mm or longer Can be provided in cylindrical ring or other shapes. Please contact us for further details. Example of special design parts AL1.65ʷ1.65ʷ5DF AE1.65ʷ1.65ʷ5DF Condition Ceramic Dimension 1.65×1.65×5mm 1.65×1.65×5mm Maximum Operating VoltageʢVʣ ±10V 150VDC Displacement （300nmp-p） （4μm） At maximum operating voltage CapacitanceʢnFʣ 90 43 f=1kHz, V=1Vrms Operating Temperature －25～+85℃ Small size piezo actuator 8 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Characteristic Data 0 50 100 150 Voltage ʢVʣ Fig-1 Voltage vs. Displacement Fig-2 Generated force vs. Displacement of AE0505D16F in Driving voltage DisplacementʢЖmʣ DisplacementʢЖmʣ AE0505D44H40 AE0505D16 AE0505D08 AE0203D04 0 200 400 600 800 1000 Generated force ʢNʣ DisplacementʢЖmʣ 150V 100V 50V Generated force 10008006004002000 Generated forceʢNʣ DisplacementʢЖmʣ 20000100000 Generated forceʢNʣ Fig-3 Generated force vs. Displacement-1 Fig-4 Generated force vs. Displacement-2 Fig-5 Temperature vs. Displacement AE0505D44H40F AE0505D16F AE0505D08F AE0203D44H40F ᶃ ᶄ ᶅ ᶃɿAE0203D04F ᶄɿAE0203D08F ᶅɿAE0203D16F Driving voltage: 150VDC Driving voltage: 150VDC AE2525D15F AE1010D44H40F ᶆ ᶇ ᶆɿAE1010D16F ᶇɿAE1414D16F ʵ40 ʵ20 0 20 40 60 80 100 Temperatureʢˆʣ DisplacementʢЖ̼ʣ AE0505D44H40 AE0505D16 AE0505D08 AE0203D04 Driving voltage: 150VDC * Listed data are reference values. For the voltage vs. displacement characteristic, the same length of piezo series shows the same voltage vs. displacement characteristic. * Definition of generated force for Fig-2, Fig-3 and Fig-4; Force is the force required for restricting the displacement to 0 when the maximum driving voltage is applied. Multilayer Piezoelectric Actuators Vol.06 9

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Fig-7 Voltage vs. Displacement in time Fig-8 Heat generation vs. Drive frequency-1 DisplacementʢЖmʣ Ambient Temperatureɿ23ˆ Voltage Modelɿ AE0505D16F ʵ20 ʵ20 0 20 40 60 80 100 100 120 140 160 Timeʢsecʣ Voltageʢ̫ʣ Driving signal waveform: Sine wave (150Vp-p) Modelɿ AE0505D16F 1 kHz 500 Hz 100 Hz 50 Hz 200 Hz 0 100 200 300 Heat generation ɹTʢˆʣ Heat generation ɹTʢˆʣ Timeʢsecʣ 100 10 100 1000 Model: AE0505D16F Temperature measurementɿ 5 minutes later from operation 40 V 100 V 150 V 20 V 50 V 75 V Driving frequency ʢHzʣ Fig-9 Heat generation vs. Drive frequency-2 Peak voltage DC bias Symbol Fig-6 Temperature vs. Displacement ʵ40 ʵ20 0 20 40 60 80 100 Temperature ʢˆʣ ʵ20 ʵ10 Displacement ʢЖ̼ʣ ᷎L0 ᷎L150 ᷎L150ʵ᷎L0VoltageʢVʣ DisplacementʢЖmʣ ᷎L0 ᷎L150 ᷎L150ʵ᷎L0 AE0505D16 ʢ5ʷ5ʷ20mmʣ 750 150 10 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Metal sealed type multilayer piezoelectric actuators Outline Multilayer piezoelectric actuators convert electrical energy into mechanical energy such as displacement or force by making use of the piezoelectric longitudinal effect. NEC TOKINʼs multilayer piezoelectric actuators are produced based on our unique element structure design by making use of originally developed piezoelectric ceramic materials with high electrostrictive factors. Compared to conventional piezoelectric actuators, they are smaller in size but can generate higher displacements and forces at low voltages. Especially, the metal sealed ASB/ASL and AHB series actuators are much less influenced by ambient humidity because of insulation from the atmosphere. As a result, long service life and high performance never experienced in the past have been attained to allow use in various applications such as semiconductor device production equipment and optical communication equipment which require high reliability.

Fine adjustment of various X-Y tables steppers, Mirror/prism positioning, Linear motors, Fluid flow control valve drive, Vibration source, Manipulators, etc. ASB Series ʢ85˚C ratedʣ, ASL series ʢ150˚C ratedʣ, AHB series ʢHigh displacement modelʣ ⃝ High reliability: Realization of MTTF＝36,000 hours （at 85℃ and 100 V） ⃝ Easier installation into equipments thanks to the built-in pre-load mechanism and mounting attachment ⃝Minimum mechanical abrasion ⃝Large generated force: 800 N ⃝Accurate positioning: Controllable in nm order Numbering system AS B 170 C 801 N P 0 LFExample: *Compliant to RoHS directive in effect as of April 2011 Sequentially numbered starting from 0 PʹPlane, DʹV groove ʢRefer to page 14 for detail.ʣ NʹFemale thread type FʹFlange type ʢrefer to page 12 for detailsʣ WʹWithout a flange Unit: Newton ʦNʧ The first two digits are effective numerals. The last digit is an exponent of 10. Example: 801ʹ800 Nʹ80 kgf Cʹ150 VDC Unit: Micrometers ʢЖmʣ The first two digits are effective numerals. The last digit is an exponent of 10. Example: 170ʹ17Жm BʹBellows ʢpre-loadʣ, maximum operating temperature: 85ˆ LʹBellows ʢpre-loadʣ, maximum operating temperature: 150ˆ ASʹEncapsulated in metal case AHʹEncapsulated in metal case ʢHigh displacement modelʣ Comply with RoHS New design No. Configuration of drive block Configuration of mount Generated force Maximum drive voltage Nominal displacement Construction of housing and operating temperature range Series name Multilayer Piezoelectric Actuators Vol.06 11

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Standard Parts List ◦ASB series Model DisplacementʦЖmʧ Generated force ʦNʧ Resonance frequency ʦkHzʧ Capacitance ʦЖFʧ Insulation resistance ʦMЊʧ Maximum driving voltage ʦ150VDCʧ ASB170C801˙˔0LF 17.0±3 800 14 1.5 30 ASB170C801W˔1-A0LF ASB340C801˙˔0LF 34.0±6 800 12 3.0 15 ASB340C801W˔1-A0LF ASB510C801˙˔0LF 51.0±9 800 10 4.5 10 ASB510C801W˔1-A0LF ASB680C801˙˔0LF 68.0±12 800 8 6.0 5 ASB680C801W˔1-A0LF ASB170C201WP1-A0LF 20.0±3 200 37 0.5 100 *Note: ■ in model number has “N” or “F” letter.
• in model number has “P” or “D” letter. Example） ASB170C801NP0LF, ASB510C801WD1-A0LF *Model number, ASB＊＊＊C801W●1-A1LF is the model without a flange. *For detail information of measurement conditions and outer dimension, please refer to “Performance” and “Outer Dimension” sections. ◦ASL series Model DisplacementʦЖmʧ Generated force ʦNʧ Resonance frequency ʦkHzʧ Capacitance ʦЖFʧ Insulation resistance ʦMЊʧ Maximum driving voltage ʦ150VDCʧ ASL170C801˙˔0LF 19.0±3 800 14 1.34 30 ASL340C801˙˔0LF 39.0±6 800 12 2.55 15 ASL510C801˙˔0LF 58.0±9 800 10 3.84 10 ASL680C801˙˔0LF 77.0±12 800 8 5.07 5 *Note: ■ in model number has “N” or “F” letter.
• in model number has “P” or “D” letter. Example） ASL170C801FP0LF *No flange type is also available for ASL-series. Please contact us for detail. ◦AHB series Model DisplacementʦЖmʧ Generated force ʦNʧ Resonance frequency ʦkHzʧ Capacitance ʦЖFʧ Insulation resistance ʦMЊʧ Maximum driving voltage ʦ150VDCʧ AHB550C801˙˔0LF 55.0±8 800 12 6.4 10 AHB700C801˙˔0LF 70.0±15 800 8 8.2 5 AHB800C801˙˔0LF 80.0±15 800 8 9.3 5 AHB800C302WD1-A0LF 80.0±15 3000 8 37.0 2 *Note: ■ in model number has “N” or “F” letter.
• in model number has “P” or “D” letter. Example） AHB800C801NP0LF *No flange type is also available for AHB-series. Please contact us for detail. *For detail information of measurement conditions and outer dimension, please refer to “Performance” and “Outer Dimension” sections. Flange type No flange type Product appearance example 12 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Performance Item Standard Conditions Operating temperature range ASB/AHB : ー25 to ＋85℃ ASL : ー40 to ＋150℃ When applied with DC voltage: Ambient temperature When driven by pulse: Ambient temperature + Temperature rise due to generated heat Recommended Storage condition ー5 to ＋40℃ Maximum driving voltage 150VDC Displacement See the standard parts list At 150VDC Generated force ʢcompression resistanceʣ See the standard parts list The force required for restricting the displacement to 0 when the maximum driving voltage is applied. Capacitance See the standard parts list f＝1kHz, V＝1VrmsCapacitance tolerance ＋/ー20% Dissipation factor 5% or less Insulation resistance See the standard parts list Value obtained in 1 minute at 150 VDC Resonance frequency See the standard parts list With both ends of element in free state Typical value of the element under our test conditions Airtightness 1×10 atm cc/sec or less Temperature cycle test Displacement: Initial value ±30% Capacitance: Initial value ±30% tanδ: Less than initial rated value Insulation resistance: 1 MΩ or more Appearance: No noticeable defect ASB, AHB ASL Room temperature （3 min） Room temperature （3 min） Room temperature （3 min） Room temperature （3 min） ＋85℃ Repetition of 10 cycles of the above High-temperature shelf test Displacement: Initial value ±30% Capacitance: Initial value ±30% tanδ: Less than initial rated value Insulation resistance: 1 MΩ or more Appearance: No noticeable defect Temperature ASB, AHB: 85±2℃ ASL: 150±2℃ Time 1,000±48 h Solvent resistance test Displacement: Initial value ±30% Capacitance: Initial value ±30% tanδ: Le ss than initial rated value Insulation resistance: 1 MΩ or more Appearance: No noticeable defect Mark: Easily legible Solvent: Isopropyl alcohol Temperature: 23±5℃ Time: Immersion for 1 min Heat resistance test Displacement: Initial value ±30% Capacitance: Initial value ±30% tanδ: Less than initial rated value Insulation resistance: 1 MΩ or more Appearance: No noticeable defect Mark: Easily legible Temperature: 150±3℃ Time: 96±4 h Multilayer Piezoelectric Actuators Vol.06 13

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Dimensions ʢCommon to ASB, ASL and AHB Seriesʣ
• Female thread type
• Flange type Enlarged of section A P type TOP VIEW BOTTOM VIEW [mm] Section A П19.6ʶ0.5 П11.5ʶ0.5 M4 screw of min. 3 deep ˎLead wire: AWG26, UL1371 Red color: ʢʴʣ White color: ʢʵʣ Prepared hole of max. 5 deep 19ʶ0.5 9ʶ0.2 2.5ʶ0.2 130ʶ10 Lʶ0.5 D type П2.2 90˃ Direction of displacement [mm] Section A П35ʶ0.5 П11.5ʶ0.5 4ʵП3.5 TOP VIEW BOTTOM VIEW 45˃ 45˃ 130ʶ10 Lʶ0.5 P.C.D.28 13.0ʶ0.5 3.0ʶ0.2 2.5ʶ0.2 Direction of displacement Enlarged of section A P type ˎLead wire: AWG26, UL1371 Red color: ʢʴʣ White color:ʢʵʣ D type П2.2 90˃ Model Lʢmmʣ ASB170C801NP0LF 38.4 ASL170C801NP0LF ASB340C801NP0LF 58.4 ASL340C801NP0LF ASB510C801NP0LF 78.4 ASL510C801NP0LF ASB680C801NP0LF 98.4 ASL680C801NP0LF Model Lʢmmʣ AHB550C801NP0LF 58.4 AHB700C801NP0LF 78.4 AHB800C801NP0LF 78.4 ＊ Both P type and D type have the same overall lengths Model Lʢmmʣ ASB170C801FP0LF 32.4 ASL170C801FP0LF ASB340C801FP0LF 52.4 ASL340C801FP0LF ASB510C801FP0LF 72.4 ASL510C801FP0LF ASB680C801FP0LF 92.4 ASL680C801FP0LF Model Lʢmmʣ AHB550C801FP0LF 52.4 AHB700C801FP0LF 72.4 AHB800C801FP0LF 72.4 ＊ Both P type and D type have the same overall lengths 14 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2
• Without flange type
• ASB170C201WP1-A0LF ●AHB800C302WD1-A0LF Enlarged of section A P type TOP VIEW BOTTOM VIEW [mm] П11.5ʶ0.5 ˎLead wire: AWG26, UL1371 Red color: ʢʴʣ White color: ʢʵʣ D type П2.2 90˃ Lʶ0.5 1.5ʶ0.2 100ʶ5 11.2ʶ0.2 13ʶ0.5 7.2ʶ0.2 5ʶ1 Section A [mm] 24.5ʶ0.5 Lʹ100ʶ0.5 5ʶ1 ʢ2.6ʣ 2.0ʶ0.1 5.9ʶ0.1 MAX6.5 MAX8.2 6.6 Lead wire Lead wire ʵ0.1 ʢ0.3ʣ ʢ0.5ʣ CO. 2ʶ0.1 TOP VIEW ˎLead wire: AWG32, UL1993 Red color: ʢʴʣ White color: ʢʵʣ TOP VIEW BOTTOM VIEW П20.0ʶ0.3 CO.5 Enlarged of section A Section A 65ʶ0.5100ʶ5 5ʶ1 21.6ʶ0.1 1.5ʶ0.119.5ʶ0.1 Lead wire (L=100)Lead wire (L=100) 12.7ʶ0.1 ʢ0.5ʣ ʢ0.8ʣ П20.0ʶ0.3 ʶ 90˃ П3.6ʶ0.1 ˎLead wire: AWG26, UL1371 Red color: ʢʴʣ White color: ʢʵʣ [mm] Model Lʢmmʣ ASB170C801W˔1-A0LF 24.4 ASL170C801W˔1-A0LF ASB340C801W˔1-A0LF 44.4 ASL340C801W˔1-A0LF ASB510C801W˔1-A0LF 64.4 ASL510C801W˔1-A0LF ASB680C801W˔1-A0LF 84.4 ASL680C801W˔1-A0LF Model Lʢmmʣ AHB550C801W˔1-A0LF 44.4 AHB700C801W˔1-A0LF 64.4 AHB800C801W˔1-A0LF 64.4 ＊Note: ● in model number has “P” or “D” letter. Example） AHB800C801NP0LF. Multilayer Piezoelectric Actuators Vol.06 15

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Example of fixing method for without flange type ◦ASB series Characteristic Data 0 50 0 50 106 107 108 109 1010 5–25 –15 –5 105 12525 6545 85100 150 –20 0 20 40 60 80 100 1000100 150 0 200 400 600 800 ASB170C801*P0 ASB340C801*P0 ASB510C801*P0 ASB510C801*P0 ASB170C801*P0 ASB170C801*P0 ASB170C801*P0 ASB340C801*P0 ASB510C801*P0 ASB340C801*P0 ASB340C801*P0 ASB170C801*P0 ASB170C801*P0 ASB510C801 *P0 ASB680C801*P0 ASB680C801*P0 ASB340C801*P0 ASB510C801*P0 ASB510C801*P0 DC bias voltageʢVʣ Drive frequencyʢHzʣ Temperatureʢˆʣ Temperatureʢˆʣ DC voltageʢVʣ Generated forceʢNʣ Displacement (Жm) Displacement (Жm) Displacement (Жm) Displacement (Жm) Capacitance (ЖF) Insulation resistance (Њ) Applied voltage 150VDC Applied voltage 150VDC Measured voltage : 150VDC Measured frequency : 1kHz Crest value of voltage 150V (SIN waveform) DC bias : 75V Fig-10 Voltage vs. Displacement Fig-12 Drive frequency vs. DisplacementFig-11 Compression load vs. Displacement Fig-13 Temperature vs. Displacement Fig-14 DC bias vs. Capacitance Fig-15 Temperature vs. Insulation resistance The base of the actuator should be settled to pedestal. Keep caution on the electrical insulation for the lead wire.Lead wire Metal sealed actuator (Without flange type) 16 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 ◦AHB series -40 -20 0 20 40 60 80 100 120 140 160 Temperatureʢˆʣ DisplacementʢЖmʣ ASL510C801* ASB510C801* Fig-16 Temperature vs. Displacement Fig-17 Temperature vs. Capacitance ASB Type ASL Type 2500 2000 1500 1000 500 -40 -20 0 20 40 60 80 100 120 140 160 CapacitanceʢnFʣ Temperatureʢˆʣ SAMPLE:5ʷ5ʷ20mm DisplacementʢЖmʣSurface temperatureʢˆʣ 0 100 200 300 Driving frequencyʢHzʣ Fig-20 Heat generation vs. Drive frequency Driving waveform: SIN wave 0~Vp-p Temperature measurementɿ 10 minutes after the device is in operation 400 500 600 0 50 100 150 100 DC VoltageʢVʣ Fig-18 Voltage vs. Displacement 0 200 400 600 800 1000 100 Generated ForceʢNʣ Fig-19 Compression load vs. Displacement DisplacementʢЖmʣ AHB800C801 AHB700C801 AHB550C801 AHB800C801 AHB550C801 AHB700C801 Voltage: 150VDC 0ʙ150Vp-p 0ʙ100Vp-p 0ʙ50Vp-p Model: AHB800C801NP0LF ◦ASL series performance compare with ASB series Multilayer Piezoelectric Actuators Vol.06 17

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Application Example Semiconductor manufacturing system Positioning of stepper, Clamping actuator of wire bonding, Valve actuation of mass flow controller, Actuator of shaker, Actuator of damping system, Positioning of light source. Precision machinery, Mechatronics Sewing machine, Robot, Vibration of parts feeder, Positioning of equipment, Pressure sensor Home appliance, Audio equipment Actuator of pump, Speaker Imaging equipment Actuator of resolution improvement, Actuator of autofocusing, Actuator of damping Computer, OA equipment Pressure sensor, Positing of memory device （data storage or others） Optical equipment Positioning of stage, Actuator of autofocusing, Actuator of shaker and damping system Communications Polarization control, Wavelength control Medical equipment Micropump, Ultrasonic transducer Measuring instrument Pressure sensor, Acceleration sensor, Fine positioning Automobile Vibration control 18 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Majority of failure mode of multilayer piezoelectric actuators is the short circuit due to degraded insulation. Though the cause of degradation of insulation has not been clarified perfectly, it has been found that the failure rate varies greatly between statistic uses （DC voltage application） and dynamic uses （pulse voltage application）. Like other electrical components, piezo actuators can be influenced by humidity as well as applied voltage and ambient temperature. NEC TOKIN has added the metal sealed type piezo actuators featuring high reliability by eliminating influence of the ambient atmosphere. This section describes reliability guidelines for static and dynamic usages of the resin-coated and metal sealed types actuators. Reliability of our multilayer piezoelectric actuators is represented by MTTF （mean time to failure） in case of static usage. Though the number of repetitions is considered to be used to represent the reliability in the case of dynamic usage, the accurate relationship between the indicator and cause has not been determined because of various influential causes and the mutual action between them. For the present, therefore, only the obtained data and our concept are described. ʢ1ʣ Resin-coated Type ʢAE Seriesʣ a. DC voltage application The acceleration factors have been obtained empirically for each of the drive voltage, ambient temperature and relative humidity based on many experimental result. The MTTFr in actual applications is estimated using equation （1） below with MTTFs observed under accelerated condition as the reference value. Reliability MTTFr=MTTFsʷAvʷAhʷAt • • • (1) [Example] The following calculation is made for the case of use at 25ˆ, 60% RH and 100 V: MTTFr : Estimated value MTTFs : Reference value (=500h) Av : Acceleration factor for drive voltage= Ah : Acceleration factor for relative humidity= At : Acceleration factor for ambient temperature=1.5 MTTFr =500ʷ ʷ ʷ1.5 =500ʷ3.66ʷ7.29ʷ1.84 24,500h (2.8years) Vr 150 3.2 Hr 4.9 100 150 3.2 4.9 40–Tr 40–25 Vr : Actual voltage (V) Hr : Actual relative humidity (RH%) Tr : Actual ambient temperature(ˆ) b. Pulse voltage application When this element is driven by a pulse voltage, temperature rises as a result of heating due to dielectric loss of ceramics. Therefore, the element is not likely to be influenced by the humidity, thus extending the service life greatly. Since this effect is affected by the element shape, pulse waveform and frequency, it cannot be calculated by an equation as in the case of DC voltage application. In NEC TOKINʼs testing on the AE0203D08, there was no failure confirmed after 0-150 V rectangular pulse wave was applied with 500 Hz for 500 hours （equivalent to 900 million pulses were applied） . Please pay attention to the physical damage due to ringing phenomenon caused by the fixed method of the element and the speed of the voltage rise. Please refer to the separately printed literature, “ NEC TOKIN Multilayer Piezoelectric Actuators Userʼs Manual” for more detail. Multilayer Piezoelectric Actuators Vol.06 19

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 ʢ2ʣ Metal Sealed Type ʢASB, ASL and AHB Seriesʣ a. DC voltage application MTTFr of the metal sealed type under the actual operating conditions is calculated/estimated from the reference MTTFs and the acceleration factor as in the case of the resin-coated type. However since the internal element is sealed from the atmosphere, it is not influenced by the atmospheric humidity. Therefore, equation （2） below is used. MTTFr =MTTFsʷAvʷAt • • • (2) [Example] The following calculation is made for use at 25(c and 150 V: MTTFr : Estimated value MTTFs : Reference value (=36,000h) Av : Acceleration factor for drive voltage= At :Acceleration factor for ambient temperature=1.5 MTTFr=36,000ʷ ʷ1.5 =36,000ʷ0.44ʷ11.3 179,000h (20.4years) Vr 100 150 100 85–Tr 85–25 Vr : Actual operating voltage (V) Tr : Actual operating temperature (ˆ) b. Pulse voltage application Like the resin-coated type, it is extremely difficult to estimate reliability by using an equation in the metal sealed type because of the influence of the pulse waveform, frequency, etc. in addition to the voltage and ambient temperature. In NEC TOKINʼs testing on the ASB170C801NP0, there was no failure confirmed up to 1000 hours （equivalent to 100 million pulses were applied） under the conditions below. [Conditions for evaluation] Temperature: 85±2℃ Humidity: 90 to 95% RH Load: 200 N to 500 N （20 kgf to 50 kgf） Drive voltage waveform: Rectangular wave, 30 Hz, 0 V to 100 V, duty ratio at 30% 20 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Fixing Method: ⃝ Carefully prevent the piezo actuators from being bent, being twisted, or being applied tensile force. Reference: Guide for tolerance of twisting and tension Reference value Remarks Twisting force 3×10 N・m or less For an actuator which generates a force of 800 N （compression resistance）Tension 50 N or less ⃝ Install the actuator so that the center axis of generated displacement is aligned with the center axis of the load. a. Resin-coated type
• Epoxy-based adhesives are recommended for bonding. Select adhesives that have high rigidity and allow minimum thickness so that the generation force and displacement cannot be deteriorated. Also do not form adhesives at the side of actuator.
• When thermosetting resin is used, perform polarizing treatment （see the caution section） again after the adhesive is settled.
• The resin-coated type is weak to tensile force because of its structure and may be broken when tensile force is applied onto the device. Using the device in the state that constantly applies compression is effective against any mechanical damage. The pressure applied to this element should be kept at 20 to 50% of the force generated by this element （compression resistance）.
• Install the element so that the axis of generated displacement is vertical to the mounting surface. b. Metal sealed type
• Select the mounting bracket （female thread type or flange type） according to the mounting method, and install the element utilizing the bracket.
• Fix the element securely so that the generated force and displacement cannot be deteriorated.
• Connect the driven item at the displacement generating end after securing the mounting portion so that it avoids unnecessary stress applied at the time of installation.
• Though this product is designed to apply a compressive force to the internal element by the metal case, avoid any usages that cause bending, twisting, or tension force when the device is in use Example of Actuator mounting： Guide to Use Driving Method: ⃝ Connect the red lead wire to the positive （＋） terminal of the power supply. Also prevent reverse voltage application. ⃝ Basically the voltage controls the aimed displacement and generated force. In driving, however, it is also necessary to take ringing due to the resonance or hysteresis of the element itself into consideration. In pulse driving, it is further necessary to pay sufficient attention to heat generation due to dielectric loss, charge/discharge current due to the capacitive component and the power output impedance as well. Please refer to the separately printed literature, “NEC TOKIN Multilayer Piezoelectric Actuators Userʼs Manual” Spherical surface Hinge Piezo ActuatorPiezo Actuator Moving part or load Only one side is touching the actuator. (Stress is concentrated on one edge and generates share mode stress) The actuator may break. Piezo ActuatorPiezo Actuator Piezo ActuatorPiezo Actuator a) Example of wrong mounting Imperfect alignment between actuator and load <Actuator will be broken> b) Example of correct mounting Mount the device so that the load is uniformly applied by the spherical surface or the hinge Moving part or load Multilayer Piezoelectric Actuators Vol.06 21

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Generated force and load relation: Static load: Initial position (0V position) is dropped by spring constant but total displacement has the same value under static load. Spring load (Fluctuating load): Displacement is changed by relation between generated force and spring constant of actuator. Static load: No load value change when actuator moves. Fluctuating load: Load value changes by spring reaction when actuator moves. ʵ10 DisplacementʢЖmʣ ʵ20 ʵ15 ʵ10 DisplacementʢЖmʣ 400N static load is applied Zero point shift. Total displacement is not changed. Model: AE0505D16 100 1500 0 200 400 600 800 1000 Voltageʢ̫ʣ Loadʢ̣ʣ 150V 400NM M Piezo Actuator 150 10008006004002000 100500 DisplacementʢЖmʣ DisplacementʢЖmʣ Voltageʢ̫ʣ Loadʢ̣ʣ Spring load of 14.3N/Жm Spring load of 14.3N/Жm Reduction of displacement Model: AE0505D16 Load-Displacement line of actuator Displacement loss Reduction of displacement Piezo Actuator 22 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 ⃝ Connect the red lead wire to the positive （＋） terminal of the power supply. ⃝ Carefully avoid electric shock since a high voltage is in use. ⃝ Never apply excessive tension to a lead wire. Do not handle the product by picking up or moving the lead wire. ⃝ Do not disassemble the case of the metal sealed type. ⃝ Machining of the actuator element and replacement of the lead wire are prohibited. ⃝ Do not handle the resin-coated type （AE series） with bare hands. Otherwise, the reliability of the element would be degraded. ⃝ Do not wash resin-coated type （AE series） by organic solvant. ⃝ Avoid excessive physical shock resulting from, for example, dropping. Otherwise, the internal piezoelectric ceramic element may be damaged. ⃝ If the actuator is exposed to high temperature above 100℃ or if it is used after long storage period （more than three months）, it should be polarized by using the circuit configuration and conditions shown below. Precautions Protective resistor R1ʹ1kЊ Protective resistor R2ʹ1kЊ Polarizing conditions: DC voltage application 0Vˠ150ʶ0.2V (to be retained for 10 seconds) ˠ0 R2PA S V ⃝ Do not apply voltage exceeding maximum rating voltage, or do not do rapid charging and discharging. These might lead to degradation of the reliability or mechanical fracture. ⃝ Do not use the actuator in high concentration of highly inflammable gas. Otherwise, ignition may occur. ⃝ Use the actuator so as not to cause bending, twisting or tension. Furthermore, align the center axis of displacement of the actuator with the center axis of the mechanical load. ⃝ Drive the actuator so that the rising speed is more than three times as much as the resonance period in order to prevent the device from damaging by ringing. ⃝ Store the resin-coated type （AE series） preferably in a dry atmosphere （desirably below 40% RH） at ordinary temperatures （－5 to ＋40˚C）. Avoid condensation on the product surface. ⃝ Store actuators where there is no vibration. ⃝ These products must be handled properly as industrial waste. When disposing, please contact your local waste disposal service. ⃝Piezo actuator is industrial wastes, make sure disposal method under the laws. Multilayer Piezoelectric Actuators Vol.06 23

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 24 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 Multilayer Piezoelectric Actuators Vol.06 25

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 26 Multilayer Piezoelectric Actuators Vol.06

• All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
• Please request for a specification sheet for detailed product data prior to the purchase.
• Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2011.06.22 9307MPAVOL06E1106H2 When using our products, the following precautions should be taken. ʢ1ʣ Safety designing of an apparatus or a system allowing for failures of electronic components used in the system In general, failures will occur in electronic components at a certain probability. NEC TOKIN makes every effort to improve the quality and reliability of electronic component products. However, it is impossible to completely eliminate the probability of failures. Therefore, when using NEC TOKIN\ s electronic component products, systems should be carefully designed to ensure redundancy in the event of an accident which would result in injury or death, fire, or social damage, to ensure the prevention of the spread of fire, and the prevention of faulty operation. ʢPlease refer to pre- cautions to be taken when using multilayer piezoelectric actuators for the details of failures.ʣ ʢ2ʣ Quality level of various kinds of parts, and equipment in which the parts can be utilized Electronic components have a standard quality level unless otherwise specified. NEC TOKIN classifies the level of quality of electronic component products into three levels, in order from a lower level, a standard quality level, a special quality level, and a custom quality level in which a customer individually specifies a quality assurance program. Each of the quality levels has recommended applications. If a user wants to use the electronic parts having a standard quality level in applications other than the applications specified for the standard quality level, they should always consult a member of our company\s sales staff before using the electronic parts. Standard quality level : Computers, office automation equipment, communications equipment, measuring instruments, AV equipment, household electrical appliances, machine tools, personal equipment, industrial robots Special quality level : Transportation equipment ʢautomobiles, railways, shipping, or the likeʣ, traffic signals, disaster prevention/crime prevention systems, a variety of safety devices, and medical equipment which is not directly intended for life-support purposes Custom quality level : Equipment for airplanes, aerospace equipment, nuclear power control systems, and medical equipment, apparatus or system for life-support purposes Unless otherwise shown, the quality level of NEC TOKIN\s electronic component products included in documents such as catalogues, data sheets or data books is the standard quality level. ʢ3ʣ This manual is subject to change without notice. The contents of this manual are based on data which is correct as of June 2011, and they may be changed without notice. If our products are used for mass-production design, please cousult with a member of our company\s sales staff by way of precaution. ʢ4ʣ Reprinting and copying of this manual without prior written permission from NEC TOKIN Corporation are not permitted. ʢ5ʣ Industrial property problems In the event any problems associated with industrial property of a third party arising as a result of the use of our products, NEC TOKIN assumes no responsibility for problems other than problems directly associated with the constitution and manufacturing method of the products. ʢ6ʣ Should any of these products come under the category of strategic goods or services ʢaccording to Japan\`s foreign trade and foreign exchange regulationsʣ, the sender must obtain an export license from the Japanese Government before said products can be exported outside Japan.