ADXRS623_V01 AD | Alldatasheet

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±150°/Sec Yaw Rate Gyroscope ADXRS623 Rev. A Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners. Tel: 781.329.4700 www.analog.com Fax: 781.461.3113 © 2010 Analog Devices, Inc. All rights reserved.

FEATURES

Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 2000 g powered shock survivability Ratiometric to referenced supply

5 V single-supply operation

–40°C to +105°C operation Self-test on digital command Ultrasmall and light (<0.15 cc, <0.5 gram) Temperature sensor output RoHS compliant Qualified for automotive applications

APPLICATIONS

Inertial measurement units Platform stabilization Robotics GENERAL DESCRIPTION The ADXRS623 is a complete angular rate sensor (gyroscope) that uses the Analog Devices, Inc., surface-micromachining process to create a functionally complete and low cost angular rate sensor integrated with all required electronics on one chip. The manufacturing technique for this device is the same high volume BiMOS process used for high reliability automotive airbag accelerometers. The output signal, RATEOUT (1B, 2A), is a voltage proportional to the angular rate about the axis that is normal to the top surface of the package. The output is ratiometric with respect to a pro- vided reference supply. An external capacitor sets the bandwidth. Other external capacitors are required for operation. A temperature output is provided for compensation techniques. Two digital self-test inputs electromechanically excite the sensor to test proper operation of both the sensor and the signal conditioning circuits. The ADXRS623 is available in a 7 mm × 7 mm × 3 mm ceramic ball grid array (CBGA) package. FUNCTIONAL BLOCK DIAGRAM VDD AGND PGND AVCC ST2 ST1 TEMP V RATIO CP1 CP2 CP3 CP4 CP5 SUMJ RATEOUT DEMOD 180kΩ ± 1% 22nF 100nF 22nF 100n F 100nF 100nF DRIVE AMP MECHANICAL SENSOR CHARGE PUMP AND VOLTAGE REGULATOR COUT +5V +5V +5V (ADC REF) AC AMP VGA 25kΩ @ 25°C ADXRS623 25kΩSELF-TEST 08890-001 Figure 1.

Rev. A | Page 2 of 12 TABLE OF CONTENTS

REVISION HISTORY

11/10—Rev. 0 to Rev. A 3/10—Revision 0: Initial Version

Rev. A | Page 3 of 12 SPECIFICATIONS All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. TA = −40°C to +105°C, VS = AVCC = VDD = 5 V, VRATIO = AVCC, angular rate = 0°/sec, bandwidth = 80 Hz (COUT = 0.01 µF), IOUT = 100 µA, ±1 g, unless otherwise noted. Table 1. Parameter Test Conditions/Comments Min Typ Max Unit SENSITIVITY (RATIOMETRIC)1 Clockwise rotation is positive output Measurement Range2 Full-scale range over specifications range ±150 °/sec Initial and over Temperature 11.25 12.5 13.75 mV/°/sec Temperature Drift3 ±3 % Nonlinearity Best fit straight line 0.1 % of FS NULL (RATIOMETRIC)1 Null −40°C to +105°C 2.5 V Null Drift over Temperature −40°C to +105°C ±250 mV Linear Acceleration Effect Any axis 0.1 °/sec/g NOISE PERFORMANCE Rate Noise Density TA = 25°C 0.04 °/sec/√Hz FREQUENCY RESPONSE Bandwidth4 1 3000 Hz Sensor Resonant Frequency 14.5 kHz SELF-TEST (RATIOMETRIC)1 ST1 RATEOUT Response ST1 pin from Logic 0 to Logic 1 −500 −1000 mV ST2 RATEOUT Response ST2 pin from Logic 0 to Logic 1 500 1000 mV Logic 1 Input Voltage 0.8 × VRATIO V Logic 0 Input Voltage 0.2 × VRATIO V Input Impedance To common 50 kΩ TEMPERATURE SENSOR (RATIOMETRIC)1 VOUT at 25°C Load = 100 MΩ 2.35 2.5 2.65 V Scale Factor5 At 25°C, VRATIO = 5 V 9.1 mV/°C Load to VS 25 kΩ Load to Common 25 kΩ TURN-ON TIME Power on to ±½°/sec of final 50 ms OUTPUT DRIVE CAPABILITY Current Drive For rated specifications 200 µA Capacitive Load Drive 1000 pF POWER SUPPLY Operating Voltage (VS) 4.75 5.00 5.25 V VRATIO Input 3 VS V Supply Current 3.5 5.0 mA TEMPERATURE RANGE Specified Performance –40 +105 °C 1 Parameter is linearly ratiometric with VRATIO. 2 The maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies. 3 From +25°C to −40°C or from +25°C to +105°C. 4 Adjusted by external capacitor, COUT. 5 For a change in temperature from 25°C to 26°C. VTEMP is ratiometric to VRATIO. See the Temperature Output and Calibration section for more details.

care during handling to avoid damage. Figure 2. RATEOUT Signal Increases with Clockwise Rotation

Figure 3. Pin Configuration Table 3. Pin Function Descriptions 6D, 7D CP5 HV Filter Capacitor (100 nF). 6A, 7B CP4 Charge Pump Capacitor (22 nF). 6C, 7C CP3 Charge Pump Capacitor (22 nF). 5A, 5B CP1 Charge Pump Capacitor (22 nF). 4A, 4B CP2 Charge Pump Capacitor (22 nF). 3A, 3B AVCC Positive Analog Supply. 1B, 2A RATEOUT Rate Signal Output. 1C, 2C SUMJ Output Amplifier Summing Junction. 1E, 2E VRATIO Reference Supply for Ratiometric Output. 1F, 2G AGND Analog Supply Return. 3F, 3G TEMP Temperature Voltage Output. 4F, 4G ST2 Self-Test for Sensor 2. 5F, 5G ST1 Self-Test for Sensor 1. 6G, 7F PGND Charge Pump Supply Return. 6E, 7E VDD Positive Charge Pump Supply.

Figure 10. Measurement Range Figure 11. Typical Self-Test Change over Temperature Figure 12. Current Consumption at 25°C (VRATIO = 5 V) Figure 13. VTEMP Output at 25°C (VRATIO = 5 V)

256 PARTS

Figure 14. VTEMP Output over Temperature (VRATIO = 5 V) Figure 15. g and g × g Sensitivity for a 50 g, 10 ms Pulse

test, and temperature output is outlined in Table 4. Note that VRATIO must never be greater than AVCC. Table 4. Ratiometricity Error for Various Parameters that supply disturbances may reflect some null instability. Digital supply noise should be avoided, particularly in this case. atmosphere, approximately 0.25%/°C. Activating both ST1 and ST2 simultaneously is not damaging. shift proportional to the degree of self-test mismatch.

0.60 MAX

0.25 MIN

3.20 MAX

2.50 MIN

TO THE D/A PAD INTERNALLY VIA HOLES.

3.80 MAX

Figure 24. 32-Lead Ceramic Ball Grid Array [CBGA] 2 W = Qualified for Automotive Applications. obtain the specific Automotive Reliability reports for these models.

Rev. A | Page 12 of 12 NOTES ©2010 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the prop erty of their respective owners. D08890-0-11/10(A)