804FS HP | Alldatasheet
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Technical content
The new generation Turbo Pump with Agilent Floating Suspension The Agilent TwisTorr 804 FS turbomolecular high-vacuum pump combines TwisTorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability, and economy. TwisTorr drag stages create high compression ratios for light gases such as hydrogen and helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension system reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stability over time. The unique bearing and dry lubrication in the TwisTorr 704 FS eliminate oil and maintenance, and permit operation of the pump in any orientation. Available with onboard or rack controllers. Agilent TwisTorr 804 FS
Pumping speed ISO200K-F ISO250K-F CFF10 He Ar
720 L/s
660 L/s
485 L/s
690 L/s
Max Gas Throughput(*) Air Cooling (25°C Air temperature) Water Cooling (15°C Water temperature / 25°C room temperature) 4.3 mbarL/s
255 SCCM
6.1 mbar L/s
367 SCCM
7.9 mbar L/s
467 SCCM
10.4 mbar L/s
615 SCCM
1.5 mbar L/s
89 SCCM
3.3 mbar L/s
195 SCCM
(*) Backing pump 11.6 m3/hr Compression ratio and foreline tolerance* He Ar >1E+11 2E+08 3E+06 >1E+11 10 mbar 10 mbar >4 mbar 8.5 mbar (*) Foreline Tolerance defined as the pressure at which the turbopump still produce a compression of 100 and estimated in water cooling mode Base pressure with re- comm. forepump < 1 x 10-10 mbar (< 1 x 10-10 Torr) Inlet flange ISO 200K, ISO 200F , ISO 250K, ISO 250F, CFF 10” Foreline flange NW25 or NW40 Rotational speed Auto setting from 40'800 RPM to 49'500 RPM Start-up time < 5 minutes Technical Specification Recommended forepump DS302 IDP10 IDP15 Operating position Any Oper. ambient temperature +5 °C to +35 °C Rel. humidity of air 0 to 90% (not condensing) Bakeout temperature ISO pump: 80°C at inlet flange CFF pump: 120°C at inlet flange Lubricant Permanent grease lubrication Cooling requirements Air cooling Air temperature from +5°C to 35°C Water cooling Water temperature from +15°C to +25°C Water flow min. 100L/h Noise Pressure Level (at 1m at full speed) 43dB(A) Storage temperature -40 °C to +70 °C Max altitude 3000 m Weight kg (lbs) ISO200K ISO200F ISO250K ISO250F CFF 10" 20.7 Kg / 45.5 lbs. 23.6 Kg / 51.9 lbs. 23.3 Kg / 51.2 lbs. 27.6 Kg / 60.9 lbs. 22.1 Kg / 48.6 lbs. Conformity to norms EMC (Control Units) Safety (CE/CSA) Machinery Directive Low Voltage Directive EMC Directive (Control Units) ROHS 61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU Outline Drawing Dimensions: millimeters [inches] Technical Specification 234.94 [9.25] 190.44 [7.50] 120.2 [4.73] 190.44 [7.50] Ø207.5 [8.17] Ø253.24 [9.97] 234.94 [9.25] 190.44 [7.50] 120.2 [4.73] 190.44 [7.50] Ø207.5 [8.17] Ø240 [9.45] 12° 12° 232.94 [9.17] 188.44 [7.42] 118.2 [4.65] 188.44 [7.42] Ø207.5 [8.17] Ø334.9 [13.19] 12° CFF 10"ISO 200K ELECTRICAL CONNECTOR VENT SCREW FORELINE FLANGE KF25 ELECTRICAL CONNECTOR VENT SCREW FORELINE FLANGE KF25 ISO 250F ELECTRICAL CONNECTOR VENT SCREW FORELINE FLANGE KF40PURGE SCREW PURGE SCREW PURGE SCREW 3D Drawings available for download
Ordering Information
Pumps Configuration Options TwisTorr 804 FS ISO200K KF25 air cooling X3511-64007 TwisTorr 804 FS ISO200K KF40 air cooling X3511-64008 TwisTorr 804 FS ISO200F KF25 air cooling X3511-64009 TwisTorr 804 FS ISO200F KF40 air cooling X3511-64010 TwisTorr 804 FS CFF10" KF25 air cooling X3511-64011 TwisTorr 804 FS CFF10" KF40 air cooling X3511-64012 TwisTorr 804 FS ISO250K KF40 air cooling X3511-64013 TwisTorr 804 FS ISO250F KF40 air cooling X3511-64014 TwisTorr 804 FS ISO200K KF25 water cooling X3511-64022 TwisTorr 804 FS ISO200K KF40 water cooling X3511-64023 TwisTorr 804 FS ISO200F KF25 water cooling X3511-64024 TwisTorr 804 FS ISO200F KF40 water cooling X3511-64025 TwisTorr 804 FS CFF10" KF25 water cooling X3511-64026 TwisTorr 804 FS CFF10" KF40 water cooling X3511-64027 TwisTorr 804 FS ISO250K KF40 water cooling X3511-64028 TwisTorr 804 FS ISO250F KF40 water cooling X3511-64029 Controllers Part Numbers TwisTorr Medium-TMP Rack Controller X3501-64016 TwisTorr Medium-TMP on board Controller X3512-64016 Cables Part Numbers Mains cable NEMA plug 3 m long 9699958 Mains cable EU plug 3 m long 9699957 Mains cable UK plug 2.5 m long X3501-68005 Serial Cable & T-plus Software 9699883 Medium-TMP Extension Cable 9699948M001 (5 m) 9699948M003 (10 m) 9699948M004 (15 m) 9699948M002 (20 m) 9699948M005 (30 m) 9699948M006 (50 m) 9699948M009 (75 m) 9699948M010 (100 m) Inlet Screen Part Numbers Inlet Screen ISO100/CFF6 9699302 Cooling Part Numbers Medium-TMP Air Cooling Kit for Rack Controller X3501-68001 Medium-TMP Air Cooling Kit for on board Controller 9699297 Plastic Water cooling Kit 9699347 Metal Water cooling Kit 9699337 Air Cooling Kit Extension Cable 5m X3501-68101 Air Cooling Kit Extension Cable 10m X3501-68051 Air Cooling Kit Extension Cable 15m X3501-68061 Air Cooling Kit Extension Cable 20m X3501-68021 Air Cooling Kit Extension Cable 30m X3501-68011 Air Cooling Kit Extension Cable 50m X3501-68071 Air Cooling Kit Extension Cable 75m X3501-68081 Air Cooling Kit Extension Cable 100m X3501-68091 Venting Part Numbers Vent valve driven by Rack Controller X3501-68002 Vent valve driven by onboard Controller 9699834 Vent flange, NW 10 KF / M8 9699108 Spare Vent Screw X3511-68000 Vent valve Rack Extension Cable X3501-68004 (5 m) X3501-68054 (10 m) X3501-68064 (15 m) X3501-68074 (20 m) X3501-68084 (30 m) X3501-68034 (50 m) X3501-68094 (75 m) X3501-68104 (100 m) Purge Part Numbers Purge 10SCCM M12-NW16KF 9699239 Purge 10SCCM M12-1/4Swagelok 9699240 Purge 20SCCM M12-NW16KF 9699241 Purge 20SCCM M12-1/4Swagelok 9699242 Spare Purge Screw X3502-68004 Mounting Part Numbers Medium-TMP onboard Controller side-mounting bracket X3511-68003 Medium-TMP KF25 foreline flange X3511-68001 Medium-TMP KF40 foreline flange X3511-68002 Active Gauges Part Numbers FRG 700 Full Range Gauge PVG 500 Pirani Vacuum Gauge PCG 750 Pirani Capacitance Gauge CDG-500 Capacitance Diaphragm Gauge Ask Agilent for details Pumping SpeedCompression Ratio Pumping Speed (l/s) Inlet Pressure (mbar) 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 100 200 300 400 500 600 700 800 Hydrogen Helium Nitrogen Argon Hydrogen Helium Nitrogen Argon 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 100 200 300 400 500 600 700 10-3 10-2 10-1 100 101 102 102 104 106 108 1010 1012 1014 Hydrogen Helium Nitrogen Argon Compression ratio Foreline Pressure (mbar) Hydrogen Helium Nitrogen Argon 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 100 200 300 400 500 600 700
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