8204593 FESTO | Alldatasheet
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Mass flow controller (MFC) VEFC-L-6-100-D31-R14-R14-MRM1 Part number: 8204593 General operating condition Data sheet Feature Value Degree of protection IP20 Flow rate control range 5 l/min ... 100 l/min Note on the flow rate control range N2 equivalent, the specified dynamic and accuracy values apply to setpoint values >10 %FS Flow direction Non-reversible Operating pressure 0.6 MPa Operating pressure 6 bar Overload pressure 0.8 MPa Overload pressure 8 bar Overload pressure 116 psi Burst pressure 2.1 MPa Burst pressure 21 bar Burst pressure 305 psi Inlet pressure 1 1 bar ... 7 bar Outlet pressure 2 -1 bar ... 3.5 bar Suitability for vacuum yes Valve function 2-way proportional flow control valve Actuation type Electrical Pneumatic connection 1 R1/4 Pneumatic connection 2 R1/4 Total leakage 0.6 l/h Note on total leakage standardized according to SEMI E16 tested with CDA Relative air humidity 5 - 85 % Non-condensing Climatic category 3K22 as per EN 60721 Nominal altitude of use above sea level <= 2000 m NHN Operating medium Compressed air as per ISO 8573-1:2010 [7:4:4] Inert gas Temperature of medium 5 °C ... 50 °C Ambient temperature 5 °C ... 50 °C Storage temperature -20 °C ... 60 °C Nominal operating voltage DC 24 V 4/6/26 - Subject to change - Festo SE & Co. KG 1/2
DC operating voltage range 24 V Max. current consumption 65 mA Max. electrical power consumption 1.6 W Note on power consumption Typical <1 W Overvoltage category II Residual ripple ± 10% Electrical connection 1, function Analog output Analog input Communication Power supply Electrical connection 1, connection type Plug Electrical connection 1, connection technology Sub-D Electrical connection 1, number of pins/wires 9 Setpoint input 0 - 5 V 0 - 10 V 1 - 5 V 4 - 20 mA Modbus RTU Protection against direct and indirect contact PELV Display type LED Reverse polarity protection for operating voltage Overall accuracy 1.5 %FS Reproducibility 0.2 %FS Linearity 1.5 %FS Hysteresis 0.15 %FS Overshoot 2 %FS Settling time 500 ms Step response time 500 ms Note on the measured variable Dynamic characteristic values according to SEMI E17 with preset "fast". The dead time, the step response and the settling time may be increased in the event of setpoint changes from a closed valve state or when the back pressure is above atmospheric. Product weight 250 g Note on materials RoHS-compliant Dimensions W x L x H 24 mm x 130 mm x 97 mm Application note The product is suitable for industrial purposes only. Radio interference suppression measures may be required in residential areas. For indoor use only Material fire test UL94 HB Contamination level 2 Certification RCM compliance mark CE marking (see declaration of conformity) As per EU EMC directive As per EU RoHS directive UKCA marking (see declaration of conformity) To UK RoHS instructions KC characters KC EMC KC approval number EMC/radio FTO-KC-2024-1003 LABS (PWIS) conformity VDMA24364 zone III Suitability for the production of Li-ion batteries Suitable for battery production with reduced Cu/Zn/Ni values (F1a) 4/6/26 - Subject to change - Festo SE & Co. KG 2/2