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3M™ Novec™ 7500 Engineered Fluid is a nonflammable fluid with very low global warming potential for use in heat transfer applications. Novec 7500 fluid shares many of the inertness and dielectric properties of perfluorocarbons (PFCs) and perfluoropolyethers (PFPEs), and is a viable option for replacing them in a wide array of applications. Semiconductor This Novec fluid can be used in cooling of ion implanters, dry etchers and CVD machines in semiconductor and flat panel display manufacturing facilities. Test Equipment The fluid may be used to cool semiconductor thermal shock and test equipment. Electronic Cooling Because Novec 7500 fluid is compatible with most electronic components, it can be used in direct contact single- and two-phase cooling of supercomputers and sensitive military electronics, and to cool high voltage transformers and power electronics. Industrial/Pharmaceutical Novec 7500 fluid can also be used as an alternative to commonly used fluids in pharmaceutical and chemical manufacturing processes, such as freeze drying and reactor cooling. The primary advantage of Novec 7500 fluid over a comparable PFC or PFPE, however, is reduced Global Warming Potential (GWP). Novec 7500 fluid has been developed as a low-GWP alternative to perfluorocarbon and perfluoropolyether heat transfer liquids. Novec 7500 fluid is non-ozone-depleting and has been exempted from the U.S. EPA definition of a volatile organic compound (VOC) because it does not contribute to the formation of photochemical smog. 3M™ Novec™ 7500 Engineered Fluid A unique heat transfer fluid with favorable environmental properties Product Information

Typical Physical Properties Properties 3M™ Novec™ 7500 Engineered Fluid Boiling Point @ 1 atm (°C) 128 Pour Point (°C) -100 Molecular Weight 414 Liquid Density (kg/m3) 1614 Coefficient of Expansion 0.00129 K-1 Latent Heat of Vaporization @ 1 atm. (kJ/kg) 88.5 Surface Tension (dynes/cm) 16.2 Viscosity (cSt) 0.77 Critical Temperature (°C) 261 Critical Pressure (Mpa) 1.55 Solubility of Fluid in Water <3 ppm by weight Dielectric Strength 35 kV, 0.1" gap Volume Resistivity 2.2x108 ohm-cm Dielectric Constant 5.8 Flammability Nonflammable 100 108 2.5 1.75 1.5 1.25 .45 .35 .28 .26 .24 .22-80 -70 -60 -50- 40 -30- 20 -101 002 03 04 05 06 07 08 09 01 00 1101 20130140 Viscosity vs Temperature Behavior of HFE-7500 T (°C) Viscosity (cSt) Novec 7500 Fluid Kinematic Viscosity To determine the viscosity at a given temperature T in Kelvin, calculate Then, Viscosity [cSt] = (Z-0.7) - exp(-0.7487 - 3.295(Z-0.7) 3M™ Novec™ 7500 Engineered Fluid Not for specification purposes. All values @ 25°C unless otherwise specified.

-70 -20 30 80 130 1400 1450 1500 1550 1600 1650 1700 1750 1800 1850 HFE-7500 Liquid Density T (°C) Density (kg•m-3) HFE-7500 Thermal Conductivity Thermal Conductivity (W•m-1•K-1) -70 -20 30 80 130 0.05 0.06 0.07 0.08 T (°C) Novec 7500 Fluid Liquid Density Novec 7500 Fluid Thermal Conductivity Liquid Density [kg/m2] = -2.0845*T[°C] + 1665.8 Typical Physical Properties (continued) Thermal Conductivity [W/m-K] = 0.069 - 1.798E-04*T[°C] + 4.24E-07*T[°C]2 Not for specification purposes. All values @ 25°C unless otherwise specified.

HFE-7500 Liquid Specific Heat Specific Heat (J•kg-K) T (°C) -70 -20 30 80 130 900 1000 1100 1200 1300 1400 Novec 7500 Fluid Liquid Specific Heat Liquid Specific Heat [J/kg-K]= 1.4982*T(°C) + 1091 3M™ Novec™ 7500 Engineered Fluid Typical Physical Properties (continued) Not for specification purposes. All values @ 25°C unless otherwise specified.

The toxicological testing completed on 3M™ Novec™ 7500 Engineered Fluid indicates very low overall toxicity. The material is minimally irritating to the skin and eyes and tested negative in two mutagenicity screens. In its intended applications a large margin of safety exists between anticipated exposure and the eight hour time weighted average exposure guideline of 100 ppm. In a 28-day oral toxicity study no adverse effects were observed at 1000 mg per kg body weight. Toxicological Test Results Properties 3M™ Novec™ 7500 Engineered Fluid Oral LD50 >200 mg/kg Acute lethal inhalation concentration >10,000 ppm (6 hour) Eye irritation Minimally irritating Skin irritation Non-irritating Dermal sensitization Negative Mutagenicity Negative in the two assays conducted Ecotoxicity Very low aquatic toxicity 28-day oral toxicity NOAEL 1000 mg/kg Environmental Properties Properties 3M™ Novec™ 7500 Engineered Fluid Ozone Depletion Potential1 (ODP) 0.0 Global Warming Potential2 (GWP) 90 Atmospheric Lifetime (years) 2.2 Volatile Organic Compound (VOC) No 1 CFC-11 = 1.0 2 GWP = pounds equivalent CO2, 100-year integrated time horizon (ITH), IPCC 2001 method. Not for specification purposes. All values @ 25°C unless otherwise specified.

Environmental, Health and Safety Before using this product, please read the current product Material Safety Data Sheet (available through your 3M sales or technical service representative) and the precautionary statement on the product package. Follow all applicable precautions and directions. 3M ™ Novec™ 7500 Engineered Fluid is nonflammable and does not exhibit flammability characteristics under normal operation and storage conditions. The fluid is resistant to thermal breakdown and hydrolysis during storage and use. Recommended handling procedures are provided in the Material Safety Data Sheet, which is available from your local 3M representative upon request. Materials Compatibility In practice, Novec engineered fluids differ somewhat from PFCs and PFPEs in their ability to dissolve certain oils. This means that Novec 7500 fluid is more likely to extract plasticizers from elastomeric materials. For this reason, elastomeric O-ring and seal materials should be limited to those that contains a low amount of plasticizer. EPDM, EPR and butyl typically fall into this category. 3M engineers can suggest appropriate compounds or assist with test procedures. Heater Selection The critical heat flux of Novec 7500 fluid was found to be 18 W/cm2 when boiling from a horizontal 0.5 mm diameter platinum wire in a quiescent pool of saturated fluid. The maximum heat flux obtainable in forced convection applications is significantly higher, but depends strongly upon the geometry and flow conditions. A safety interlock between the pump and heater is strongly recommended in applications with heat fluxes exceeding 15 W/cm Regulatory Status The components of this product are in compliance with the chemical notification requirements of the United States (TSCA), Europe (ELINCS), Korea and the Philippines. Novec 7500 fluid is not acceptable for commercial sale in Japan. Certain restrictions apply. Contact the selling division for additional information. Contact your local 3M representative regarding the regulatory status of Novec 7500 fluid in other countries. 3M™ Novec™ 7500 Engineered Fluid

Recycle and Disposal Options Used Fluid Return Program 3M offers a program for free pickup and return of used 3M specialty fluids in the U.S. A pre-negotiated handling agreement between users and our authorized service provider offers users broad protection against future liability for used 3M product. The fluid return program is covered by independent third-party financial and environmental audits of treatment, storage and disposal facilities. Necessary documentation is provided. A minimum of 30 gallons of used 3M specialty fluid is required for participation in this free program. For additional information on the 3M Used Fluid Return Program, contact your local 3M representative or call 3M Customer Service at 800.810.8513. Resources 3M™ Novec™ Engineered Fluids are supported by global sales, technical and customer service resources, with technical service laboratories in the U.S., Europe, Japan, Latin America and Southeast Asia. Users benefit from 3M’s broad technology base and continuing attention to product development, performance, safety and environmental issues. For additional technical information on 3M™ Novec™ 7500 Engineered Fluid in the United States or for the name of a local authorized distributor, call 3M Electronics Markets Materials Division: 800 810 8513.

3M™ Novec™ 7500 Engineered Fluid Please recycle. Printed in USA. Issued: 9/09 © 3M 2008. All rights reserved. 7010HB 98-0212-2443-5 3M and Novec are trademarks of 3M Company. Used under license by 3M subsidiaries and affiliates. Product Use: All statements, technical information and recommendations contained in this document are based on tests or experience that 3M believes are reliable. However, many factors beyond 3M’s control can affect the use and performance of a 3M product in a particular application, including conditions under which the product is used and the time and environmental conditions in which the product is expected to perform. Since these factors are uniquely within the user’s knowledge and control, it is essential that the user evaluate the 3M product to determine whether it is fit for a particular purpose and suitable for the user’s method of application. Warranty and Limited Remedy: Unless stated otherwise in 3M’s product literature, packaging inserts or product packaging for individual products, 3M warrants that each 3M product meets the applicable specifications at the time 3M ships the product. Individual products may have additional or different warranties as stated on product literature, package inserts or product packages. 3M MAKES NO OTHER WARRANTIES, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO, ANY IMPLIED WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR ANY IMPLIED WARRANTY ARISING OUT OF A COURSE OF DEALING, CUSTOM OR USAGE OF TRADE. User is responsible for determining whether the 3M product is fit for a particular purpose and suitable for user’s application. If the 3M product is defective within the warranty period, your exclusive remedy and 3M’s and seller’s sole obligation will be, at 3M’s option, to replace the product or refund the purchase price. Limitation Of Liability: Except where prohibited b.incidental, or consequential regardless of the legal theory asserted, including warranty, contract, negligence or strict liability. The Novec brand is the hallmark for a variety of patented 3M products. Although each has its own unique formula and performance properties, all Novec products are designed in common to address the need for safe, effective, sustainable solutions in industry-specific applications. These include precision and electronics cleaning, heat transfer, fire protection, lubricant deposition and several specialty chemical applications. The 3M™ Novec™ Brand Family 3M™ Novec™ Engineered Fluids 3M™ Novec™ Aerosol Cleaners 3M™ Novec™ 1230 Fire Protection Fluid 3M™ Novec™ Electronic Coatings 3M™ Novec™ Electronic Surfactants United States 3M Electronics Markets Materials Division 800 810 8513 China 3M China Ltd. 86 21 6275 3535 Europe 3M Belgium N.V. 32 3 250 7521 Japan Sumitomo 3M Limited 813 3709 8250 Korea 3M Korea Limited 82 2 3771 4114 Singapore 3M Singapore Pte. Ltd. 65 64508888 Electronics Markets Materials Division 3M Center, Building 224-3N-11 St. Paul, MN 55144-1000 www.3M.com/novec 1-800-810-8513