65344_JACE VAT | Alldatasheet

Document overview

  • Manufacturer or author: Provided By alldatasheet.com(free datasheet download site)
  • PDF pages: 4

Technical content

CH-9469 Haag, Schweiz Product data sheet Control pendulum valve Series 653, DN 160 (I.D. 6”) Ordering No. 65344-JACE-0001 Created by: KAMNO Release date: 11.02.2021 1/4 Modified by: Release date: 1075701EA

1 Description

This product is a Pendulum control valve for conductance control in vacuum systems. Flange DN 160 (6“), ISO-F Actuator type servo motor position B1 Controller type integrated interface Logic number of sensor inputs 2 options SPS / PFO 1) firmware version F01.0C.28.23 Rotary feedthrough double sealed Seals rotary feedthrough atmosphere side FKM (e.g. Viton®) vacuum side FKM (e.g. Viton®) seal ring Body FKM (e.g. Viton®) Plate FKM (e.g. Viton®) bonnet FKM (e.g. Viton®) shaft feedthrough atmosphere side FKM (e.g. Viton®) vacuum side FKM (e.g. Viton®) 1) none = no option, PFO = power failure option, SPS = sensor power supply Sample picture

CH-9469 Haag, Schweiz Product data sheet Control pendulum valve Series 653, DN 160 (I.D. 6”) Ordering No. 65344-JACE-0001 Created by: KAMNO Release date: 11.02.2021 2/4 Modified by: Release date: 1075701EA

2 Technical data

2.1 Valve unit

Pressure range at 20 °C 1 x 10E-8 mbar to 1.2 bar (abs) Leak rate at 20 °C to outside (global) 1 x 10E-9 mbar l/s seat 1 x 10E-9 mbar l/s Max. differential pressure on plate during isolation (in both directions) 1200 mbar in either direction Max. differential pressure on plate during opening 10 mbar Cycles until first service (preventive maintenance) throttling (open – max. throttle – open) 1’000’000 (unheated and under clean conditions) isolation (open – closed – open) 200’000 (unheated and under clean conditions) Admissible operating temperature

  • Valve body
  • Ambient ≤ 120°C ≤ 150°C Mounting position any (valve seat on chamber side is recommended) Process side materials body EN AW-6061 (3.3211) plate EN AW-6061 (3.3211) sealing ring EN AW-6061 (3.3211), AISI 305 (1.4303), AISI 420C (1.3541), AISI 631 (1.4568) other parts AISI 316L (1.4404, 1.4435), AISI 440 (1.4122), AISI 301 (1.4310), AISI 316 Ti (1.4571), AISI 304 (1.4301) Seals body FKM (e.g. Viton®) plate FKM (e.g. Viton®) rotary feedthrough atmosphere side FKM (e.g. Viton®) rotary feedthrough vacuum side FKM (e.g. Viton®) shaft feedthrough atmosphere side FKM (e.g. Viton®) shaft feedthrough vacuum side FKM (e.g. Viton®) bonnet FKM (e.g. Viton®) Min. controllable conductance (N 2 molecular flow) 4 l/s

CH-9469 Haag, Schweiz Product data sheet Control pendulum valve Series 653, DN 160 (I.D. 6”) Ordering No. 65344-JACE-0001 Created by: KAMNO Release date: 11.02.2021 3/4 Modified by: Release date: 1075701EA Max. conductance (N2 molecular flow) 5000 l/s Actuating time Pressure control (throttling) - Default speed 0.8 s typ. Pressure control (throttling) - Fast speed 0.4 s typ. full open to close (isolated) 3 s typ. close (isolated) to full open 4 s typ.

2.2 Control unit

Power supply input connector D-Sub, DA-15, male supply voltage +24 VDC (±10%) @ 0.5 V pk-pk max. Power consumption (control / drive) 70 W (max.) with optional SPS + 40 W with optional PFO + 10 W Ambient temperature 0 °C to +50 °C max. (<35 °C rec ommended) humidity 0 to 95% RH, non-condensing Interface remote Logic service port USB-B (USB 2.0) Sensor connector D-Sub, DA-15, female number of inputs 2 signal voltage -10 … +10 V input resistance 100 k Ω ADC resolution 0.1 mV sampling rate 2 ms power supply (output) +24 VDC / 1.5 A max. or ±15 VDC / 1.2 A max. (with SPS option) Position resolution 58‘000 (full stroke) Actuator type Stepper motor with servo control Pressure control accuracy 5 mV or 0.1% of setpoint , the higher value applies Ingress Protection IP 30

CH-9469 Haag, Schweiz Product data sheet Control pendulum valve Series 653, DN 160 (I.D. 6”) Ordering No. 65344-JACE-0001 Created by: KAMNO Release date: 11.02.2021 4/4 Modified by: Release date: 1075701EA

2.2 Interface

2.4.1 Power Connector

Connector D-Sub, DA-15, male Digital inputs input 1 input 2 interlock open (adjustable with CPA 4.0) interlock close (adjustable with CPA 4.0) voltage control contact control 12 … 24V / 4 … 8 mA 24V / 8 mA Digital outputs output 1 output 2 valve closed (adjustable with CPA 4.0) valve opened (adjustable with CPA 4.0) load max. 70 V / 0.1 A

2.4 Logic

Connector D-Sub, DB-25, female Digital inputs number of inputs 8 voltage control contact control 5 … 24V / 2 … 10 mA 3.3V / 2 mA Digital outputs number of outputs 4 load max. 70 V / 0.1 A Analog input number of inputs 1 voltage range input resistance 0 … 10V 100 kOhm Analog outputs number of outputs 2 voltage range load 0 … 10V max. 1 mA

2.5 General data

Weight approx..18 kg Dimensional drawing 1075516