645 ADVANCEDENERGY | Alldatasheet
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Technical content
©2022 Advanced Energy Industries, Inc. The Trek® 645 software-driven electrostatic chuck supply with documented use that shows customers have seen increases in efficiency and throughput equal to three times that of other supplies. The Trek 645 virtually eliminates sticky wafer and wafer popping issues, thus ensuring better control over particle contamination. Given the versatility and performance of the Trek 645, it can be used in multiple unique tools/processes, thus eliminating the need to specify a new supply for each unique tool/process in a facility. PRODUCT HIGHLIGHTS Supports both Coulombic and Johnsen-Rahbek ESC technologies User configurable for custom clamp and declamp sequences and wave shapes Electrostatic chuck profiles can be uploaded to the unit and stored internally via a user-friendly software interface Documented reduction of backside gas errors, increased throughput, and elimination of sticky/popping wafers Lockable front panel control interface Ability to control parameters such as over-current, wafer-present and wafer- clamped thresholds, clamp voltage, offset voltage and internal or external amplitude/offset control Wafer detection includes no wafer, wafer present or wafer clamped status Includes in-process-adjustable amplitude/offset and output-control versatility Output can be controlled by back panel I/O, serial computer command or front panel controls NIST-traceable Certificate of Calibration provided with each unit Output Phasing 0 to ±2 kV Output Voltage Range 0 to ±2 kV Output Current Range 0 to ±6.5 mA DC with a peak capability of 10 mA TYPICAL APPLICATIONS Electrostatic-driven handling of materials Semiconductor wafer processing Non-mechanical transfer of flat panels or other processing materials sensitive to mechanical clipping AT A GLANCE TREK 645 Software-driven electrostatic chuck supply offers an array of features that provide significant benefits while accommodating a variety of demanding applications.
2 advancedenergy.com TREK 645 ELECTROSTATIC CHUCK SUPPLY TECHNICAL DATA Outputs Simultaneous High Voltage Outputs Two simultaneous high-voltage outputs (Output Phase A and Output Phase B) of equal magnitude and opposite in polarity relative to an offset voltage Output Phasing Output Voltage A (Reference Phase) 0 to ±2 kV Output Voltage B 0 to ±2 kV (Phase B =[-1] x Phase A) Offset Voltage An offset voltage of up to ±2 kV may be simultaneously added to the output of each phase. When an offset voltage is added, the polarity and magnitude of offset voltage appears simultaneously on both outputs A and B regardless of the magnitude and polarity of the A and B voltages themselves. The sum of the offset voltage and the output voltage of each phase cannot exceed ±2 kV Output Waveshape Each DC output voltage (Phase A and Phase B) is ramped up and down with symmetrical rise and fall times, or can be programmed with the user’s custom clamping and declamping waveforms Output Voltage Range 0 to ±2 kVDC, maximum Output Current 0 to ±6.5 mADC with peak capability of 10 mA Input Setting the High Voltage Amplitude HV magnitude can be controlled either externally or internally to the unit Setting the Offset Voltage Offset voltage may be controlled externally or internally to the unit Output Voltage Monitor (Back Panel Connector) Scale Factor 1 V/200 V Phase B DC Accuracy better than 2% of full scale Offset Voltage Less than 10 mV Output Noise Less than 50 mV rms Steady State Voltage Leakage Current Monitor Scale Factor 1 V / 100 μA DC Accuracy ±5 μA Output Noise Less than 50 mV rms Mechanical Specifications Panel Width 482.6 mm (19 in) Weight 3.86 kg (8.5 lb) Connectors 15-pin “D” ITT Canon used by remote device to control/monitor the unit, 9-pin “D” ITT Canon RS232, 3-Pin FCT “D” High-Voltage, standard type-A USB, Ethernet (optional) and Front Panel Power ON/OFF Two-position rocker switch Electrical Specifications DC Input Receptacle 2.0 mm locking DC jack; center contact is positive and shell is negative (receptacle mates with Switchcraft S761K plug) Ground Receptacle Ground stud Power Requirements 24 VDC, 1.7 A Measured using the true rms feature of the HP Model 34401A digital multimeter
advancedenergy.com 3 TREK 645 ELECTROSTATIC CHUCK SUPPLY REFERENCE NUMBERS Included Accessories PN Description
24010 Operator's Manual, Software
B8084R, B8085R, B8088R, B8089R HV Connectors Varies Line Cord, Spare Fuses (selected per geographic region) Optional Accessories PN Description 1K045 90 to 264 VAC to 24 VDC Power Adapter Environmental Specifications Temperature 0 to 35°C (32 to 104°F) Relative Humidity To 85%, noncondensing Altitude To 2000 m (6561.68 ft)
Features
Interlock Connections are provided to support an interlock safety configuration. In the event that the interlock is open, the high-voltage generation circuits are shut down Digital Display 40 x 2 LCD character display shows various system functions such as Set Voltage, Output Voltage and Capacitance Monitor Clamped Wafer Detection Feature (Thresholds are set by the program) To indicate wafer clamping events, the capacitive currents generated by a low voltage sine wave, super-imposed on the Phase A and Phase B outputs, are monitored but can be disabled through the program. The superimposed waveform is used to indicate a no wafer, wafer present, or wafer clamped status Capacitive Load Select Clamped capacitance status range can be selected by the program for 0 to 10, 20 or 30nF (phase to phase) depending on the system and electrostatic clamp physical configurations TECHNICAL DATA
For international contact information, visit advancedenergy .com. powersales@aei.com (Sales Support) productsupport.ep@aei.com (Technical Support) +1 888 412 7832 ABOUT ADVANCED ENERGY Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. Our products enable customer innovation in complex applications for a wide range of industries including semiconductor equipment, industrial, manufacturing, telecommunications, data center computing, and medical. With deep applications know-how and responsive service and support across the globe, we build collaborative partnerships to meet rapid technological developments, propel growth for our customers, and innovate the future of power. Specifications are subject to change without notice. Not responsible for errors or omissions. ©2022 Advanced Energy Industries, Inc. All rights reserved. Advanced Energy® Trek®, and AE® are U.S. trademarks of Advanced Energy Industries, Inc. TRUST ENG-ECS-Trek-645-235-04 09.04.22