61634_KEGF

61634_KEGF VAT | Alldatasheet

Document overview

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Technical content

CH-9469 Haag, Schweiz Product data sheet Control butterfly with isolation function Series 616, DN 40 - 100; gear box actuator (1:25) Created by: DACM Release date: 22.07.2022 1/8 Modified by: HeMa Release date: 15.03.2022 1077182EB

1 Description

This product is a Butterfly control valve with extended control range and isolation functionality for downstream pressure control in vacuum systems. This Product Data Sheet is valid for the valve ordering number(s): DN aluminum, hard anodized stainless steel mm inch ISO-KF ISO-F ISO-KF ISO-F 40 1 ½ 61632-KH X Y 61632-KE X Y 50 2 61634-KH X Y 61634-KE X Y 63 2 ½ 61636-PH X Y 61636-PE X Y 80 3 61638-PH X Y 61638-PE X Y 100 4 61640-PH X Y 61640-PE X Y X Y Sensor Inputs Controller configurations Interface G = Basic version H = RS232 + AO 2 A = With SPS K = RS485 + AO 2 H = With PFO E = Logic (A/D) 2 C = With SPS and PFO Q = DeviceNet ® 2 F = Profibus 2 SPS = Sensor Power Supply N = CC-Link 2 (+/-15 VDC power for external pressure sensor) X = EtherCAT 2 PFO = Power Failure Option Z = Ethernet 2 (Valve opens/closes automatically at power failure) Example: 61638-PEGH = stainless steel valve, ISO-F DN80; RS232, 2 sensors Sample picture only. Specified product may differ in size, flange and options

CH-9469 Haag, Schweiz Product data sheet Control butterfly with isolation function Series 616, DN 40 - 100; gear box actuator (1:25) Created by: DACM Release date: 22.07.2022 2/8 Modified by: HeMa Release date: 15.03.2022 1077182EB

2 Technical data

2.1 Valve unit

Pressure range at 20 °C (unheated on delivery) Leak valve seat at 20 °C (unheated on delivery) Leak valve body at 20 °C (unheated on delivery) Cycles until first service (unheated and under clean conditions)

• Pressure control
• Closing / opening o DN 40…50 o DN 63…100 2’000’000 250‘000 100‘000 Admissible operating temperature
• Valve body
• Ambient 10°C to 120°C 10°C … ≤ 50°C; (<35 °C recommended) Mounting position (valve seat towards chamber) support recommended any DN40…100 (if actuator is not vertically oriented) Process side materials body / plate Stainless steel: AISI 316L (1.4404 or 1.4435) Aluminum - EN AW-6082 (3.2315) hard anodized shaft / plate screws / .. Stainless steel: AISI 316L ( 1.4404 or 1.4435) shaft bearing Iglidur® X Seals Plate FKM (e.g. Viton ® )
• Standard *) rotary feed through atmosphere side FKM (e.g. Viton ® ) rotary feed through vacuum side FKM (e.g. Viton ® ) DN (nominal I. D.) [mm] 40 1½" 100 4" [inch] Max. differential pressure on plate (close position) [mbar] 1000 1000 1000 1000 1000 Max. conductance (N 2 molecular flow) [ls -1] 60 120 220 360 600 Weight (approx.) Aluminum valve Aluminum [kg] Aluminum lbs] 5.5 6 8.4 10.6 11.5 Weight (approx.) Stainless steel valve Steel [kg] Steel [lbs] 7.3 7.9 13 19.4 21.4 Behavior in case of power failure: Depending on con figuration (with or without PFO (Power Fail Option))

CH-9469 Haag, Schweiz Product data sheet Control butterfly with isolation function Series 616, DN 40 - 100; gear box actuator (1:25) Created by: DACM Release date: 22.07.2022 3/8 Modified by: HeMa Release date: 15.03.2022 1077182EB

2.2 Control unit

Power supply input connector D-Sub, DA-15, male supply voltage +24 VDC (±10%) @ 0.5 V pk-pk max. Power consumption 1) (control / drive) 40 W (max.) with optional SPS: +40 W with optional PFO: +10 W +3 W max. (from DeviceNet ® to DeviceNet ® Interface board of valve) Ambient temperature 10 °C to +50 °C max. (<35 °C re commended) humidity 0 to 95% RH, non-condensing Interface remote Refer to chapter 2.3 service port USB-B (USB 2.0) Sensor connector D-Sub, DA-15, female number of inputs 2 signal voltage 0 … 10V DC linear with pressure input voltage range -10 … +10 V input resistance 100 k Ω ADC resolution 0.1 mV sampling rate 2 ms; moving median (10 mSec) power supply (output) +24 VDC / 1.5 A max. or ±15 VDC / 1.2 A max. (with SPS option) Actuator Motor: Stepper, field oriented control (f oc) Encoder: Incremental, 20‘000 puls per rotation Gearbox: Ratio 1:25, backlash <0.4° Movement range CLOSE - OPEN 158° Valve mechanics Deflection lever transfers 158° gearbox output to ≈90° gate movement; nonlinear transfer Pressure control performance 2) 5 mV or 0.1% of set point, the higher value applie s. Ingress Protection IP 40 1) Rush in current not considered 2) Documented on model process chamber Actual dimensions and special configuration: dimensional drawing & optional 3D model

CH-9469 Haag, Schweiz Product data sheet Control butterfly with isolation function Series 616, DN 40 - 100; gear box actuator (1:25) Created by: DACM Release date: 22.07.2022 4/8 Modified by: HeMa Release date: 15.03.2022 1077182EB

2.3 Interface

2.3.1 Power Connector – all interfaces

Connector D-Sub, DA-15, male Digital inputs input 1 input 2 interlock OPEN (adjustable with CPA 4) interlock CLOSE (adjustable with CPA 4) voltage control contact control 12 … 24V / 4 … 8 mA 24V / 8 mA Digital outputs output 1 output 2 valve OPEN (adjustable with CPA 4) valve CLOSE (adjustable with CPA 4) load max. 70 V / 0.1 A

2.3.2 Logic

Connector D-Sub, DB-25, female Digital inputs number of inputs 8 voltage control contact control 5 … 24V / 2 … 10 mA 3.3V / 2 mA Digital outputs number of outputs 4 load max. 70 V / 0.1 A Analog input number of inputs 2 voltage range input resistance 0 … 10V 100 kOhm Analog outputs number of outputs 2 voltage range load 0 … 10V max. 1 mA

CH-9469 Haag, Schweiz Product data sheet Control butterfly with isolation function Series 616, DN 40 - 100; gear box actuator (1:25) Created by: DACM Release date: 22.07.2022 5/8 Modified by: HeMa Release date: 15.03.2022 1077182EB

2.3.3 RS232

Connector D-Sub, DB-25, female Communication settings baud rate data bits stop bits parity bit 1200,2400,4800,9600,19200,38400,57600, 115200 7 or 81) 11) or 2 even, odd, none 1) Digital inputs number of inputs 2 voltage control contact control 5 … 24V / 2 … 10 mA 3.3V / 2 mA Digital outputs number of outputs 2 load max. 70 V / 0.1 A Analog outputs number of outputs 2 voltage range load 0 … 10V max. 1 mA 1) Default setting by firmware; Configuration-File (or CPA) can be used to change

2.3.4 RS485

Connector D-Sub, DB-25, female Communication settings baud rate data bits stop bits parity bit topology network adress range 1200,2400,4800,9600,19200,38400,57600, 115200 7 or 81) 11) or 2 even, odd, none 1) half duplex, full duplex 1) point to point, multiple devices 1) 01) … 255 Digital inputs number of inputs 2 voltage control contact control 5 … 24V / 2 … 10 mA 3.3V / 2 mA Digital outputs number of outputs 2 load max. 70 V / 0.1 A Analog outputs number of outputs 2 voltage range load 0 … 10V max. 1 mA 1) Default setting by firmware; Configuration-File (or CPA) can be used to change

CH-9469 Haag, Schweiz Product data sheet Control butterfly with isolation function Series 616, DN 40 - 100; gear box actuator (1:25) Created by: DACM Release date: 22.07.2022 6/8 Modified by: HeMa Release date: 15.03.2022 1077182EB

2.3.5 DeviceNet

Connector microstyle, 5-pin, male Communication protocol DeviceNet, group 2 slave only data rate 125, 250, 500 kbaud by switch or network programmable MAC ID address 00 - 63 by switch or network programmable profile Generic “C” 1) Process Control Device (ODVA) Supply voltage transceiver at microstyle connector 24 Vnom, 11 … 25V; max. 0.5 W 1) Default setting by firmware; Configuration-File can be used to change (or CPA)

2.3.6 Profibus

Connector D-Sub, DE-9, female Communication protocol Profibus DP-V1, DP-V0 1.5, 3, 6, 12 Mbps The baud rate is detected automatically 1) or may be configured node address SW configurable (0,11) – 125) 1) Default setting by firmware; Configuration-File (or CPA) can be used to change

2.3.7 CC-Link

Connector D-Sub, DE-9, female Communication protocol CC-Link V2 data rate 156, 625, 500 kbps, 2.5, 5, 10 Mbps 1) SW configurable station number SW configurable ( 11) – 64) 2) Default setting by firmware; Configuration-File can be used to change (or CPA)

CH-9469 Haag, Schweiz Product data sheet Control butterfly with isolation function Series 616, DN 40 - 100; gear box actuator (1:25) Created by: DACM Release date: 22.07.2022 7/8 Modified by: HeMa Release date: 15.03.2022 1077182EB

2.3.8 EtherCAT

Connector 2 x RJ45, 8-pin (socket), IN and OUT Communication protocol Protocol specialized for EtherCAT node address Explicit device identification or station alias, set by switches Default: 0-0-0 physical layer 100BASE-Tx (IEEE 802.3) Cable shielded Ethernet CAT5e or higher

2.3.9 Ethernet

Connector 2 x RJ45, 8-pin (socket), IN and OUT Communication protocol Telnet node address IP Address (DHCP or static) physical layer 100BASE-Tx (IEEE 802.3) Cable shielded Ethernet CAT5e or higher

CH-9469 Haag, Schweiz Product data sheet Control butterfly with isolation function Series 616, DN 40 - 100; gear box actuator (1:25) Created by: DACM Release date: 22.07.2022 8/8 Modified by: HeMa Release date: 15.03.2022 1077182EB

2.4 General data

Weight refer to chapter: 2.1 Dimensional drawing Refer to dimensional drawing of specific valve ordering number (available on request)