5530 HP | Alldatasheet
Document overview
- Manufacturer or author: Provided By ALLDATASHEET.COM(FREE DATASHEET DOWNLOAD SITE)
- PDF pages: 14
Technical content
MAXIMUM OUTPUT: 1 mw PULSE SPEC: continuous wave LASER MEDIUM: helium neon CLASS II LASER PRODUCT E1738A Air Sensor one to three E1737A Material Sensors E1736A USB Sensor Hub E1735A USB Axis Module 10888A Remote A-quad-B Cable 55290 B Rotary T able 5519A/B Laser Environmental Operating Temperature: 0 – 40°C (32 – 104°F) Optics temperature must be stabilized to ±2°C to achieve accuracy specifications. PC Requirements Compatible with any portable computer with Windows® XP or Windows Vista (32-bit) and two USB 2.0 ports and a CD drive “Windows” is a registed trademark of Microsoft, Inc. Laser Head: 100 – 240 Vac, 50/60 Hz 50W (during warmup), 33W (after warmup) Calibrator Electronics (all +5V via USB): E1735A 280 mA max (plus 55290B if used) E1736A 120 mA (plus sensors) E1737A 6 mA maximum, 0.3 mA typical E1738A 6 mA maximum, 0.6 mA typical 55290B 250 mA maximum System Requirements
Up to 40 m (130 ft) with Linear Optics; Up to 80 m (260 ft) with Long Range Option Linear Distance and Diagonal Measurement Accuracy Temperature E1738A Range, °C [°F] Air Sensor In Vacuum † Velocity Measurement Accuracy Linear Distance and Diagonal Measurement Performance OPTICS RESOLUTION MAXIMUM AXIS VELOCITY Linear Optics 1 nm ±0.7 m/s ±1 m/s Plane Mirror 0.5 nm ±0.35 m/s ±0.5 m/s Optics (0.02 µin) (±14 in/s) (±20 in/s) (10706A/B) * High Resolution 0.25 nm ±0.18 m/s ±0.25 m/s Plane Mirror (0.01 µin) (±7 in/s) (±10 in/s) Optics (10716A) *‡ * Requires the 10724A Plane Mirror Reflector. Since alignment of these optics is much more sensitive than for linear optics, linear optics are recommended for general use. ‡ Aperture distance of 10716A is 12.7 mm, whereas 5519A is 11 mm. Angle Measurement Accuracy ±0.2% of displayed value ±0.05 arc-seconds per meter of distance traveled by the linearly moving optic. Maximum Distance Between Laser Head and Reflector Up to 15 m (50 ft) Linear Distance, Diagonal, and Velocity Measurement Specifications Y X Angular Measurement Specifications Y X † Vacuum accuracy is ±0.02 ppm if the laser head is calibrated to MIL-STD 45662A. Angle Measurement Resolution 0.005 arc-seconds Measurement Range ±10° (rotated about base of optic) ±20° (rotated about center of optic) Type: Helium-Neon with automatically tuned Zeeman-split two-frequency output Output Power: ≥180 µW (<1 mW per Class II Laser Product) Beam Diameter: 6 mm (0.24 in) Beam Centerline Spacing: 11.0 mm (0.44 in) (input to output aperture) Safety Classification: Class II Laser Product conforming to U.S. National CDRH Regulations 21CFR 1040.10 and 1040.11. Warm-up Time: Less than 10 minutes (4 minutes typical) Vacuum Wavelength: 632.991354 nm Wavelength Accuracy: ±0.1 ppm (±0.02 ppm of measured wavelength with factory calibration, Option UK6) Wavelength Stability (typical): short term (1 hour): ±0.002 ppm long term (lifetime): ±0.02 ppm Laser Characteristics Measurement Type Pitch and yaw + 0.01 % of displayed value] 2 µm/s Velocity] 5519A 5519B
Rotary and indexing tables or spindles Indexing Mode (zero-reference measurement) Accuracy: 0.5 sec band +0.2% of displayed reading Index Step Size: 1° Range: multiple rotations or partial arcs Laser Measurement Mode Accuracy: 0.2% of displayed reading. Accuracy can be improved to 0.5 sec by calibrating laser optics with the indexing table (55290A). Range: ±10° Setup Requirements Travel (using +2 mm, –1 mm machine axis, or manual from zero reference) Indexing Mode (Interferometer in fixture) Maximum Lift: 15 mm (2 mm required for fixture) 1. Values do not include effects of surface cleanliness or operator positioning repeatability. Angular Position Measurement Specifications 0 270 180 55290A Rotary Axis Kit Flatness Measurement Accuracy ±0.2% of displayed value ±0.05 arc-seconds per meter of distance traveled by the moving optic Flatness Measurement Resolution (per step) Footspacing Dimension Resolution 50.8 mm (2 in) 0.03 micron (1.0 µin) 101.6 mm (4 in) 0.05 micron (2.0 µin) 152.4 mm (6 in) 0.08 micron (3.0 µin) Measurement Type Rotary and indexing tables or spindles Combined Mode (zero-reference measurement) Accuracy: ±1.0 arc-second Resolution: 0.036 arc-seconds Range: multiple rotations or partial arcs Laser Measurement Mode Accuracy: 0.2% of displayed reading. Accuracy can be improved to 1 sec by calibrating laser optics with the indexing table (55290B). Range: ±10° Setup Requirements Travel – none required Connects to 5530 system via E1735A Axis Module 55290B Rotary Axis Kit Flatness and Way Straightness Measurement Specifications A H G B F C D E ±0.2% of displayed value ±0.05 arc seconds per meter of distance traveled by the moving optics Way Straightness Accuracy English Units Mode: 0.12 (F) 2 µin where: M = length of the surface diagonal in meters F = length of the surface diagonal in feet Lateral Offset and Flatness Range The combination of lateral offset and maximum flatness deviation must not displace the reflector more than ±1.0 mm from the beam path in any direction. Metric Units Mode: 0.03 (M) 2 µm Reference Plane Accuracy The uncertainty of a surface plate flatness measure- ment is bounded by two parallel planes separated by the values below: Flatness and Way Straightness Maximum Range 15m (50 ft)
Short Range Optics: Metric Units Mode: ±(1.0 + 0.1 M) arc-seconds ±0.01 English Unit Mode: ±(1.0 + 0.03 F) arc-seconds ±0.01 Long Range Optics: Metric Units Mode: ±(1.0 + 0.01 M) arc-seconds ±0.025 English Units Mode: ±(1.0 + 0.003 F) arc-seconds ±0.025 where: = calculated out-of-square angle in arc-seconds M = distance of travel of the moving optic in meters F = distance of travel of the moving optic in feet Straightness and Parallelism Measurement Specifications Y X X Optical Reference Accuracy Optical reference inaccuracy can be eliminated by using straightedge (mirror) reversal techniques. Short Range Optics: Metric units mode: ±0.15 (M) 2 µm English units mode: ±0.5 (F) 2 µin Long Range Optics: Metric units mode: ±0.015 (M) 2 µm English units mode: ±0.05 (F) 2 µin where: M = distance of travel of the moving optic in meters F = distance of travel of the moving optic in feet Straightness Measurement Accuracy Overall Accuracy = Optical Reference Accuracy + Measurement Accuracy 1. This is analogous to the traditional straightedge and indicator method of measuring straightness, where Optical Reference Accuracy corresponds to the straightedge accuracy, and Measurement Accuracy corresponds to the indicator accuracy. Straightness Measurement Range (Orthogonal to Axial Travel) ±1.5 mm (0.060 in) Axial Separation (Travel) (distance between the interferometer and the reflector, typical, with proper alignment, 15 – 25°C): Short Range Optics: 0.1 – 3m (4 – 120 in) Long Range Optics: 1 – 30m (3 – 100 ft) Measurement Accuracy Short Range Optics: Displayed Value Temperature 0 – 10 µm 10 – 1,500 µm Range (0 – 400 µin) (400 – 60, 000 µin) Long Range Optics: Displayed Value Temperature 0 – 100 µm 100 – 1,500 µm Range (0 – 4,000 µin) (4,000 – 60,000 µin) (100 µin) Straightness Measurement Resolution Short Range 0.01 µm (0.4 µin) Long Range 0.1 µm (4 µin) 2. These specs are not applicable to Timebase Straightness Measurements. (10 µin) Squareness Measurement Accuracy Y X
Wavelength of Light (WOL) in Air Compensation The E1738A Air Sensor provides for the automatic display of pressure, temperature, relative humidity, and computed WOL. E1739A—5m (16 ft) E1739B—10m (33 ft) E1739C—15m (49 ft) Environmental Compensation and A-quad-B Input E1738A Air Sensor 1. Compensation values may be manually entered by user via keyboard. Maximum Compensation Update Rate per 15s (combined WOL and material temperature compensation) Material Temperature Compensation The E1737A Material Temperature Sensor provides for the automatic display of the temperature of the device under test. One to three sensors may be used. Shared Sensor Characteristics Cable Lengths: E1739D—25m (82 ft) Operating Range Temperature: 0 – 40°C (32 – 104°F) Time Constant: 60s typical Material Expansion Coefficient: range: –100.0 to +100.0 ppm per °C or °F, manually entered. Heat Dissipation: 1 mW typical Operating Range Relative Humidity: 10% – 90% Absolute Pressure: 70 – 110 kPa (10 – 16 psia) Heat Dissipation: 2 mW typical Time Constant: 5 min typical (temperature) Temperature: 0 – 40°C (32 – 104°F)
2 E1737A Material Temperature Sensor 3
- Refer to the E1738A Air Sensor Data Sheet, 5989-8456 for more specifications. 3. Refer to the E1737A Material Sensor Data Sheet, 5989-8455 for more specifications. A-quad-B Input Differential Input Threshold ±0.5V minimum, ±7.0V maximum Differential Input Impedance 100W Input Rate >2 ns edge-to-edge, or <10 MHz information rate example: at maximum speed, A and B both must be <2.5 MHz. Accuracy Relative Humidity: ± 5% Absolute Pressure: ± 50 Pa (± 0.00 8 psi) Temperature: ± 0.1°C (± 0.2°F) 4. 12 month calibration interval Accuracy Temperature: ± 0.1°C (± 0.2°F) 4. 12 month calibration interval
E1735A USB Axis Module E1736A USB Sensor Hub Net Wt: 0.20 kg (0.44 lb) Net Wt: 0.20 kg (0.44 lb) 63 mm (2.5 in) 102 mm (4.0 in) 24 mm (0.95 in) 63 mm (2.5 in) 102 mm (4.0 in) 24 mm (0.95 in) E1737A Material Sensor E1738A Air Sensor Net Wt: 0.03 kg (0.0625 lb) Net Wt: 0.06 kg (0.125 lb) 26 mm (1.0 in)(1.7 in) F 42 mm 17.5 mm (0.7 in) (0.8 in) F 20 mm 92.7 mm (3.65 in) height 686 mm (27 in) 1650 mm (65 in) max Net Wt: 8.0 kg (17.6 lbs) Cross- Slide radius 479.0 mm (18.86 in) Net Wt: 5.5 kg (12 lb) 44.0 mm (1.73 in) 118.0 mm (4.65 in) 55.0 mm (2.17 in) 168.0 mm (6.61 in) 192.0 mm (7.56 in) 360.0 mm (14.17 in) M8 × 1.25 thread (3 places) Kinematic Mounting Plate 79 mm (3.125 in) min min 330 mm (13.0 in) 692 mm max (27.25 in) 45 mm (1.8 in) 17.5 mm (0.7 in)(1.7 in) F 42 mm 45 mm (1.8 in) System Component Dimensions and Weights Agilent 5519A/B Laser Head Agilent 10753B Laser Tripod
Linear Optics Angular Optics Net Wt: 5.36g (1.2 lb) 107.8 mm (4.24 in) 90.0 mm (3.54 in) Captive Screw (2 Places) 30.0 mm (1.18 in) 50.0 mm (1.97 in) 11.7 mm (0.46 in) 30.0 mm (1.18 in) M10 1.5 M3 0.5 (4 Places) Front Side 19.0 mm (0.75 in) Top M10 × 1.5 Agilent 10785A Height Adjuster/Post, 10784A Base Agilent 10766A/10767A Interferometer Combination Agilent 10767A Linear Retroreflector 30.0 mm (1.18 in) M3 × 0.5 (4 Places) 40.0 mm (1.57 in) 40.0 mm (1.57 in) 25.0 mm (0.98 in) Aperture Dia 20.0 mm (0.79 in) Captive Screw (2 Places) 30.0 mm (1.18 in) Net Wt: 224g (0.5 lb) Agilent 10770A Angular Interferometer Net Wt: 553g (1.3 lb) M3 × 0.5 (24 Places) 40.0 mm (1.57 in) Aperture Dia 18.0 mm (0.71 in) (4 Places) 30.0 mm (1.18 in) 30.0 mm (1.18 in) 72.6 mm (2.86 in)
1 A 0 1 0 1
40.0 mm (1.57 in) Agilent 10771A Angular Reflector30.0 mm (1.18 in) M3 × 0.5 (24 Places) 40.0 mm (1.57 in) 65.0 mm (2.56 in) 30.0 mm (1.18 in) Dotted outline shows alternate 10767A retroreflector mounting position. 10766A LINEAR INTERFEROMETER Net Wt: 650g (1.5 lb) 0.5 30.0 mm (1.18 in) 30.0 mm (1.18 in)27.0 mm (1.06 in) 72.6 mm (2.86 in) 32.61 mm (1.284 in) 30.0 mm (1.18 in) 40.0 mm (1.57 in) 40.0 mm (1.57 in) × M3 (19 Places) 40.0 mm (1.57 in)
1.65 mm (6.50 in) 152.5 mm (6.00 in) 114.3 mm (4.50 in) 101.6 mm (4.00 in) Pattern to Match 10771A (M3 × 0.5) Clearance Holes 50.0 mm (1.97 in) 12.7 mm (0.50 in) 39.0 mm (1.53 in) 50.0 mm (1.97 in) 50.0 mm (1.97 in) 50.8 mm (2.00 in) 63.5 mm (2.50 in) Agilent 10759A Foot Spacing Kit Net Wt: 661g (1.5 lb) Agilent 10773A Flatness Mirror Mirror Turns Net Wt: 661g (1.5 lb) 45.7 mm (1.80 in) 12.2 mm (0.48 in) 30.0 mm (1.18 in) 30.0 mm (1.18 in) 50.0 mm (1.97 in) 110.0 mm (4.33 in) Clears M3 To Match 10770A x 0.5
Straightness / Squareness Optics Agilent 10772A Tuning Mirror Agilent 10774A Short Range Straightness Optics/10775A Long Range Straightness Optics Agilent 10776A Straightness Mount Agilent 10776-67001 Straightness Retroreflector M3 × 0.5 (4 Places) 40.0 mm (1.57 in) 40.0 mm (1.57 in) Aperture Dia 20.0 mm (0.79 in) (2 Places) Captive Screw (2 Places) 30.0 mm (1.18 in) 40.0 mm (1.57 in) 30.0 mm (1.18 in) Net Wt: 510g (1.2 lb) w/Mount M3 × 0.5 (16 Places) 30.0 mm (1.18 in) 30.0 mm (1.18 in) 25.0 mm (0.98 in) 110.0 mm (4.33 in) Net Weight: 800g (28.2 oz) Angular Reflector 40.0 mm (1.57 in) Aperture Dia 8.0 98.0 mm (0.31× 3.66 in) Aperture Dia 7.9 mm (0.31 in) 20.0 mm (0.79 in) 32.0 mm (1.26 in) 21.0 mm (0.83 in) M3 0.5 (2 Places) Net Weight: 164g (5.8 oz) Straightness Interferometer R 32.0 mm (1.26 in) M10 1.5 Clears M3 0.5 (2 Places) 86.2 mm (3.39 in) M10 1.5 Aperture Dia 63.5 mm (2.5 in) 99.1 mm (3.90 in) 76.2 mm (3.00 in) Net Wt: 374g (0.82 lb) 90.0 mm (3.54) 51.0 mm (2.01) 25.5 mm (1.00) 11.7 mm (0.46 in)
19.1 Dia Thru
(.75 Dia) 36.0 mm (1.42) 18.0 mm (0.71) 55.0 mm (2.17) 38.0 mm (1.50)
11.0 Dia C'Sink
T ap M10 x 1.5 (6H) Thru 40.0 mm (1.57 in) F F
Net Wt: 4.0 kg (8.9 lb) w/Mount Agilent 10777A Optical Square Agilent 10777-20007 Optical Square Base M10 x 1.5 (4 Places) 145.0 mm (5.71 in) 49.5 mm (1.95 in) 43.0 mm (1.69 in) 71.0 mm (2.80 in) (2 Places) 49.5 mm (1.95 in) 49.5 mm (1.95 in) 14.0 mm (0.55 in) (2 Places) 8.0 mm (0.31 in) (2 Places) 28.0 mm (1.10 in) (2 Places) 145.0 mm (5.71 in) 50.9 mm (2.01 in) OPTICAL SQUARE 10777A Optics and Accessories Straightness / Squareness Optics 67.0 mm (2.64) 12.0 mm (0.47) 77.0 mm (3.03 in) 20.0 mm (0.70) 20.0 mm (0.70) 4 x R5 20.0 mm (0.70 in) 20.0 mm (0.70 in) 32.0 mm (1.26 in) 59.5 mm (2.34 in) 139.6 mm (5.50 in) 32.0 mm (1.26 in) 20.0 mm (0.79 in) 15.0 mm (0.59 in) 34° 75.5 mm (1.26 in) 29.3 mm (1.15 in) 27.5 mm (1.08 in) 9.5 mm (0.37 in) 154.0 mm (6.06 in) 15.0 mm 36.5 mm (1.44 in) 25° 133.5 mm (5.26 in)(0.59 in)
Agilent 10768-20214 Base - Large from Agilent 10768A/10769A Measurement Kit 10.0 mm (0.39 in) 29.3 mm (1.15 in) 35.0 mm (1.38 in) 65.0 mm (2.56 in) 100.7 mm (3.96 in) 130.0 mm (5.12 in) 10.0 mm (0.39 in) 10.4 mm (0.41 in) (4 Places) 110.0 mm (4.33 in) (4 Places) 48.0 mm (1.89 in) 10.0 mm (0.39 in) 4.7 mm (0.19 in) 14.5 mm (0.57 in) Chamfer 45 ° × 0.5 Both sides of Part 1/4-20 UNC 2B English Thread (2 Places)M5 × 0.8 6H Thru (2 Places)
10.8 Thru
C-Sink 90 ° × 11.8 Both Sides (2 Places) M10 × 1.5 6H Thru (7 Places) 10.0 mm (0.39 in) 65.3 mm (2.57 in) 70.0 mm (2.76 in)
2 Places
90.0 mm (3.54 in) 55.5 mm (2.19 in) 48.0 mm (1.89 in) 150.0 mm (5.91 in) (1.57 in) 58.0 mm (2.28 in) 26.4 mm (1.04 in) 20.0 mm (0.79 in) 20.0 mm (0.79 in) 30.0 mm (1.18 in) 5.0 mm (0.20 in) (0.20 in) 30.0 mm (1.18 in) f 3.3 mm Thru C'Bore 6.5 mm f × 3.8 DP (4 Places) 40.0 mm 5.0 mm 40.0 mm (1.57 in) 108.6 mm (4.28 in) 8.0 mm (0.31 in) 17.7 mm (0.70 in) 48.0 mm (1.89 in) 25.70 (1.01 in) M10 × 1.5 mm Thru (2 Places) 20.0 mm (0.79 in) 98.0 mm (3.86 in) 62.4 mm (2.46 in) Optics and Accessories Straightness / Squareness Optics Agilent 10769B Turning Mirror (Base Block Only) 23.0 mm (0.91 in) 20.0 mm (0.79 in) 10.0 mm (0.39 in) 10.0 mm (0.39 in) 20.0 mm (0.79 in) (2 Places) (2 Places) 6 20 thru 12.00 thru F F
6.4 mm (0.25 in) 63.5 mm (2.50 in) 73.0 mm (2.87 in) 73.0 mm (2.87 in) 50.80 mm × 1.3 mm deep 4 × 1/4-20 UNC thru equally spaced 90 ° apart 38.10 mm (1.50 in) 8.6 mm (0.34 in) thru 9.505 mm (0.37 in) Flanged Shaft Agilent 55290A Angular Position Measurement Kit Fixture, Angle Position Measurement 103.78 mm (4.09 in) 52.21 mm (2.06 in) 66.43 mm (2.62 in) 9.11 mm (0.36 in) 98.3 mm (3.87 in) 82.49 mm (3.25 in) 7.92 mm (0.31 in) 90.4 mm (3.56 in) 43.20 mm (1.70 in) 32.00 mm (1.26 in) 4.90 mm (0.19 in) 16.00 mm (0.63 in) 41.24 mm (1.62 in) 35.46 mm (1.40 in) 31.20 mm (1.23 in) 6.00 mm (0.24 in) Rotary Indexing Table 54.15 mm (2.25 in) 139.70 mm (5.50 in) 69.85 mm TYP TO FLAT (2.75 in) .25 SOC HD CAP SCR equally spaced on 6.125 B.C. (3 Places) 10-32 × .34 DP equally spaced on 1.750, 2.750 & 4.750 B.C. (24 Places) R 85.9 mm (3.38 in) Adapter Plate 171.5 mm (6.75 in) 15.9 mm (0.63 in)
(9.25 in) 250 mm (9.84 in) 200 mm (7.87 in) 150 mm (5.91 in) 105 mm (4.13 in) 200 mm (7.87 in) 130 mm (5.12 in) 70 mm (2.76 in) A - A 22.52 mm (0.89 in) 22.52 mm (0.89 in) 22 mm (0.87 in) 26 mm (1.02 in) 13 mm (0.51 in) A A AA B B B - B 9 mm (0.35 in) 11 mm (0.43 in) 13 mm (0.51 in) 15 mm (0.59 in) 8.4 mm (0.33 in) 11 mm (0.43 in) 18 mm (0.71 in) 13 mm (0.51 in) 20 mm (0.79 in) 15 mm (0.59 in) 12.0 mm (0.47 in) 10 mm (0.39 in) 20.0 mm (0.79 in) 30.0 mm (1.18 in) 22 mm (0.87 in) 22 mm (0.87 in) Agilent 55290B Angular Position Measurement Kit Adapter Plate Flanged Shaft A - A 30 mm (1.18 in) 15 mm (0.59 in) 60 mm (2.36 in) 20 mm (0.79 in) 10 mm (0.39 in) 68.0 mm (2.68 in) 11.0 mm (0.43 in) 5.6 mm (0.22 in) 40.0 mm (1.57 in) 10.0 mm (0.39 in) 10.0 mm (0.39 in) 6.8 mm (0.27 in)1.0 mm (0.04 in) 6.5 mm (0.26 in) 10.0 mm 5.0 mm± 0.3 2.0 mm (0.87 in) (0.28 in) 7.0 mm+ 0.0 - 0.5
Agilent Technologies’ Test and Measurement Support, Services, and Assistance Agilent T echnologies aims to maximize the value you receive, while minimizing your risk and prob- lems. We strive to ensure that you get the test and measurement capabilities you paid for and obtain the support you need. Our extensive sup- port resources and services can help you choose the right Agilent products for your applications and apply them successfully. Every instrument and system we sell has a global warranty. Support is available for at least five years beyond the production life of the product. Two concepts underlie Agilent’s overall support policy: “Our Promise” and “Your Advantage.” Our Promise Our Promise means your Agilent test and mea- surement equipment will meet its advertised performance and functionality. When you are choosing new equipment, we will help you with product information, including realistic perfor- mance specifications and practical recommenda- tions from experienced test engineers. When you receive your new Agilent equipment, we can help verify that it works properly and help with initial product operation. Your Advantage Your Advantage means that Agilent offers a wide range of additional expert test and measurement services, which you can purchase according to your unique technical and business needs. Solve problems efficiently and gain a competitive edge by contracting with us for calibration, extra-cost upgrades, out-of-warranty repairs, and onsite education and training, as well as design, system integration, project management, and other professional engineering services. Experienced Agilent engineers and technicians worldwide can help you maximize your productivity, optimize the return on investment of your Agilent instruments and systems, and obtain dependable measurement accuracy for the life of those products. www.agilent.com/find/emailupdates Get the latest information on the products and applications you select. Agilent T&M Software and Connectivity Agilent’s T est and Measurement software and connectivity products, solutions and developer network allows you to take time out of connect- ing your instruments to your computer with tools based on PC standards, so you can focus on your tasks, not on your connections. Visit www.agilent.com/find/connectivity for more information. For more information on Agilent Technologies’ products, applications or services, please contact your local Agilent office. The complete list is available at: www.agilent.com/find/contactus Agilent Email Updates Phone or Fax United States: (tel) 800 829 4444 (fax) 800 829 4433 Canada: (tel) 877 894 4414 (fax) 905 282 6495 China: (tel) 800 810 0189 (fax) 800 820 2816 Europe: (tel) 31 20 547 2111 Japan: (tel) (81) 426 56 7832 (fax) (81) 426 56 7840 Korea: (tel) (080) 769 0800 (fax) (080)769 0900 Latin America: (tel) (305) 269 7500 Taiwan: (tel) 0800 047 866 (fax) 0800 286 331 Other Asia Pacific Countries: (tel) (65) 6375 8100 (fax) (65) 6755 0042 Email: tm_ap@agilent.com Product specifications and descriptions in this document subject to change without notice. © Agilent T echnologies, Inc. 2009 Printed in USA, February 2 5, 2009 5989-9712EN More information about Agilent Technologies’ laser interferometric dynamic calbrators is available at: www.agilent.com/find/machinetoolcalibration