542A ADVANCEDENERGY | Alldatasheet
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©2021 Advanced Energy Industries, Inc. The Trek® 542A electrostatic voltmeter provides accurate non-contacting measurements of the electrostatic surface voltage associated with EOS/ESD processes. The instrument is configured with a miniature electrostatic field chopper probe that can be remotely located and easily positioned within process equipment to provide highly accurate, non-contacting, DC-stable, spacing-independent voltage measurements in either ionized or non-ionized environments. A 20x4 alphanumeric LCD screen displays the present measured voltage, the positive peak voltage value, the negative peak voltage value and additional menu information. PRODUCT HIGHLIGHTS Chopper probe is DC-stable with or without incident air ion flow Drift-free measurements LCD screen displays present voltage, the positive peak voltage, the negative peak voltage and additional menu information. Visual and audible alarms activate when the preset voltage threshold levels are reached Analog voltage monitor output USB and RS232 serial ports NIST-traceable Certificate of Calibration provided with each unit Optional walking test adapter kits available
APPLICATIONS
Semiconductor LCD Measurement Range Trek 542A-1 ±10 kVDC or peak AC Trek 542A-2 ±20 kVDC or peak AC Measurement Accuracy Better than ±5% of the reading ±0.2% of full scale over a probe- to-surface separation of: Trek 542A-1: 15 to 30 mm Trek 542A-2: 30 to 60 mm Alphanumeric LCD Display 20 x 4 characters AT A GLANCE TREK 542A Electrostatic voltmeter for accurate non-contacting measurements of the electrostatic surface voltage associated with EOS/ESD processes. Electronic assembly ESD-sensitive processes
2 advancedenergy.com TREK ELECTROSTATIC VOLTMETER 542A TECHNICAL DATA Performance Specifications Measurement Range Trek 542A-1 0 to ±10 kV DC or peak AC Trek 542A-2 0 to ±20 kV DC or peak AC Speed of Response Less than 50 ms for a ±1 kV step (10 to 90%) Accuracy Better than ±5% of the reading ±0.2% of full scale over a probe-to-surface separation of: Trek 542A-1 15 to 30 mm Trek 542A-2 30 to 60 mm Drift with Time Less than ±1% full scale, non-cumulative Monitor Output Trek 542A-1 1/1000th of the measured voltage Trek 542A-2 1/2000th of the measured voltage Output Noise Less than 30 mV rms Output Impedance 47 W Mechanical Specifications Dimensions (H x W x D) 97 x 152 x 204 mm (3.8 x 6 x 8 in) Weight 0.77 kg (1.7 lb) Electrical Specifications Power 15 VDC ±20%, 800 mA (minimum) adapter with a 2.1 mm DC plug Power ON/OFF Rear panel switch Environmental Specifications Temperature 15 to 35°C (59 to 95°F) Relative Humidity 5 to 85% RH, noncondensing Altitude To 2000 m (6561.68 ft.)
Features
Alarms Activated if measured voltage exceeds preset threshold limits; positive/negative limits may be programmed separately Visual Front-panel LED illuminated at threshold Audible ON/OFF programmable pulsating or continuous tone. (+) and (-) alarms have different tone rates for the pulsating tone selection Alarm Relay Output Form C relay contact rated at 175 V maximum, 5 W Alarm Digital Output TTL output with a TTL low as the alarm “ON” status Reset Button Resets alarms and peak hold to zero Zero Control Adjustable to produce zero volts when probe coupled to a known zero voltage source Alphanumeric LCD Display 20 character by four line (20x4) LCD displays the present voltage and holds the most positive and most negative values Ground Receptacle Banana jack Serial Port and USB Port Provides control of specific functions and acquires sensor data utilizing Advanced Energy software and a PC connected to the RS232 serial port or the USB Type B port (connectors are on back panel) Current Output Provides a current of 4 mA to 20 mA representing -10 kV to +10 kV (542A-1) and -20 kV to +20 kV (542A-2) Menu ↑↓ Buttons Select and program menu options - the ↑↓ set the alarm threshold voltages, alarm conditions, and alarm reset type Measured using the true rms feature of the HP Model 34401A digital multimeter
advancedenergy.com 3 TREK ELECTROSTATIC VOLTMETER 542A Included Accessories
24004 Operator’s Manual (with software)
F5054R Universal AC Adapter Optional Accessories 1K040 Walking Test Adapter REFERENCE NUMBERS Probe Specifications Probe Cable Length 5 m (16 ft) nominal 45° Orientation Model 542P-45D Aperture 3.8 mm (0.15 in) D Dimensions 11 D x 79 mm (0.43 D x 3.1 in) Side Orientation Model 542P-S Aperture 4 mm (0.156 in) D Dimensions 13 D x 75 mm (0.51 D x 3 in) PROBES Vacuum application probes are also available
For international contact information, visit advancedenergy .com. sales.support@aei.com +1.970.221.0108 ABOUT ADVANCED ENERGY Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical thermal processes. With deep applications know-how and responsive service and support across the globe, AE builds collaborative partnerships to meet rapid technological developments, propel growth for its customers and power the future of technology. Specifications are subject to change without notice. Not responsible for errors or omissions. ©2021 Advanced Energy Industries, Inc. All rights reserved. Advanced Energy®, Trek®, and AE® are U.S. trademarks of Advanced Energy Industries, Inc. ENG-ESD-Trek-542A-235-01 6.21