4300 3M | Alldatasheet
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Technical content
3M™ Electronic Surfactant 4300 Product Description 3M™ Electronic Surfactant 4300 is an anionic fluorochemical surfactant having 20% active material in glacial acetic acid. 3M surfactant 4300 was designed as an additive to improve wetting in low pH aqueous solutions used in semiconductor and microelectronics processing. When used in low pH aqueous solutions, including phosphoric acid or phosphoric/acetic/nitric (PAN) solutions, 3M surfactant 4300 significantly lowers the surface tension and improves the wetting of the solution. This improved wetting can improve the uniformity of the etch while having little to no impact on the etch rate. 3M surfactant 4300 has excellent stability in many of the acids commonly used in semiconductor and microelectronics processing. Key Features
- Improved wetting on etch solutions
- Little to no effect on the etch rate
- Stability in etch solutions
- Effective at low concentrations
- Filterable
Applications
- Etch and cleaning solutions in semiconductor, microelectronics, flat panel display and solar panel manufacturing including: o Aluminum or copper metal etch o Silicon nitride etch o Cleaning or etching of silicon or quartz surfaces Composition Physical Properties Note: The following technical information and data should be considered representative or typical only and should not be used for specification purposes. Component 3M™ Electronic Surfactant 4300 Ammonium Fluoroalkyl sulfonamide 20% by weight Glacial Acetic Acid 80% by weight Property 3M™ Electronic Surfactant 4300 Appearance Clear white or light yellow liquid Specific Gravity 1.1 (9.1 lb/gal, 1.1 kg/L) Viscosity 1.2 cps Surfactant Type Anionic Technical Data | September 2020
3M™ Electronic Surfactant 4300 Typical Performance Characteristics Note: The following technical information and data should be considered representative or typical only and should not be used for specification purposes. Final product specifications and testing methods will be outlined in the products Certificate of Analysis (COA) that is shipped with the commercialized product. Surface Tension (dyn/cm) of 3M™ Electronic Surfactant 4300 in Various Solutions Solution 0 ppm 50 ppm 100 ppm 200 ppm 2000 ppm 85% H3PO4 74 19 19 19 19 16:1:1:2 PANA 62 25 20 20 19 7:1 BOEB 70 21 21 21+ 18+ 500:1 BOEC 56 21 21+ 21+ 21+ A – 16 parts 85% H3PO4, 1 part glacial acetic acid, 1 part 70% HNO3, and 2 parts water by volume B – 7 parts 40% ammonium fluoride to 1 part 49% hydrofluoric acid by volume C – 500 parts 40% ammonium fluoride to 1 part 49% hydrofluoric acid by volume + – Not fully soluble * Concentrations listed are 3M™ Electronic Surfactant 4300 in solution by weight based on active material * Surface tension measured using Wilhelmy plate method of ASTM D1331 Surface Tension (dyn/cm) of 3M™ Electronic Surfactant 4300 in Various Solutions Solution 0 ppm 100 ppm 200 ppm 500 ppm 1000 ppm 2000 ppm Water 73 35 31 23 21 20 1:1:5 NH3:H2O2:H2OA 72 27 22 19 19+ 1:1:5 HCl:H2O2:H2OB 72 19 18 18 19 18 100: 1 HFC 72 28 24 19 18+ 18+ 2.38% TMAH 73 24 20 19 19+ 19+ A – SC-1, 1 part 29% NH3, 1 part 30% H2O2 and 5 parts water by volume B – SC-2, 1 part 29% HCl, 1 part 30% H2O2 and 5 parts water by volume C – 1 part 49% HF and 100 parts water by volume + – Not fully soluble * Concentrations listed are 3M™ Electronic Surfactant 4300 in solution by weight based on active material * Surface tension measured using Wilhelmy plate method of ASTM D1331 Surface Tension (dyn/cm) of 3M™ Electronic Surfactant 4300 in 85% H3PO4 at 160C Concentration Initial 5 days 8 days 50 ppm 20 20 29 100 ppm 19 19 19 200 ppm 19 19 19 * Concentrations listed are 3M™ Electronic Surfactant 4300 in solution by weight based on active material * Surface tension measured using Wilhelmy plate method of ASTM D1331 Product Safety and Handling 3M™ Electronic Surfactant 4300 is intended for use in cleaning and etch solutions at microelectronics processing and semiconductor, flat panel display and solar panel fabrication facilities. The recommended method of disposal is high temperature incineration in a facility capable of handling halogenated materials. Release of 3M™ Electronic Surfactant 4300 to the environment must be prevented. Prevention includes, but is not limited to, treatment of surfactant containing aqueous waste streams. For additional product safety and handling information, please read the product label and Material Safety Data Sheet before using this product.
3M™ Electronic Surfactant 4300 Regulatory The components of 3M™ Electronic Surfactant 4300 are in compliance with the chemical notification requirements of the United States (TSCA). Certain restrictions apply. Contact 3M representative for an update on the regulatory status of 3M™ Electronic Surfactant 4300. Storage and Shelf Life The shelf life of 3M™ Electronic Surfactant 4300 is 36 months from the date of manufacture when stored in the original packaging materials and stored at 21°C (70°F) and 50% relative humidity. Certificate of Analysis (COA) The 3M Certificate of Analysis (COA) for this product is established when the product is manufactured and deemed commercially available from 3M. The COA contains the 3M test methods, specifications limits and test results for the product’s performance attributes that the product will be supplied against. Contact your local 3M representative for this product’s COA.
3M™ Electronic Surfactant 4300 Safety Data Sheet: Consult Safety Data Sheet before use. Regulatory: For regulatory information about this product, contact your 3M representative. Technical Information: The technical information, recommendations and other statements contained in this document are based upon tests or experience that 3M believes are reliable, but the accuracy or completeness of such information is not guaranteed. Product Use: Many factors beyond 3M’s control and uniquely within user’s control can affect the use and performance of a 3M product in a particular application. Given the variety of factors that can affect the use and performance of a 3M product, user is solely responsible for evaluating the 3M product and determining whether it is fit for a particular purpose and suitable for user’s method of application. Warranty, Limited Remedy, and Disclaimer: Unless an additional warranty is specifically stated on the applicable 3M product packaging or product literature, 3M warrants that each 3M product meets the applicable 3M product specification at the time 3M ships the product. 3M MAKES NO OTHER WARRANTIES OR CONDITIONS, EXPRESS OR IMPLIED, INCLUDING, BUT NOT LIMITED TO, ANY IMPLIED WARRANTY OR CONDITION OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR ANY IMPLIED WARRANTY OR CONDITION ARISING OUT OF A COURSE OF DEALING, CUSTOM OR USAGE OR TRADE. If the 3M product does not conform to this warranty, then the sole and exclusive remedy is, at 3M’s option, replacement of the 3M product or refund of the purchase price. Limitation of Liability: Except where prohibited by law, 3M will not be liable for any loss or damage arising from the 3M product, whether direct, indirect, special, incidental or consequential, regardless of the legal theory asserted, including warranty, contract, negligence or strict liability. Electronics Materials Solutions Division 3M Center, Building 224-3N-11 St. Paul, MN 55144-1000 1-800-251-8634 phone 651-778-4244 fax www.3M.com/electronics 3M is a trademarks of 3M Company. Please recycle. ©3M 2020. All rights reserved. 60-5005-0208-7