4200 3M | Alldatasheet

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Technical content

3M™ Electronic Surfactant 4200 Product Description 3M™ Electronic Surfactant 4200 was designed as an additive to improve wetting in buffered HF (BHF) or buffered oxide etch (BOE) solutions in semiconductor, flat panel display and solar panel applications. 3M surfactant 4200 is an anionic fluorochemical surfactant having 25% active material in dilute aqueous ammonia. When used in BOE/HF solutions, 3M surfactant 4200 significantly lowers the surface tension and improves the wetting of the solution . This improved wetting can improve the etch uniformity of BOE/BHF solutions while having little to no effect on the etch rate. Aligning with semiconductor clean processing, 3M surfactant 4200 has low metals (typically <500 ppb of specified metals) and solutions can be filtered without impacting the surfactant performance. 3M surfactant 4200 has low adsorption to wafer surfaces, and complete removal can be achieved by using a bake step following the etch process. Key Features

  • Improved wetting of etch solutions
  • Little to no effect on the etch rate
  • Solubility in wide range of BOE / BHF blend ratios
  • Effective at low concentrations
  • Low metals
  • Filterable
  • Limited surface adsorption
  • Surfactant is volatile and can be removed by heating
  • Low foaming

Applications

  • Cleaning or etching of silicon, quartz or glass surfaces in manufacture of semiconductors, flat panel displays and solar panels Composition Physical Properties Note: The following technical information and data should be considered representative or typical only and should not be used for specification purposes. Component 3M™ Electronic Surfactant 4200 Ammonium fluoroalkyl sulfonamide 25% by weight Water 75% by weight Property 3M™ Electronic Surfactant 4200 Appearance Clear, colorless liquid Specific Gravity 1.14 (9.5 lb/gal; 1.14 kg/L) Surfactant Type Anionic Technical Data | September 2020

3M™ Electronic Surfactant 4200 Typical Performance Characteristics Note: The following technical information and data should be considered representative or typical only and should not be used for specification purposes. Final product specifications and testing methods will be outlined in the products Certificate of Analysis (COA) that is shipped with the commercialized product. Surface Tension (dyn/cm) of 3M™ Electronic Surfactant 4200 in Various Solutions Solution 0 ppm 50 ppm 100 ppm 200 ppm 300 ppm 7:1 Buffered HFA 70 19 20 20+ 20+ 500:1 Buffered HFB 56 20 17 17 18+ A – 7 parts 40% ammonium fluoride to 1 part 49% hydrofluoric acid by volume B – 500 parts 40% ammonium fluoride to 1 part 49% hydrofluoric acid by volume + – Not fully soluble * Concentration of 3M™ Electronic Surfactant 4200 by weight based on active material * Surface tension measured using Wilhelmy plate method of ASTM D1331 Surface Tension (dyn/cm) of 3M™ Electronic Surfactant 4200 in Various Solutions Solution 0 ppm 500 ppm 1000 ppm 2000 ppm Water 73 68 62 57 100:1 Hydrofluoric AcidA 72 28 18 18 A – 100 parts water to 1 part 49% hydrofluoric acid by volume + – Not fully soluble * Concentration of 3M™ Electronic Surfactant 4200 by weight based on active material * Surface tension measured using Wilhelmy plate method of ASTM D1331 Product Safety and Handling 3M™ Electronic Surfactant 4200 is intended for use in semiconductor wafer fabs and manufacture of solar panels and flat panel displays. The recommended method of disposal is high temperature incineration in a facility capable of handling halogenated materials. Release of 3M™ Electronic Surfactant 4200 to the environment must be prevented. Prevention includes, but is not limited to, treatment of surfactant containing aqueous waste streams. For additional product safety and handling information, please read the product label and Material Safety Data Sheet before using this product. Regulatory The components of 3M™ Electronic Surfactant 4200 are in compliance with the chemical notification requirements of the United States (TSCA), China (IECSC), Taiwan (TCSI), and Korea (KECI). Certain restrictions apply. Contact 3M representative for an update on the regulatory status of 3M™ Electronic Surfactant 4200. Storage and Shelf Life The shelf life of 3M™ Electronic Surfactant 4200 is 24 months from the date of manufacture when stored in the original packaging materials and stored at 21°C (70°F) and 50% relative humidity. Certificate of Analysis (COA) The 3M Certificate of Analysis (COA) for this product is established when the product i s manufactured and deemed commercially available from 3M. The COA contains the 3M test methods, specifications limits and test results for the product’s performance attributes that the product will be supplied against. Contact your local 3M representative for this product’s COA.

3M™ Electronic Surfactant 4200 Safety Data Sheet: Consult Safety Data Sheet before use. Regulatory: For regulatory information about this product, contact your 3M representative. Technical Information: The technical information, recommendations and other statements contained in this document are based upon tests or experience that 3M believes are reliable, but the accuracy or completeness of such information is not guaranteed. Product Use: Many factors beyond 3M’s control and uniquely within user’s control can affect the use and performance of a 3M product in a particular application. Given the variety of factors that can affect the use and performance of a 3M product, user is solely responsible for evaluating the 3M product and determining whether it is fit for a particular purpose and suitable for user’s method of application. Warranty, Limited Remedy, and Disclaimer: Unless an additional warranty is specifically stated on the applicable 3M product packaging or product literature, 3M warrants that each 3M product meets the applicable 3M product specification at the time 3M ships the product. 3M MAKES NO OTHER WARRANTIES OR CONDITIONS, EXPRESS OR IMPLIED, INCLUDING, BUT NOT LIMITED TO, ANY IMPLIED WARRANTY OR CONDITION OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR ANY IMPLIED WARRANTY OR CONDITION ARISING OUT OF A COURSE OF DEALING, CUSTOM OR USAGE OR TRADE. If the 3M product does not conform to this warranty, then the sole and exclusive remedy is, at 3M’s option, replacement of the 3M product or refund of the purchase price. Limitation of Liability: Except where prohibited by law, 3M will not be liable for any loss or damage arising from the 3M product, whether direct, indirect, special, incidental or consequential, regardless of the legal theory asserted, including warranty, contract, negligence or strict liability. Electronics Materials Solutions Division 3M Center, Building 224-3N-11 St. Paul, MN 55144-1000 1-800-251-8634 phone 651-778-4244 fax www.3M.com/electronics 3M are trademarks of 3M Company. Please recycle. ©3M 2020. All rights reserved. 60-5005-0207-9