19258_PE44 VAT | Alldatasheet

Document overview

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  • PDF pages: 25

Technical content

Datasheet sections

  • 1 Description of product
  • 1.1 Identification of product
  • 1.2 Use of product
  • 1.3 Related documents
  • 1.4 Important information
  • 1.5 Technical data
  • 2 Safety
  • 2.1 Compulsory reading material
  • 2.2 Danger levels
  • 2.3 Personnel qualifications
  • 2.4 Safety labels
  • 3 Design and Function
  • 3.1 Design
  • 3.2 Function
  • 4 Installation
  • 4.1 Unpacking
  • 4.2 Installation into the system
  • 4.2.1 Admissible forces and bending moments
  • 4.3 Compressed air connection
  • 4.4 Electrical connection
  • 5 Operation
  • 5.1 Normal operation
  • 5.2 Operation under increased temperature
  • 5.3 Behavior in case of compressed air pressure drop
  • 5.4 Behavior in case of power failure
  • 5.4.1 Manual emergency operation
  • 5.5 Trouble shooting
  • 6 Maintenance
  • 6.1 Maintenance intervals
  • 6.2 Required tools
  • 6.3 Replacement of valve gate / mechanism unit
  • 7 Repairs
  • 8 Dismounting and Storage
  • 8.1 Dismounting
  • 8.2 Storage
  • 9 Packaging and Transport
  • 9.1 Packaging
  • 9.2 Transport
  • 10 Disposal
  • 11 Spare parts

Installation, Operating & Maintenance Instructions 295070EA Edition 2014-02-04 Large HV / UHV gate valve with double acting pneumatic actuator Series 191 / 192 DN 400 – 800 mm (I. D. 16" – 32") This manual is valid for the following product ordering numbers: 19152- . E14 / 24 / 34 / 44 19154- . E14 / 24 / 34 / 44 19156- . E14 / 24 / 34 / 44 19158- . E14 / 24 / 34 / 44 19252- . E14 / 24 / 34 / 44 19254- . E14 / 24 / 34 / 44 19256- . E14 / 24 / 34 / 44 19258- . E14 / 24 / 34 / 44 Sample picture

2/25 Edition 2014-02-04 295070EA Imprint Manufacturer VAT Vakuumventile AG, CH-9469 Haag, Switzerland Website: Phone: Fax: Email: www.vatvalve.com +41 81 771 61 61 +41 81 771 48 30 CH@vatvalve.com Publisher VAT Vakuumventile AG, CH-9469 Haag, Switzerland Editor VAT Vakuumventile AG, CH-9469 Haag, Switzerland Print VAT Vakuumventile AG, CH-9469 Haag, Switzerland Copyright © VAT Vakuumventile AG 2014 No part of these Instructions may be reproduced in any way (photo - copies, microfilms or any other reproduction processes) nor may it be manipulated with electronic systems, duplicated or distributed without written permission from VAT. Offenders are liable to pay damages. The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is str ictly forbidden to give copies of the VAT firmware to other people. The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle third parties to consider these names to be unprotected and to use them freely. This is in accordance with the meaning of the laws and acts covering brand names and trademarks.

DESCRIPTION OF PRODUCT Series 191 / 192 4/25 Edition 2014-02-04 295070EA

1 Description of product

1.1 Identification of product

The fabrication number and order number are fixed on the product directly or by means of an identification plate. made in Switzerland Fabrication No.: Fabrication number Order number

1.2 Use of product

Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT.

1.3 Related documents

1.4 Important information

This symbol points to a very important statement that requires particular attention. Example: VAT disclaims any liability for damages resulting from inappropriate packaging.

1.5 Technical data

See product data sheet and dimensional drawing.

295070EA Edition 2014-02-04 5/25

2 Safety

2.1 Compulsory reading material

Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life. NOTICE Lack of knowledge Failing to read this manual may result in property damage. Firstly, read manual. These Installation, Operating & Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system. They must be stored together with the other documentation and accessible for anybody who is authorized to work with the system at any time.

2.2 Danger levels

Indicates a hazardous situation which, if not avoided, will result in death or serious injury. WARNING Medium risk Indicates a hazardous situation which, if not avoided, could result in death or serious injury. CAUTION Low risk Indicates a hazardous situation which, if not avoided, may result in minor or moderate injury. NOTICE Command Indicates a hazardous situation which, if not avoided, may result in property damage.

6/25 Edition 2014-02-04 295070EA

2.3 Personnel qualifications

Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work.

2.4 Safety labels

Label Part No. Location on valve T-9001-156 Protective cover Table 2-1

Series 191 / 192 DESIGN AND FUNCTION 295070EA Edition 2014-02-04 7/25

3 Design and Function

3.1 Design

1 Sealing surface

2 Valve body

3 Body cover

4 Actuator

3.2 Function

The valve features the VATLOCK sealing technology. This means, the valve is mechani- cally locked in the closed position. In the open position, the mechanism is not locked. Leaf springs hold gate and counter plate against the carriage with the ball retainers. The ball pairs are in the detents. For closing, the mechanism is moved forward into the closing position. The locking starts after the leaf spring stop touches the body. The ball retainers move the ball pairs out of the detents. Gate and counter plate are spread apart. The gate seal is pressed against the sealing surface without scuffing. The arrangement of the ball pairs ensures an increase of the sealing force with vacuum on either side of the gate. During opening the movements proceed in the reverse order; see «Figure 3-2».

1 Valve gate

2 Counter-plate

3 Leaf springs

4 Ball pairs

5 Ball detents

6 Gate seal

7 Spring stop

INSTALLATION Series 191 / 192 8/25 Edition 2014-02-04 295070EA

4 Installation

Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Heavy weight Physical overstraining. Use a crane to lift the product.

4.1 Unpacking

Make sure that the supplied products are in accordance with your order. Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. Store the original packaging material. It may be useful if products must be returned to VAT. The valve can be lifted only at the five eyebolt threads; see «Figure 4-1» below.

1 Eyebolts for

Series 191 / 192 INSTALLATION 295070EA Edition 2014-02-04 9/25

4.2 Installation into the system

Human body parts may get jammed and severely injured. Do not connect or supply electrical power and compressed air before the product is completely mounted in the system. NOTICE Contamination Product may get contaminated. Always wear cleanroom gloves when handling the product. NOTICE Inappropriate tools Sealing surfaces may get damaged. Do not use sharp-edged tools. NOTICE Wrong tightening torque Valve body and screws may get damaged. Use tightening torque according the size of the screws. NOTICE Too long screws Valve body may get deformed and / or malfunctions may occur. Use only screws recommended by VAT. 1. Remove protective covers from body flanges. 2. Clean sealing surfaces and seals of both flanges; see (1) and (2) according to «Figure 4-2» on page 10. The valve seat side is marked with the symbol « » on flange «A». 3. Lift the valve to the mounting position, use only the five eyebolts; see «Figure 4-1» on page 8. 4. Mount the four screws (3) according to «Figure 4-2» on page 10, evenly in crosswise order until the seal touches the sealing surface.

INSTALLATION Series 191 / 192 10/25 Edition 2014-02-04 295070EA 5. Tighten all screws with the torques appropriate for their property classes.

1 Flange A

2 Flange B

3 Screws

4.2.1 Admissible forces and bending moments

Forces from evacuating the system, from the weight of other components or from baking can lead to deformation of the valve body and to malfunction of the valve. The stress has to be relieved by suitable means; see «Table 4-1» below. The following forces or bending moments are admissible: DN (nom. I.D.) Axial tensile or com- pressive force «FA» Bending moment «M» mm inch N lbf Nm lbf ∙ ft 400 16 7840 1760 980 725 500 20 8820 1980 1078 800 630 25 9800 2200 1176 870 800 32 9800 2200 1274 940 If a combination of both forces («FA» and «M») occurs, the values mentioned above are invalid. Please contact VAT for more information. Table 4-1 FA M

Series 191 / 192 INSTALLATION 295070EA Edition 2014-02-04 11/25

4.3 Compressed air connection

Risk of injury when compressed air is connected to the valve. Connect compressed air only when: – valve is installed in the vacuum system – moving parts cannot be touched Use clean, dry or slightly oiled air only. Admissible air pressure range, see product data sheet. 1. Connect compressed air according to the product data sheet and dimensional drawing.

4.4 Electrical connection

Parts being under voltage will result in serious injury or death. Do not touch parts being under voltage. NOTICE Wrong voltage Electrical components may get damaged. Supply electrical components with the correct voltage. 1. Connect solenoid valve according to the product data sheet and dimensional drawing. 2. Connect position indicator according to the product data sheet and dimensional drawing.

OPERATION Series 191 / 192 12/25 Edition 2014-02-04 295070EA

5 Operation

Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Movable parts Human body parts may get jammed and severely injured. Do not operate before product is installed completely into the vacuum system.

5.1 Normal operation

Valve is opened and closed pneumatically.

5.2 Operation under increased temperature

Maximum allowed temperature, see product data sheet.

5.3 Behavior in case of compressed air pressure drop

See product data sheet.

5.4 Behavior in case of power failure

See product data sheet.

5.4.1 Manual emergency operation

Human body parts may get jammed and severely injured. Keep human body parts away from movable parts.

Series 191 / 192 OPERATION 295070EA Edition 2014-02-04 13/25 Standard solenoid valve To close the valve: Turn the slotted screw (1) counter-clockwise to its stop. To open the valve: Turn the slotted screw (1) clockwise to its stop.

1 Slotted screw

For remote operation make sure that the slotted screw is turned counter-clockwise to its stop. Impulse solenoid valve To close the valve: Turn the slotted screw (3) – coil CLOSE – clockwise to its stop. As soon as valve is closed, turn screw back to its original position. To open the valve: Turn the slotted screw (2) – coil OPEN – clockwise to its stop. As soon as valve is open, turn screw back to its original position.

1 Coil OPEN

2 Slotted screw of coil OPEN

3 Slotted screw of coil CLOSE

4 Coil CLOSE

For remote operation make sure that both slotted screws are turned counter- clockwise to their stop (original position).

OPERATION Series 191 / 192 14/25 Edition 2014-02-04 295070EA

5.5 Trouble shooting

«4.3 Compressed air connection» Operating pressure Adjust operating pressure Product data sheet Voltage at solenoid valve Connect voltage «4.4 Electrical connection» Leak at gate Gate seal all right? Replace valve gate «6.3 Replacement of valve gate / mechanism unit» Gate damaged or contaminated? Replace valve gate «6.3 Replacement of valve gate / mechanism unit» Operating pressure Adjust operating pressure Product data sheet Leak at body Bonnet seal and sealing surface all right? Clean sealing surface, if necessary, replace bonnet seal «6.3 Replacement of valve gate / mechanism unit» Bellows all right? Contact VAT www.vatvalve.com Table 5-1 If you need any further information, please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

Series 191 / 192 MAINTENANCE 295070EA Edition 2014-02-04 15/25

6 Maintenance

Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Heavy weight Physical overstraining. Use a crane to lift the valve insert. WARNING Hazardous components Human body parts may get jammed and severely injured. Before starting maintenance: – disconnect compressed air supply – disconnect electrical power supply WARNING Movable parts Human body parts may get jammed and severely injured. Keep human body parts away from movable parts.

6.1 Maintenance intervals

Under clean operating conditions the valve does not require any maintenance during 10 000 to 20 000 cycles depend on the valve size; see product data sheet. After these cycles, VAT recommends replacing the mechanism unit; see chapter «6.3 Replacement of valve gate / mechanism unit». For more information or a general overhaul please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

6.2 Required tools

Cleanroom wiper soaked with alcohol (2% methyl ethyl ketone)

MAINTENANCE Series 191 / 192 16/25 Edition 2014-02-04 295070EA

6.3 Replacement of valve gate / mechanism unit

Human body parts may get jammed and severely injured. Do not put human body parts between valve gate and spring steel sheet. NOTICE Contamination Product may get contaminated. Always wear cleanroom gloves when handling the product. NOTICE Inappropriate tools Sealing surfaces may get damaged. Do not use sharp-edged tools. 1. Vent chambers on either side to atmospheric pressure. 2. Open the valve. 3. Disconnect compressed air supply. 4. Disconnect electrical power supply. 5. Remove the screws (3, 4) from the body cover (8) in crosswise order; see «Figure 6-1» on page 17. 6. Lift actuator / mechanism unit carefully from body without touching the body wall. Do not touch the actuator with the lifting ropes, if you lift the actuator + mechanism out of the valve body! 7. If the mechanism unit is out of the valve body you have the opportunity to clean the mechanism unit with alcohol. 8. If the plate seal at the mechanism unit and the bonnet seal (6) are not damaged you should clean them with cleanroom wiper. Do not clean the Sealing with alcohol, because alcohol may damage the surface of the Sealing, by O-ring sealing, we recommend to treat it with a small amount of vacuum grease. 9. Lift the actuator / mechanism unit back into the valve body.

Series 191 / 192 MAINTENANCE 295070EA Edition 2014-02-04 17/25 10. Tighten the screws (3, 4) from the body cover (8) according the sealing technology with the correct tightening torque. 11. Connect electrical power supply. 12. Connect compressed air supply. 13. Close the valve.

1 Lifting ropes

2 Eyebolts

3 Body cover screws

4 Valve body screws

5 Valve body

6 Bonnet seal

7 Bearings

8 Body cover

Valve is ready for use.

18/25 Edition 2014-02-04 295070EA

7 Repairs

Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

Series 191 / 192 DISMOUNTING AND STORAGE 295070EA Edition 2014-02-04 19/25

8 Dismounting and Storage

Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Heavy weight Physical overstraining. Use a crane to lift the product. WARNING Hazardous components Human body parts may get jammed and severely injured. Before dismounting the product – disconnect compressed air supply – disconnect electrical power supply WARNING Movable parts Human body parts may get jammed and severely injured. Keep human body parts away from movable parts. NOTICE Contamination Product may get contaminated. Always wear cleanroom gloves when handling the product.

DISMOUNTING AND STORAGE Series 191 / 192 20/25 Edition 2014-02-04 295070EA

8.1 Dismounting

Valve mechanism may get damaged if valve is in open position. Close valve before dismounting the valve from the system. 1. Close valve. 2. Carry out the steps according to chapter «4 Installation» in reverse order. Pay attention to the safety instructions!

8.2 Storage

Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. 1. Clean / decontaminate valve. 2. Cover all valve openings with a protective foil. 3. Pack valve appropriately, by using the original packaging material.

Series 191 / 192 PACKAGING AND TRANSPORT 295070EA Edition 2014-02-04 21/25

9 Packaging and Transport

Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Heavy weight Physical overstraining. Use a crane to lift the product. WARNING Harmful substances Risk of injury in case of contact with harmful substances. Remove harmful substances (e. g. toxic, caustic or microbiological ones) from valve before you return the valve to VAT. NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. When returning products to VAT, please fill out the VAT form «Declaration of Chemical Contamination» and send it to VAT in advance. The form can be downloaded from our website www.vatvalve.com. If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. If products are sent to VAT in contaminated condition, VAT will carry out the decontamination procedure at the customer's expense.

PACKAGING AND TRANSPORT Series 191 / 192 22/25 Edition 2014-02-04 295070EA

9.1 Packaging

Valve mechanism may get damaged if valve is in open position. Make sure that the valve is closed. 1. Cover all valve openings with a protective foil. 2. Pack valve appropriately, by using the original packaging material. VAT disclaims any liability for damages resulting from inappropriate packaging.

9.2 Transport

Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging.

295070EA Edition 2014-02-04 23/25

10 Disposal

Environmental pollution. Discard products and parts according to the local regulations.

SPARE PARTS Series 191 / 192 24/25 Edition 2014-02-04 295070EA

11 Spare parts

Non-original spare parts may cause damage to the product. Use original spare parts from VAT only. Please specify the fabrication number of the product when you place an order for spare parts; see chapter «1.1 Identification of product». This is to ensure that the appropriate spare parts are supplied. VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. «Table 11-1» only contains spare parts that may be replaced by the customer. If you need any other spare parts, please contact one of our service centers. You will find the addresses on our website www.vatvalve.com. Description Part No. Quantity per valve Maintenance procedure see chapter Seal kit on request 1 «6.3 Replacement of valve gate / mechanism unit» Gate O-ring on request 1 «6.3 Replacement of valve gate / mechanism unit» Bonnet flange O-ring on request 1 «6.3 Replacement of valve gate / mechanism unit» Table 11-1