01028_KE08 VAT | Alldatasheet

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Technical content

CH-9469 Haag, Schweiz Product data sheet Mini UHV gate valve, Series 010, DN 28 (ID 1’’) Created by: MAEM Release date: 2012-12-13 1 of 1 Modified by: Release date: 299356EA

Description

– with position indicator Feedthrough Bellows Technical data Leak rate – Valve body – Valve seat < 5 · 10-10 mbar ls-1 < 1 · 10-9 mbar ls-1 Pressure range 1 · 10-10 mbar to 2 bar (abs) Differential pressure on the gate 2 bar Differential pressure at opening 30 mbar Conductance (molecular flow) 38 ls-1 Cycles until first service 50 000 Temperature (Maximum values: depending on operating conditions and sealing materials) – Valve Body – Actuator – Position indicator ≤ 250 °C open / ≤ 200 °C closed (bake-out max. 24h) ≤ 250 °C ≤ 80 °C Heating and cooling rate 50 °C h-1 Material – Valve Body – Gate – Bellows AISI 304 (1.4301), AISI 316L (1.4435) AISI 304 (1.4301), AISI 316L (1.4404, 1.4435) Seal – Bonnet – Gate metal FKM (Viton®), vulcanized Mounting position any Weight 1.8 kg / 4.0 lbs Position indicator Wiring diagram Type Micro switch Voltage

250 V AC

50 V DC

Current max. 5.0 A 3 A