Integrated silicon pressure sensor on-chip signal conditioned,
Document overview
- Manufacturer or author: NXP B.V.
- PDF pages: 32
Technical content
Datasheet sections
- 1 General description
- 2 Features and benefits
- 3 Applications
- 4 Ordering information
- 4.1 Ordering options
- 5 Block diagram
- 6 Pinning information
- 6.1 Pinning - Unibody packages
- 6.2 Pin description - Unibody packages
- 6.3 Pinning - Small Outline packages
- 6.4 Pin description - Small Outline packages
- 7 Limiting values
- 8 Recommended operating conditions
- 9 On-chip temperature compensation and
- 10 Pressure (P1) / Vacuum (P2) side
- 11 Minimum recommended footprint for
- 12 Package outline
- 13 Revision history
Integrated silicon pressure sensor on-chip signal conditioned, temperature compensated and calibrated Rev. 14 — 17 May 2024 Product data sheet
1 General description
The MPxx5010 series piezoresistive transducers are state-of-the-art monolithic silicon pressure sensors designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. The axial port has been modified to accommodate industrial grade tubing.
2 Features and benefits
- 5.0% maximum error over 0° to 85° C
- Ideally suited for microprocessor or microcontroller-based systems
- Durable epoxy unibody and thermoplastic (PPS) surface mount package
- Temperature compensated over –40° to +125° C
- Patented silicon shear stress strain gauge
- Available in differential and gauge configurations
- Available in surface mount (SMT) or through-hole (DIP) configurations
3 Applications
- Hospital beds
- HVAC
- Respiratory systems
- Process control
- Washing machine water level measurement (Reference AN1950)
- Ideally suited for microprocessor or microcontroller-based systems
- Appliance liquid level and pressure measurement
NXP Semiconductors MPX5010-MPXV5010-MPVZ5010 Integrated silicon pressure sensor on-chip signal conditioned, temperature compensated and calibrated
4 Ordering information
Unibody package (MPX5010 series) MPX5010DP SENSOR4F sensor package, 6 terminals, 2.54 mm pitch, 17.78 mm x 29.48 mm x 10.67 body SOT1756-1 MPX5010GP SENSOR6F sensor package, 6 terminals, 2.54 mm pitch, 17.78 mm x 29.47 mm x 8.01 mm body SOT1852-1 Small outline package (MPXV5010 series) MPXV5010DP S08 plastic, small outline package, 8 terminals, 2.54 mm pitch, 12.06. mm x 12.06 mm x 7.62 mm body SOT1693-1 MPXV5010GC6T1 S08 plastic, small outline package, 8 terminals, 2.54 mm pitch, 10.67. mm x 10.67 mm x 12.96 mm body SOT1854-1 MPXV5010GC7U S08 plastic, small outline package, 8 terminals, 2.54 mm pitch, 10.67. mm x 10.67 mm x 12.96 mm body SOT1863-1 MPXV5010GP S08 plastic, small outline package, 8 terminals, 2.54 mm pitch, 12.06. mm x 12.06 mm x 7.62 mm body SOT1693-3 Small outline package (Media resistant gel) (MPVZ5010 series) MPVZ5010GW6U S08 plastic, small outline package, 8 terminals, 2.54 mm pitch, 1.07 mm x 1.07 mm x 1.99 mm body SOT1691-2 MPVZ5010GW7U S08 plastic, small outline package, 8 terminals, 2.54 mm pitch, 1.07 mm x 1.07 mm x 1.99 mm body SOT1691-1 Table 1. Ordering information
4.1 Ordering options
ORDERING INFORMATION
# of Ports Pressure Type Device Name Case No. None Single Dual Gauge Differential Absolute Device Marking Unibody Package (MPX5010 Series) MPX5010DP 867C • • MPX5010DP MPX5010GP 867B • • MPX5010GP Small Outline Package (MPXV5010 Series) MPXV5010DP 1351 • • MPXV5010DP MPXV5010GC6T1 482A • • MPXV5010G MPXV5010GC7U 482C • • MPXV5010G MPXV5010GP 1369 • • MPXV5010GP Small Outline Package (Media Resistant Gel) (MPVZ5010 Series) MPVZ5010GW6U 1735 • • MZ5010GW MPVZ5010GW7U 1560 • • MZ5010GW Table 2. Ordering options MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
5 Block diagram
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. Figure 1. Fully Integrated Pressure Sensor Schematic
6 Pinning information
6.1 Pinning - Unibody packages
Figure 2. MPX5010DP - SOT1756-1 - Case 867C-05 Figure 3. MPX5010GP - SOT1852-1 - Case 867B-04 MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
6.2 Pin description - Unibody packages
This table defines the pin configuration for the Unibody packages indentified in Table 1. Table 3. Pin descriptions - Unibody pacakages
6.3 Pinning - Small Outline packages
Figure 4. MPXV5010DP - SOT1693-1 - Case 1351-01 Figure 5. MPXV5010GC6T1 - SOT1854-1 - Case 482A-01 Figure 6. MPXV5010GC7U - SOT1863-1 - Case 482C-03 MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 7. MPXV5010GP - SOT1693-3 - Case 1369-01 Figure 8. MPVZ5010GW6U - SOT1691-2 - Case 1735-01 Figure 9. MPVZ5010GW7U - SOT1691-1 - Case 1560-02
6.4 Pin description - Small Outline packages
This table defines the pin configuration for the Small Outline packages indentified in Table 1. Table 4. Pin descriptions - Small Outline packages MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
7 Limiting values
Table 5. Limiting values[1] [1] Exposure beyond the specified limits may cause permanent damage or degradation to the device.
8 Recommended operating conditions
Table 6. Recommended operating conditions [1] Device is ratiometric within this specified excitation range. [2] Offset (Voff) is defined as the output voltage at the minimum rated pressure. [3] Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. minimum or maximum operating temperature points, with zero differential pressure applied. maximum rated pressure, at 25°C. TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative to 25°C. Variation from Nominal:The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C. MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
[7] Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. [8] Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
9 On-chip temperature compensation and calibration
compensation, calibration and signal conditioning circuitry onto a single monolithic chip. transmitted to the sensor diaphragm. microprocessor or microcontroller. Proper decoupling of the power supply is recommended. Figure 11. The output will saturate outside of the specified pressure range. Figure 10. Cross-sectional diagram SOP (not to scale) Figure 11. Recommended power supply decoupling and output filtering Note: For additional output filtering, please refer to Application Note AN1646. MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 14. Pressure error band
10 Pressure (P1) / Vacuum (P2) side identification table
pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using Table 7. Table 7. Pressure (P1) side identification MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
11 Minimum recommended footprint for surface mounted applications
must be the correct size to ensure proper solder connection interface between the board and the package. recommended to design boards with a solder mask layer to avoid bridging and shorting between solder pads.
0.100 TYP 8X
0.060 TYP 8X
Figure 15. SOP Footprint (Case 482) MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 16. SOT1691-1 Package Outline MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 17. SOT1691-1 Package Outline Detail MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 18. SOT1691-1 Package Outline Notes MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 19. SOT1691-2 Package Outline MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 20. SOT1691-2 Package Outline Detail MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 21. SOT1691-2 Package Outline Notes MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 22. SOT1693-1 Package Outline MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 23. SOT1693-1 Package Outline Notes MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 24. SOT1693-3 Package Outline MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 25. SOT1693-3 Package Outline Notes MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 26. SOT1756-1 Package Outline MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 27. SOT1852-1 Package Outline MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 28. SOT1852-1 Package Outline Notes MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 29. SOT1854-1 Package Outline MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 30. SOT1854-1 Package Outline Notes MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 31. SOT1863-1 Package Outline MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
Figure 32. SOT1863-1 Package Outline Notes MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
company name where appropriate.
- Section 4, Table 1 and Section 4.1 Table 2, removed devices MPX5010GS, MPX5010GSX, MPXV5010G6U, MPXV5010GC6U, MPVZ5010G7U, and MPVZ5010 G6U.
- Section 8, Table 6, Sensitivity Unit: Revised "mV/mm" to "mV/kPa". MPX5010 v.13 October 2012 • Deleted references to device number MPVZ5010G6T1, MPVZ5010G6U/T1 and MPVZ5010G6U/6T1 throughout the document.
Table 8. Revision history MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved.
NXP Semiconductors MPX5010-MPXV5010-MPVZ5010 Integrated silicon pressure sensor on-chip signal conditioned, temperature compensated and calibrated Legal information Data sheet status Document status[1][2] Product status[3] Definition Objective [short] data sheet Development This document contains data from the objective specification for product development. Preliminary [short] data sheet Qualification This document contains data from the preliminary specification. Product [short] data sheet Production This document contains the product specification. [1] Please consult the most recently issued document before initiating or completing a design. [2] The term 'short data sheet' is explained in section "Definitions". [3] The product status of device(s) described in this document may have changed since this document was published and may differ in case of multiple devices. The latest product status information is available on the Internet at URL https://www.nxp.com. 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NXP Semiconductors MPX5010-MPXV5010-MPVZ5010 Integrated silicon pressure sensor on-chip signal conditioned, temperature compensated and calibrated Tables Figures Fig. 1. Fully Integrated Pressure Sensor Fig. 4. MPXV5010DP - SOT1693-1 - Case Fig. 5. MPXV5010GC6T1 - SOT1854-1 - Case Fig. 6. MPXV5010GC7U - SOT1863-1 - Case Fig. 7. MPXV5010GP - SOT1693-3 - Case Fig. 8. MPVZ5010GW6U - SOT1691-2 - Case Fig. 9. MPVZ5010GW7U - SOT1691-1 - Case Fig. 11. Recommended power supply decoupling MPX5010 All information provided in this document is subject to legal disclaimers. © 2024 NXP B.V. All rights reserved. Product data sheet Rev. 14 — 17 May 2024